Process and Equipment Control in Microelectronic Manufacturing

Process and Equipment Control in Microelectronic Manufacturing PDF Author:
Publisher:
ISBN:
Category : Integrated circuits
Languages : en
Pages : 222

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Book Description

Process and Equipment Control in Microelectronic Manufacturing

Process and Equipment Control in Microelectronic Manufacturing PDF Author:
Publisher:
ISBN:
Category : Integrated circuits
Languages : en
Pages : 222

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Book Description


Fundamentals of Semiconductor Manufacturing and Process Control

Fundamentals of Semiconductor Manufacturing and Process Control PDF Author: Gary S. May
Publisher: John Wiley & Sons
ISBN: 0471790273
Category : Technology & Engineering
Languages : en
Pages : 428

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Book Description
A practical guide to semiconductor manufacturing from processcontrol to yield modeling and experimental design Fundamentals of Semiconductor Manufacturing and Process Controlcovers all issues involved in manufacturing microelectronic devicesand circuits, including fabrication sequences, process control,experimental design, process modeling, yield modeling, and CIM/CAMsystems. Readers are introduced to both the theory and practice ofall basic manufacturing concepts. Following an overview of manufacturing and technology, the textexplores process monitoring methods, including those that focus onproduct wafers and those that focus on the equipment used toproduce wafers. Next, the text sets forth some fundamentals ofstatistics and yield modeling, which set the foundation for adetailed discussion of how statistical process control is used toanalyze quality and improve yields. The discussion of statistical experimental design offers readers apowerful approach for systematically varying controllable processconditions and determining their impact on output parameters thatmeasure quality. The authors introduce process modeling concepts,including several advanced process control topics such asrun-by-run, supervisory control, and process and equipmentdiagnosis. Critical coverage includes the following: * Combines process control and semiconductor manufacturing * Unique treatment of system and software technology and managementof overall manufacturing systems * Chapters include case studies, sample problems, and suggestedexercises * Instructor support includes electronic copies of the figures andan instructor's manual Graduate-level students and industrial practitioners will benefitfrom the detailed exami?nation of how electronic materials andsupplies are converted into finished integrated circuits andelectronic products in a high-volume manufacturingenvironment. An Instructor's Manual presenting detailed solutions to all theproblems in the book is available from the Wiley editorialdepartment. An Instructor Support FTP site is also available.

Manufacturing Process Control for Microelectronic Devices and Circuits

Manufacturing Process Control for Microelectronic Devices and Circuits PDF Author: Anant G. Sabnis
Publisher:
ISBN:
Category : Technology & Engineering
Languages : en
Pages : 268

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Book Description


Reliability and Quality in Microelectronic Manufacturing

Reliability and Quality in Microelectronic Manufacturing PDF Author: A. Christou
Publisher: RIAC
ISBN: 1933904151
Category : Microelectronics
Languages : en
Pages : 410

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Book Description


Process, Equipment, and Materials Control in Integrated Circuit Manufacturing

Process, Equipment, and Materials Control in Integrated Circuit Manufacturing PDF Author:
Publisher:
ISBN:
Category : Dielectric films
Languages : en
Pages : 332

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Book Description


Microelectronic Processes, Sensors, and Controls

Microelectronic Processes, Sensors, and Controls PDF Author: James Bondur
Publisher:
ISBN:
Category : Technology & Engineering
Languages : en
Pages : 480

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Book Description


Microelectronics Manufacturing Diagnostics Handbook

Microelectronics Manufacturing Diagnostics Handbook PDF Author: Abraham Landzberg
Publisher: Springer Science & Business Media
ISBN: 1461520290
Category : Technology & Engineering
Languages : en
Pages : 663

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Book Description
The world of microelectronics is filled with cusses measurement systems, manufacturing many success stories. From the use of semi control techniques, test, diagnostics, and fail ure analysis. It discusses methods for modeling conductors for powerful desktop computers to their use in maintaining optimum engine per and reducing defects, and for preventing de formance in modem automobiles, they have fects in the first place. The approach described, clearly improved our daily lives. The broad while geared to the microelectronics world, has useability of the technology is enabled, how applicability to any manufacturing process of similar complexity. The authors comprise some ever, only by the progress made in reducing their cost and improving their reliability. De of the best scientific minds in the world, and fect reduction receives a significant focus in our are practitioners of the art. The information modem manufacturing world, and high-quality captured here is world class. I know you will diagnostics is the key step in that process. find the material to be an excellent reference in of product failures enables step func Analysis your application. tion improvements in yield and reliability. which works to reduce cost and open up new Dr. Paul R. Low applications and technologies. IBM Vice President and This book describes the process ofdefect re of Technology Products General Manager duction in the microelectronics world.

Unit Manufacturing Processes

Unit Manufacturing Processes PDF Author: National Research Council
Publisher: National Academies Press
ISBN: 0309176670
Category : Technology & Engineering
Languages : en
Pages : 228

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Book Description
Manufacturing, reduced to its simplest form, involves the sequencing of product forms through a number of different processes. Each individual step, known as an unit manufacturing process, can be viewed as the fundamental building block of a nation's manufacturing capability. A committee of the National Research Council has prepared a report to help define national priorities for research in unit processes. It contains an organizing framework for unit process families, criteria for determining the criticality of a process or manufacturing technology, examples of research opportunities, and a prioritized list of enabling technologies that can lead to the manufacture of products of superior quality at competitive costs. The study was performed under the sponsorship of the National Science Foundation and the Defense Department's Manufacturing Technology Program.

Microelectronics Processing

Microelectronics Processing PDF Author: Dennis W. Hess
Publisher:
ISBN:
Category : Language Arts & Disciplines
Languages : en
Pages : 572

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Book Description
Although chemical engineering principles are at the heart of solid state process technology, until now no reference volume addressing this relationship was available. This is the first book of its kind to tie fundamental engineering concepts to solid state process technology. Discussing the basic concepts involved--liquid-phase epitaxy, physical and chemical vapor deposition, diffusion and oxidation in silicon, resists in microlithography, etc.--this volume will be particularly useful in chemical engineering courses. It offers a framework within which specialized courses in microelectronics processing can be organized. In addition, it serves as a valuable reference source for all industrial engineers working with the individual process steps covered.

Microelectronic Packaging

Microelectronic Packaging PDF Author: M. Datta
Publisher: CRC Press
ISBN: 020347368X
Category : Technology & Engineering
Languages : en
Pages : 564

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Book Description
Microelectronic Packaging analyzes the massive impact of electrochemical technologies on various levels of microelectronic packaging. Traditionally, interconnections within a chip were considered outside the realm of packaging technologies, but this book emphasizes the importance of chip wiring as a key aspect of microelectronic packaging, and focuses on electrochemical processing as an enabler of advanced chip metallization. Divided into five parts, the book begins by outlining the basics of electrochemical processing, defining the microelectronic packaging hierarchy, and emphasizing the impact of electrochemical technology on packaging. The second part discusses chip metallization topics including the development of robust barrier layers and alternative metallization materials. Part III explores key aspects of chip-package interconnect technologies, followed by Part IV's analysis of packages, boards, and connectors which covers materials development, technology trends in ceramic packages and multi-chip modules, and electroplated contact materials. Illustrating the importance of processing tools in enabling technology development, the book concludes with chapters on chemical mechanical planarization, electroplating, and wet etching/cleaning tools. Experts from industry, universities, and national laboratories submitted reviews on each of these subjects, capturing the technological advances made in each area. A detailed examination of how packaging responds to the challenges of Moore's law, this book serves as a timely and valuable reference for microelectronic packaging and processing professionals and other industrial technologists.