Multi-Axis Nanopositioning Using Magnetic Levitation PDF Download
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Author: Shobhit Verma
Publisher: LAP Lambert Academic Publishing
ISBN: 9783838354118
Category :
Languages : en
Pages : 224
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Book Description
Nanomanipulation has become an essential tool for the development of current nanotechnology. The need of precision positioning stages is increasing drastically due to their crucial role in the fabrication of micro- and nano-sized objects and assemblies. This book presents development of magnetic levitation stages that meet the current demands of nanotechnology. The design considerations including the structural and thermal analysis are discussed in detail. Dynamic modeling and advanced control techniques are demonstrated. Various performance characteristics including precision positioning, payload capabilities and response to sudden load changes were tested. Contents of this book are based on the doctoral thesis of the author. The details of this research will be very helpful for the readers who are interested in developing similar stages from beginning.
Author: Shobhit Verma
Publisher: LAP Lambert Academic Publishing
ISBN: 9783838354118
Category :
Languages : en
Pages : 224
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Book Description
Nanomanipulation has become an essential tool for the development of current nanotechnology. The need of precision positioning stages is increasing drastically due to their crucial role in the fabrication of micro- and nano-sized objects and assemblies. This book presents development of magnetic levitation stages that meet the current demands of nanotechnology. The design considerations including the structural and thermal analysis are discussed in detail. Dynamic modeling and advanced control techniques are demonstrated. Various performance characteristics including precision positioning, payload capabilities and response to sudden load changes were tested. Contents of this book are based on the doctoral thesis of the author. The details of this research will be very helpful for the readers who are interested in developing similar stages from beginning.
Author: Huzefa Shakir
Publisher:
ISBN:
Category :
Languages : en
Pages :
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Book Description
This dissertation is the first attempt to demonstrate the use of magnetic-levitation (maglev) positioners for commercial applications requiring nanopositioning. The key objectives of this research were to devise the control strategies and motion planning to overcome the inherent technical challenges of the maglev systems, and test them on the developed maglev systems to demonstrate their capabilities as the next-generation nanopositioners. Two maglev positioners based on novel actuation schemes and capable of generating all the six-axis motions with a single levitated platen were used in this research. These light-weight single-moving platens have very simple and compact structures, which give them an edge over most of the prevailing nanopositioning technologies and allow them to be used as a cluster tool for a variety of applications. The six-axis motion is generated using minimum number of actuators and sensors. The two positioners operate with a repeatable position resolution of better than 3 nm at the control bandwidth of 110 Hz. In particular, the Y-stage has extended travel range of 5 mm x 5 mm. They can carry a payload of as much as 0.3 kg and retain the regulated position under abruptly and continuously varying load conditions. This research comprised analytical design and development, followed by experimental verification and validation. Preliminary analysis and testing included open-loop stabilization and rigorous set-point change and load-change testing to demonstrate the precision-positioning and load-carrying capabilities of the maglev positioners. Decentralized single-input-single-output (SISO) proportional-integral-derivative (PID) control was designed for this analysis. The effect of actuator nonlinearities were reduced through actuator characterization and nonlinear feedback linearization to allow consistent performance over the large travel range. Closed-loop system identification and order-reduction algorithm were developed in order to analyze and model the plant behavior accurately, and to reduce the effect of unmodeled plant dynamics and inaccuracies in the assembly. Coupling among the axes and subsequent undesired motions and crosstalk of disturbances was reduced by employing multivariable optimal linear-quadratic regulator (LQR). Finally, application-specific nanoscale path planning strategies and multiscale control were devised to meet the specified conflicting time-domain performance specifications. All the developed methodologies and algorithms were implemented, individually as well as collectively, for experimental verification. Some of these applications included nanoscale lithography, patterning, fabrication, manipulation, and scanning. With the developed control strategies and motion planning techniques, the two maglev positioners are ready to be used for the targeted applications.
Author: Changhai Ru
Publisher: Springer
ISBN: 3319238531
Category : Technology & Engineering
Languages : en
Pages : 412
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Book Description
This book covers the state-of-the-art technologies for positioning with nanometer resolutions and accuracies, particularly those based on piezoelectric actuators and MEMS actuators. The latest advances are described, including the design of nanopositioning devices, sensing and actuation technologies and control methods for nanopositioning. This is an ideal book for mechanical and electrical engineering students and researchers; micro and nanotechnology researchers and graduate students; as well as those working in the precision instrumentation or semiconductor industries.
Author: Young Ha Kim
Publisher:
ISBN:
Category :
Languages : en
Pages :
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Book Description
This dissertation demonstrates that a magnetic-levitation (maglev) stage has the capabilities to control movements and reject vibration simultaneously. The mathematical model and vibration control scheme with a 6-degree-of-freedom (6-DOF) maglev stage for nanoscale positioning are developed for disturbance rejection. The derived full nonlinear dynamic equation of motions (EOMs) of the maglev stage include translational and rotational motions with differential kinematics. The derived EOMs and the magnetic forces are linearized to design a multivariable controller, a Linear Quadratic Gaussian with Loop Transfer Recovery (LQG/LTR), for vibration disturbance rejection in a multi-input multi-output (MIMO) system. For a more accurate model, the dynamics of an optical table with a pneumatic passive isolation system is also considered. The model of the maglev stage with the optical table is validated by experiments. Dual-loop controllers are designed to minimize the influence of the vibration disturbance between the moving platen and the optical table in the x-, y-, and z-axes motions. The inner-loop compensator regulates the velocity to reject vibration disturbance and the outer-loop compensator tracks positioning commands. When the vibration disturbances of 10 to 100 Hz are applied, the vibration-reduction ratios are about 30 to 65 percent in horizontal motion and 20 to 45 percent in vertical motion. In addition, the vibration disturbances of 45.45 Hz are attenuated by about 4 to 40 percent in angular motions. The vibration control schemes are effective in not only translational but rotational motions. In step responses, the vibration control schemes reduce the wandering range in the travel from the origin to another location. Positioning and tracking accuracies with the vibration controller are better than those without the vibration controller. In summary, these dual-loop control schemes with velocity feedback control improved the nanopositioning and vibration/disturbance rejection capabilities of a maglev system.
Author: Vijay Kumar Gupta
Publisher: Springer Nature
ISBN: 9811937168
Category : Technology & Engineering
Languages : en
Pages : 724
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Book Description
This book presents the proceedings of 5th International and 20th National Conference on Machines and Mechanisms (iNaCoMM 2021) held at PDPM IIITDM Jabalpur during 9-11 December 2021. The conference was held in collaboration with the Association of Machines and Mechanisms (AMM) India and International Federation for the Promotion of Mechanism and Machine sciences (IFToMM). Various topics covered in this book include kinematics and dynamics of machines, compliant mechanisms; gear, cams and power transmission systems; mechanisms and machines for rural, agricultural and industrial applications; mechanisms for space applications; mechanisms for energy harvesting; robotics and automation; human-centric robotics; soft robotics; man-machine system, mechatronics and micro–mechanisms; CAD and CAGD; control of machines; vibration of machines & rotor dynamics; acoustic and noise; tribology; condition monitoring and failure analysis; fault diagnosis and health monitoring; biomedical engineering; and composites and advanced materials. Given the contents, the book will be useful for researchers and professionals working in the various domains of mechanical engineering.
Author: Kuang-Chao Fan
Publisher: MDPI
ISBN: 3039217127
Category : Science
Languages : en
Pages : 596
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Book Description
This collection represents successful invited submissions from the papers presented at the 8th Annual Conference of Energy Economics and Management held in Beijing, China, 22–24 September 2017. With over 500 participants, the conference was co-hosted by the Management Science Department of National Natural Science Foundation of China, the Chinese Society of Energy Economics and Management, and Renmin University of China on the subject area of “Energy Transition of China: Opportunities and Challenges”. The major strategies to transform the energy system of China to a sustainable model include energy/economic structure adjustment, resource conservation, and technology innovation. Accordingly, the conference and its associated publications encourage research to address the major issues faced in supporting the energy transition of China. Papers published in this collection cover the broad spectrum of energy economics issues, including building energy efficiency, industrial energy demand, public policies to promote new energy technologies, power system control technology, emission reduction policies in energy-intensive industries, emission measurements of cities, energy price movement, and the impact of new energy vehicle.
Author: Qingsong Xu
Publisher: John Wiley & Sons
ISBN: 111913143X
Category : Technology & Engineering
Languages : en
Pages : 294
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Book Description
An innovative and timely guide to the modeling, design and implementation of large-range compliant micropositioning systems based on flexure hinges Features innovative compact mechanism designs for large-range translational and rotational positioning Provides original and concise treatment of various flexure hinges with well-presented design and control methods Focuses on design implementation and applications through detailed examples
Author: Stephanus Büttgenbach
Publisher: Springer Science & Business Media
ISBN: 364212903X
Category : Technology & Engineering
Languages : en
Pages : 447
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Book Description
This book presents the design and manufacturing of microsystems as well as necessary key technologies developed within the Collaborative Research Center 516. The research efforts of this collaboration are focused on active micro systems which are based on the electromagnetic actuator principle. The travel of the investigated actuator systems is on the order of several millimeters. The total construction size of the actuator is on the range of several centimeters whereas essential structures being several micrometers. The methods and the production technologies that are investigated on the basis of various research models incorporate the fundamental process chains of microsystems.
Author: Chengbin Ma
Publisher: Springer Nature
ISBN: 9819906318
Category : Technology & Engineering
Languages : en
Pages : 1213
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Book Description
This book includes original, peer-reviewed research papers from the 2022 International Conference on Wireless Power Transfer (ICWPT2022), held in Chongqing, China. The topics covered include but are not limited to: wireless power transfer technology and systems, coupling mechanism and electromagnetic field of wireless power transfer systems, latest developments in wireless power transfer system, and wide applications. The papers share the latest findings in the field of wireless power transfer, making the book a valuable asset for researchers, engineers, university students, etc
Author: Timothy J. White
Publisher: John Wiley & Sons
ISBN: 1119123283
Category : Technology & Engineering
Languages : en
Pages : 486
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Book Description
An exhaustive review of the history, current state, and future opportunities for harnessing light to accomplish useful work in materials, this book describes the chemistry, physics, and mechanics of light-controlled systems. • Describes photomechanical materials and mechanisms, along with key applications • Exceptional collection of leading authors, internationally recognized for their work in this growing area • Covers the full scope of photomechanical materials: polymers, crystals, ceramics, and nanocomposites • Deals with an interdisciplinary coupling of mechanics, materials, chemistry, and physics • Emphasizes application opportunities in creating adaptive surface features, shape memory devices, and actuators; while assessing future prospects for utility in optics and photonics and soft robotics
