Papers Presented at the European Materials Research Society 1992 Spring Conference, Symposium A: SiGe Based Technologies PDF Download
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Author: Erich Kasper
Publisher:
ISBN:
Category : Germanium compounds
Languages : en
Pages : 280
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Author: Erich Kasper
Publisher:
ISBN:
Category : Germanium compounds
Languages : en
Pages : 280
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Author: British Library. Document Supply Centre
Publisher:
ISBN:
Category : Conference proceedings
Languages : en
Pages : 696
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Author: Jean Camassel
Publisher:
ISBN:
Category : High temperature superconductivity
Languages : en
Pages : 718
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Author:
Publisher:
ISBN:
Category : Power resources
Languages : en
Pages : 526
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Author: David J. Lockwood
Publisher: Springer Nature
ISBN: 3030682226
Category : Science
Languages : en
Pages : 512
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Book Description
This fourth book in the series Silicon Photonics gathers together reviews of recent advances in the field of silicon photonics that go beyond already established and applied concepts in this technology. The field of research and development in silicon photonics has moved beyond improvements of integrated circuits fabricated with complementary metal–oxide–semiconductor (CMOS) technology to applications in engineering, physics, chemistry, materials science, biology, and medicine. The chapters provided in this book by experts in their fields thus cover not only new research into the highly desired goal of light production in Group IV materials, but also new measurement regimes and novel technologies, particularly in information processing and telecommunication. The book is suited for graduate students, established scientists, and research engineers who want to update their knowledge in these new topics.
Author: European Materials Research Society. Meeting
Publisher: North Holland
ISBN:
Category : Technology & Engineering
Languages : en
Pages : 186
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Book Description
Single chamber processing has attracted the attention of a number of researchers as well as industries as an alternative processing "philosophy" to complement or even replace the stringent environment of micro- and optoelectronics device fabrication. Up till now single chamber processing has been an elusive manufacturing objective throughout the history of integrated circuit technology. With the emergence of integrated processing tools in recent years, significant segments for continuous fabrication processes have been successfully realised and their potential has already innovated the industry. The 14 papers in this volume cover topics such as: The background of this approach and up-dated status; Design and concepts of relevant cluster tools equipment; Specific process modules such as deposition chambers (CVD, RTCVD, UVCVD, ...) annealing or etching reactors; and Standardization efforts. The work will provide both a stimulus for future research in this field, as well as useful reference material on the new technology trends in microelectronic device manufacturing technology.
Author:
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ISBN:
Category : Aeronautics
Languages : en
Pages : 1038
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Author:
Publisher:
ISBN:
Category : Physics
Languages : en
Pages : 1146
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Author: 国立国会図書館 (Japan)
Publisher:
ISBN:
Category : Science
Languages : en
Pages : 1762
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Author:
Publisher:
ISBN:
Category : American literature
Languages : en
Pages : 1044
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