Proceedings of the Symposia on Electrochemical Processing in ULSI Fabrication I PDF Download
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Author: Electrochemical Society. Dielectric Science and Technology Division
Publisher:
ISBN:
Category : Science
Languages : en
Pages : 290
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Book Description
Author: Electrochemical Society. Dielectric Science and Technology Division
Publisher:
ISBN:
Category : Science
Languages : en
Pages : 290
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Book Description
Author: Panayotis C. Andricacos
Publisher: The Electrochemical Society
ISBN: 9781566772730
Category : Computers
Languages : en
Pages : 262
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Book Description
"Held May 2000 in Toronto, Canada, as part of the 197th meeting of the Electrochemical Society."--Pref.
Author:
Publisher:
ISBN:
Category : Integrated circuits
Languages : en
Pages : 326
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Book Description
Author: Dennis N. Schmidt
Publisher: The Electrochemical Society
ISBN: 9781566770415
Category : Technology & Engineering
Languages : en
Pages : 454
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Book Description
Author: Milan Paunovic
Publisher: The Electrochemical Society
ISBN: 9781566771801
Category : Science
Languages : en
Pages : 666
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Book Description
Author: Kazuo Kondo
Publisher: Springer Science & Business Media
ISBN: 1461491762
Category : Science
Languages : en
Pages : 280
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Book Description
This book discusses the scientific mechanism of copper electrodeposition and it's wide range of applications. The book will cover everything from the basic fundamentals to practical applications. In addition, the book will also cover important topics such as: • ULSI wiring material based upon copper nanowiring • Printed circuit boards • Stacked semiconductors • Through Silicon Via • Smooth copper foil for Lithium-Ion battery electrodes. This book is ideal for nanotechnologists, industry professionals, and practitioners.
Author: Richard C. Alkire
Publisher: John Wiley & Sons
ISBN: 3527807187
Category : Science
Languages : en
Pages : 348
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Book Description
This volume in the "Advances in Electrochemical Sciences and Engineering" series focuses on problem-solving, illustrating how to translate basic science into engineering solutions. The book's concept is to bring together engineering solutions across the range of nano-bio-photo-micro applications, with each chapter co-authored by an academic and an industrial expert whose collaboration led to reusable methods that are relevant beyond their initial use. Examples of experimental and/or computational methods are used throughout to facilitate the task of moving atomistic-scale discoveries and understanding toward well-engineered products and processes based on electrochemical phenomena.
Author: G. Oskam
Publisher: The Electrochemical Society
ISBN: 156677800X
Category : Science
Languages : en
Pages : 234
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Book Description
This symposium provided a forum for current work on the electrodeposition and characterization of functional coatings and nanostructures. Central issues include the control of size and architecture and the ample choices and demands of substrate and deposited materials. The focus materials of this symposium were semiconductors, oxides and composites with e.g. ceramic nanoparticles or nanotubes.
Author: British Library. Document Supply Centre
Publisher:
ISBN:
Category : Conference proceedings
Languages : en
Pages : 870
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Book Description
Author: Tadahiro Ohmi
Publisher: CRC Press
ISBN: 1420026860
Category : Science
Languages : en
Pages : 402
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Book Description
As science pushes closer toward the atomic size scale, new challenges arise to slow the pace of the miniaturization that has transformed our society and fueled the information age. New technologies are necessary to surpass these obstacles and realize the tremendous growth predicted by Moore's law. Assembled from the works of pioneering researchers, Scientific Wet Process Technology for Innovative LSI/FPD Manufacturing presents new developments and technologies for producing the next generation of electronic circuits and displays. This book introduces radical-reaction-based semiconductor manufacturing technologies that overcome the limitations of the existing molecule-reaction-based technologies. It systematically details the procedures and underlying concepts involved in wet process technologies and applications. Following an introduction to semiconductor surface chemical electronics, expert contributors discuss the principles and technology of high-performance wet cleaning; etching technologies and processes; antistatic technology; wet vapor resist stripping technology; and process and safety technologies including waste reclamation, chemical composition control, and ultrapure water and liquid chemical supply systems and materials for fluctuation-free facilities. Currently, large production runs are needed to balance the costs of acquiring and tuning equipment for specialized operating conditions. Scientific Wet Process Technology for Innovative LSI/FPD Manufacturing explains the technologies and processes used to meet the demand for variety and low volumes that exists in today's digital electronics marketplace.
