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Author: Senthil Prakash Theppakuttai Kom
Publisher:
ISBN: 9789034607232
Category :
Languages : en
Pages : 156
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Book Description
The revolutionary progress in semiconductor, communication, and information industries based on electronic and photonic technologies demands for the development and enhancement of new laser processes to support micro and nanotechnologies. This dissertation is aimed at exploring the use of lasers for micro and nano scale processing of glass and silicon, the most commonly used materials in the IC industry. The objective of the dissertation is two fold: (a) use lasers for locally micro bonding glass and silicon wafers, and (b) use lasers for nanopatterning glass and silicon substrates by circumventing the diffraction limit of light.
Author: Senthil Prakash Theppakuttai Kom
Publisher:
ISBN: 9789034607232
Category :
Languages : en
Pages : 156
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Book Description
The revolutionary progress in semiconductor, communication, and information industries based on electronic and photonic technologies demands for the development and enhancement of new laser processes to support micro and nanotechnologies. This dissertation is aimed at exploring the use of lasers for micro and nano scale processing of glass and silicon, the most commonly used materials in the IC industry. The objective of the dissertation is two fold: (a) use lasers for locally micro bonding glass and silicon wafers, and (b) use lasers for nanopatterning glass and silicon substrates by circumventing the diffraction limit of light.
Author: Jiwang Yan
Publisher: Elsevier
ISBN: 0128168803
Category : Technology & Engineering
Languages : en
Pages : 242
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Book Description
Micro and Nanoscale Laser Processing of Hard Brittle Materials examines general laser-material interactions within this type of material, focusing on the nanoprocessing technologies that these phenomena have given rise to. Sections cover laser machining, healing, recovery, sintering, surface modification, texturing and microstructuring. These technologies all benefit from the characteristics of laser processing, its highly localized heating ability, and its well-defined optical properties. The book also describes frontier applications of the developed technologies, thus further emphasizing the possibility of processing hard brittle materials into complex structures with functional surfaces at both the micro and nanoscale. Provides readers with a solid understanding of laser-material interactions Helps readers choose suitable laser parameters for processing hard brittle materials Demonstrates how micro and nanoscale laser processing can be used to machine brittle materials without fracture
Author: Koji Sugioka
Publisher: CRC Press
ISBN: 9814303690
Category : Science
Languages : en
Pages : 606
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Book Description
Over the past few decades, the rapid development of ultrafast lasers, such as femtosecond lasers and picosecond lasers, has opened up new avenues for material processing due to their unique features such as ultrashort pulse width and extremely high peak intensity. These techniques have become a common tool for micro- and nanoprocessing of a variety
Author: Anming Hu
Publisher: Springer Nature
ISBN: 3030593134
Category : Science
Languages : en
Pages : 360
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Book Description
This book provides a comprehensive overview of the latest advances in laser techniques for micro-nano-manufacturing and an in-depth analysis of applications, such as 3D printing and nanojoining. Lasers have gained increasing significance as a precise tool for advanced manufacturing. Written by world leading scientists, the first part of the book presents the fundamentals of laser interaction with materials at the micro- and nanoscale, including multiphoton excitation and nonthermal melting, and allows readers to better understand advanced processing. In the second part, the authors focus on various advanced fabrications, such as laser peening, surface nanoengineering, and plasmonic heating. Finally, case studies are devoted to special applications, such as 3D printing, microfluidics devices, energy devices, and plasmonic and photonic waveguides. This book integrates both theoretical and experimental analysis. The combination of tutorial chapters and concentrated case studies will be critically attractive to undergraduate and graduate students, researchers, and engineers in the relevant fields. Readers will grasp the full picture of the application of laser for micro-nanomanufacturing and 3D printing.
Author: Ahmed Issa (professor of mechatronics engineering)
Publisher:
ISBN: 9780750316828
Category : Lasers
Languages : en
Pages : 0
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Book Description
This book presents a collection of chapters written by experienced researchers in the fields of laser micro- and nano-scale processing for both surface and bulk processing covering surface modification processes, laser material interaction regimes, laser system construction for micro- and nanomachining applications, and the thermal mathematical modelling of laser processes. As an important reference for researchers in the field of micro- and nano-scale processing, this book aims to assist researchers and postgraduates in becoming familiar with the principles, capabilities and potential of the laser processing of materials quickly. Offering a one-stop reference, this book provides an understanding of the physical phenomena, process principles, latest achievements, and applications from the key researchers and research groups that focus on precision micro- and nano-scale laser processing. Part of IOP Series in Coherent Sources, Quantum Fundamentals, and Applications.
Author: David Jen Hwang
Publisher:
ISBN:
Category :
Languages : en
Pages : 362
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Book Description
Author: European Material Research Society
Publisher:
ISBN:
Category :
Languages : en
Pages :
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Book Description
Author: Ahmed Issa
Publisher: Coherent Sources and Applicati
ISBN: 9780750316811
Category : Science
Languages : en
Pages : 200
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Book Description
This book presents a collection of chapters written by experienced researchers in the fields of laser micro- and nano-scale processing for both surface and bulk processing covering surface modification processes, laser material interaction regimes, laser system construction for micro- and nanomachining applications, and the thermal mathematical modelling of laser processes. As an important reference for researchers in the field of micro- and nano-scale processing, this book aims to assist researchers and postgraduates in becoming familiar with the principles, capabilities and potential of the laser processing of materials quickly. Offering a one-stop reference, this book provides an understanding of the physical phenomena, process principles, latest achievements, and applications from the key researchers and research groups that focus on precision micro- and nano-scale laser processing. Key Features Provides the fundamental processes and applications of laser micromachining. Includes simplified descriptions of the physical principles underlying micromachining. Details the physical phenomena, process principles, and latest achievements. Descriptions, illustrations, and citations will be provided throughout to enhance the reader experience. Mathematical modeling, simulation packages, and experimental procedures will be explained.
Author: Nikolaos A Vainos
Publisher: Elsevier
ISBN: 0857096222
Category : Technology & Engineering
Languages : en
Pages : 492
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Book Description
The use of lasers in the processing of electronic and photonic material is becoming increasingly widespread, with technological advances reducing costs and increasing both the quality and range of novel devices which can be produced. Laser growth and processing of photonic devices is the first book to review this increasingly important field. Part one investigates laser-induced growth of materials and surface structures, with pulsed laser deposition techniques, the formation of nanocones and the fabrication of periodic photonic microstructures explored in detail. Laser-induced three-dimensional micro- and nano-structuring are the focus of part two. Exploration of multiphoton lithography, processing and fabrication is followed by consideration of laser-based micro- and nano-fabrication, laser-induced soft matter organization and microstructuring, and laser-assisted polymer joining methods. The book concludes in part three with an investigation into laser fabrication and manipulation of photonic structures and devices. Laser seeding and thermal processing of glass with nanoscale resolution, laser-induced refractive index manipulation, and the thermal writing of photonic devices in glass and polymers are all considered. With its distinguished editor and international team of expert contributors, Laser growth and processing of photonic devices is an essential tool for all materials scientists, engineers and researchers in the microelectronics industry. The first book to review the increasingly important field of laser growth and processing of photonic devices Investigates laser-induced growth of materials and surface structures, pulsed laser deposition techniques, the formation of nanocones and the fabrication of periodic photonic microstructures Examines laser-induced three-dimensional micro- and nano-structuring and concludes with an investigation into laser fabrication and manipulation of photonic structures and devices
Author: Xiaoming Yu
Publisher:
ISBN:
Category :
Languages : en
Pages :
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Book Description
Lasers have been widely used as a manufacturing tool for material processing, such as drilling, cutting, welding and surface texturing. Compared to traditional manufacturing methods, laser-based material processing is high precision, can treat a wide range of materials, and has no tool wear. However, demanding manufacturing processes emerging from the needs of nano and 3D fabrication require the development of laser processing strategies that can address critical issues such as machining resolution, processing speed and product quality. This dissertation concerns the development of novel laser processing strategies based on spatial, temporal and spectral control of light-matter interaction. In the spatial domain, beam shaping is employed in ultrafast laser micro-processing. Zero-order Bessel beam, generated by an axicon, is used for selective removal of the back contact layer of thin film solar cells. Bessel beam's propagation-invariance property gives rise to an extension of focal range by orders of magnitude compared to Gaussian beam, greatly increasing process tolerance to surface unevenness and positioning error. Together with the axicon, a spatial light modulator is subsequently used to modify the phase of laser beam and generate superpositions of high-order Bessel beam with high energy efficiency. With the superposed beam, processing speed can be increased significantly, and collateral damage resulting from the ring structures in the zero-order Bessel beam can be greatly suppressed. In the temporal domain, it is demonstrated that ionization in dielectric materials can be controlled with a pair of ultraviolet and infrared pulses. With the assistance of the long-wavelength infrared pulse, nano-scale features are achieved using only a small fraction of threshold energy for the short-wavelength pulse. Computer simulation based on the rate equation model is conducted and found to be in good agreement with experimental results. This study paves the way for future adoption of short-wavelength laser sources, for example in the extreme ultraviolet range, for direct laser nano-fabrication with below-threshold pulse energy. In the spectral domain, a short-wavelength infrared laser is used to generate modification in the bulk of silicon wafers, in an attempt to develop 3D fabrication capabilities in semiconductors. Issues such as spherical aberration correction and examination procedure are addressed. Permanent modification is generated inside silicon by tightly focusing and continuously scanning the laser beam inside the samples, without introducing surface damage. The effect of laser pulse energy and polarization is also investigated. These results demonstrate the potential of controlling laser processing in multiple dimensions for manufacturing purposes, and point to a future when laser can be used as naturally and efficiently as mechanical tools used today, but is targeted at more challenging problems.
