In-Situ Patterning:: Volume 158 PDF Download
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Author: Anthony F. Bernhardt
Publisher: Mrs Proceedings
ISBN:
Category : Technology & Engineering
Languages : en
Pages : 528
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Book Description
The MRS Symposium Proceeding series is an internationally recognised reference suitable for researchers and practitioners.
Author: Anthony F. Bernhardt
Publisher: Mrs Proceedings
ISBN:
Category : Technology & Engineering
Languages : en
Pages : 528
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Book Description
The MRS Symposium Proceeding series is an internationally recognised reference suitable for researchers and practitioners.
Author: Anthony F. Bernhardt
Publisher: Cambridge University Press
ISBN: 9781107410350
Category : Technology & Engineering
Languages : en
Pages : 520
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Book Description
The MRS Symposium Proceeding series is an internationally recognised reference suitable for researchers and practitioners.
Author:
Publisher:
ISBN:
Category :
Languages : en
Pages : 485
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Book Description
The MRS symposium on In-Situ Patterning: Selective Area Deposition and Etching brought together a wide selection of microfabrication technologies and detailed studies of their enabling mechanisms. The common thread through the invited and contributed papers is the chemical and/or physical alteration of surfaces by the actions of ion, electron, or photon energy. The applications ranged from state-of-the-art lithographic techniques, to direct processing of semiconductor surfaces, aiming to obviate lithography in device fabrication. This direct processing encompasses patterned deposition of metallic conductors and insulating films, as well as local etching and doping of device structures. The work demonstrated in this symposium ranged from the detailed atomic behavior of treated surfaces, to nuts-and-bolts packaging techniques for the high-density descendants of today's printed circuit boards.
Author: Gerald Lucovsky
Publisher: Mrs Proceedings
ISBN:
Category : Technology & Engineering
Languages : en
Pages : 280
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Book Description
The MRS Symposium Proceeding series is an internationally recognised reference suitable for researchers and practitioners.
Author: Virginia M. Oversby
Publisher: Mrs Proceedings
ISBN:
Category : Technology & Engineering
Languages : en
Pages : 840
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Book Description
The MRS Symposium Proceeding series is an internationally recognised reference suitable for researchers and practitioners.
Author: Ron M. Anderson
Publisher:
ISBN: 9781558990883
Category : Electron microscopy
Languages : en
Pages : 384
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Book Description
Author: Murray S. Daw
Publisher: Mrs Proceedings
ISBN:
Category : Science
Languages : en
Pages : 392
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Book Description
The MRS Symposium Proceeding series is an internationally recognised reference suitable for researchers and practitioners.
Author: Bruce M. Clemens
Publisher:
ISBN:
Category : Technology & Engineering
Languages : en
Pages : 380
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Book Description
The MRS Symposium Proceeding series is an internationally recognised reference suitable for researchers and practitioners.
Author: A. Katz
Publisher: Mrs Proceedings
ISBN:
Category : Technology & Engineering
Languages : en
Pages : 586
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Book Description
The MRS Symposium Proceeding series is an internationally recognised reference suitable for researchers and practitioners.
Author: G. Malcolm Stocks
Publisher: Mrs Proceedings
ISBN:
Category : Technology & Engineering
Languages : en
Pages : 488
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Book Description
The MRS Symposium Proceeding series is an internationally recognised reference suitable for researchers and practitioners.
