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Author: Robert W. Johnstone
Publisher: Springer Science & Business Media
ISBN: 9781402080203
Category : Technology & Engineering
Languages : en
Pages : 210
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Book Description
An Introduction to Surface-Micromachining provides for the first time a unified view of surface-micromachining. Building up from the basic building block of microfabrication techniques, to the general surface-micromachining design, it will finish with the theory and design of concrete components. An Introduction to Surface-Micromachining connects the manufacturing process, microscale phenomena, and design data to physical form and function. This book will be of interest to mechanical engineers looking to scale down into micromachining and microelectronics designers looking to move horizontally to micromachining.
Author: Robert W. Johnstone
Publisher: Springer Science & Business Media
ISBN: 9781402080203
Category : Technology & Engineering
Languages : en
Pages : 210
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Book Description
An Introduction to Surface-Micromachining provides for the first time a unified view of surface-micromachining. Building up from the basic building block of microfabrication techniques, to the general surface-micromachining design, it will finish with the theory and design of concrete components. An Introduction to Surface-Micromachining connects the manufacturing process, microscale phenomena, and design data to physical form and function. This book will be of interest to mechanical engineers looking to scale down into micromachining and microelectronics designers looking to move horizontally to micromachining.
Author: Sami Franssila
Publisher: John Wiley & Sons
ISBN: 0470020563
Category : Technology & Engineering
Languages : en
Pages : 424
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Book Description
Microfabrication is the key technology behind integrated circuits,microsensors, photonic crystals, ink jet printers, solar cells andflat panel displays. Microsystems can be complex, but the basicmicrostructures and processes of microfabrication are fairlysimple. Introduction to Microfabrication shows how the commonmicrofabrication concepts can be applied over and over again tocreate devices with a wide variety of structures andfunctions. Featuring: * A comprehensive presentation of basic fabrication processes * An emphasis on materials and microstructures, rather than devicephysics * In-depth discussion on process integration showing how processes,materials and devices interact * A wealth of examples of both conceptual and real devices Introduction to Microfabrication includes 250 homework problems forstudents to familiarise themselves with micro-scale materials,dimensions, measurements, costs and scaling trends. Both researchand manufacturing topics are covered, with an emphasis on silicon,which is the workhorse of microfabrication. This book will serve as an excellent first text for electricalengineers, chemists, physicists and materials scientists who wishto learn about microstructures and microfabrication techniques,whether in MEMS, microelectronics or emerging applications.
Author: Miko Elwenspoek
Publisher: Cambridge University Press
ISBN: 9780521607674
Category : Art
Languages : en
Pages : 424
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Book Description
A comprehensive overview of the key techniques used in the fabrication of micron-scale structures in silicon; for graduate students and researchers.
Author: Nadim Maluf
Publisher: Artech House
ISBN: 9781580535915
Category : Technology & Engineering
Languages : en
Pages : 312
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Book Description
Bringing you up-to-date with the latest developments in MEMS technology, this major revision of the best-selling An Introduction to Microelectromechanical Systems Engineering offers you a current understanding of this cutting-edge technology. You gain practical knowledge of MEMS materials, design, and manufacturing, and learn how it is being applied in industrial, optical, medical and electronic markets. The second edition features brand new sections on RF MEMS, photo MEMS, micromachining on materials other than silicon, reliability analysis, plus an expanded reference list. With an emphasis on commercialized products, this unique resource helps you determine whether your application can benefit from a MEMS solution, understand how other applications and companies have benefited from MEMS, and select and define a manufacturable MEMS process for your application. You discover how to use MEMS technology to enable new functionality, improve performance, and reduce size and cost. The book teaches you the capabilities and limitations of MEMS devices and processes, and helps you communicate the relative merits of MEMS to your company's management. From critical discussions on design operation and process fabrication of devices and systems, to a thorough explanation of MEMS packaging, this easy-to-understand book clearly explains the basics of MEMS engineering, making it an invaluable reference for your work in the field.
Author: Marc J. Madou
Publisher: CRC Press
ISBN: 1482274000
Category : Technology & Engineering
Languages : en
Pages : 764
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Book Description
MEMS technology and applications have grown at a tremendous pace, while structural dimensions have grown smaller and smaller, reaching down even to the molecular level. With this movement have come new types of applications and rapid advances in the technologies and techniques needed to fabricate the increasingly miniature devices that are literally changing our world. A bestseller in its first edition, Fundamentals of Microfabrication, Second Edition reflects the many developments in methods, materials, and applications that have emerged recently. Renowned author Marc Madou has added exercise sets to each chapter, thus answering the need for a textbook in this field. Fundamentals of Microfabrication, Second Edition offers unique, in-depth coverage of the science of miniaturization, its methods, and materials. From the fundamentals of lithography through bonding and packaging to quantum structures and molecular engineering, it provides the background, tools, and directions you need to confidently choose fabrication methods and materials for a particular miniaturization problem. New in the Second Edition Revised chapters that reflect the many recent advances in the field Updated and enhanced discussions of topics including DNA arrays, microfluidics, micromolding techniques, and nanotechnology In-depth coverage of bio-MEMs, RF-MEMs, high-temperature, and optical MEMs. Many more links to the Web Problem sets in each chapter
Author: B. Courtois
Publisher: Springer Science & Business Media
ISBN: 9401595062
Category : Technology & Engineering
Languages : en
Pages : 315
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Book Description
This is the third edition of the European Workshop on Microelectronics Education (EWME). A steady-state regime has now been reached. An international community of university teachers is constituted; they exchange their experience and their pedagogical tools. They discuss the best ways to transfer the rapidly changing techniques to their students, and to introduce them to the new physical and mathematical concepts and models for the innovative techniques, devices, circuits and design methods. The number of abstracts submitted to EWME 2000 (about one hundred) enabled the scientific committee to proceed to a clear selection. EWME is a European meeting. Indeed, authors from 20 different European countries contribute to this volume. Nevertheless, the participation of authors from Brazil, Canada, China, New Zealand, and USA, shows that the workshop gradually attains an international dimension. th The 20 century can be characterized as the "century of electron". The electron, as an elementary particle, was discovered by J.J. Thomson in 1897, and was rapidly used to transfer energy and information. Thanks to electron, universe and micro-cosmos could be explored. Electron became the omnipotent and omnipresent, almost immaterial, angel of our W orId. This was made possible thanks to electronics and, for the last 30 years, to microelectronics. Microelectronics not only modified and even radically transformed the industrial and the every-day landscapes, but it also led to the so-called "information revolution" with which begins the 21 st century.
Author: Tom Proulx
Publisher: Springer Science & Business Media
ISBN: 1441988254
Category : Technology & Engineering
Languages : en
Pages : 272
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Book Description
This the second volume of six from the Annual Conference of the Society for Experimental Mechanics, 2010, brings together 40 chapters on Microelectromechanical Systems and Nanotechnology. It presents early findings from experimental and computational investigations on MEMS and Nanotechnology including contributions on Nanomechanical Standards, Magneto-mechanical MEMS Sensors, Piezoelectric MEMS for Energy Harvesting, and Linear and Nonlinear Mass Sensing.
Author: Ernst Obermeier
Publisher: Springer
ISBN: 3642594972
Category : Technology & Engineering
Languages : en
Pages : 1763
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Book Description
The Conference is the premier international meeting for the presentation of original work addressing all aspects of the theory, design, fabrication, assembly, packaging, testing and application of solid-state sensors, actuators, MEMS, and microsystems.
Author: Prem Pal
Publisher: CRC Press
ISBN: 1315341271
Category : Science
Languages : en
Pages : 315
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Book Description
Microelectromechanical systems (MEMS)-based sensors and actuators have become remarkably popular in the past few decades. Rapid advances have taken place in terms of both technologies and techniques of fabrication of MEMS structures. Wet chemical–based silicon bulk micromachining continues to be a widely used technique for the fabrication of microstructures used in MEMS devices. Researchers all over the world have contributed significantly to the advancement of wet chemical–based micromachining, from understanding the etching mechanism to exploring its application to the fabrication of simple to complex MEMS structures. In addition to its various benefits, one of the unique features of wet chemical–based bulk micromachining is the ability to fabricate slanted sidewalls, such as 45° walls as micromirrors, as well as freestanding structures, such as cantilevers and diaphragms. This makes wet bulk micromachining necessary for the fabrication of structures for myriad applications. This book provides a comprehensive understating of wet bulk micromachining for the fabrication of simple to advanced microstructures for various applications in MEMS. It includes introductory to advanced concepts and covers research on basic and advanced topics on wet chemical–based silicon bulk micromachining. The book thus serves as an introductory textbook for undergraduate- and graduate-level students of physics, chemistry, electrical and electronic engineering, materials science, and engineering, as well as a comprehensive reference for researchers working or aspiring to work in the area of MEMS and for engineers working in microfabrication technology.
Author: Yves Bellouard
Publisher: CRC Press
ISBN: 1439882983
Category : Science
Languages : en
Pages : 465
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Book Description
From conception to realization, Microrobotics: Methods and Applications covers all aspects of miniaturized systems that physically interact and manipulate objects at the microscale. It provides a solid understanding of this multidisciplinary field, which combines areas of materials science, mechanical engineering, and applied physics. Requiring no
