Metrology, Inspection, and Process Control for Microlithography XXVII PDF Download
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Author: Alexander Starikov
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ISBN: 9780819489807
Category : Integrated circuits
Languages : en
Pages : 1070
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Includes Proceedings Vol. 7821
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Pages : 490
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Category : Integrated circuits
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Pages : 600
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Pages : 500
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Author: Jason P. Cain
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ISBN: 9780819499738
Category : Integrated circuits
Languages : en
Pages : 277
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Proceedings of SPIE present the original research papers presented at SPIE conferences and other high-quality conferences in the broad-ranging fields of optics and photonics. These books provide prompt access to the latest innovations in research and technology in their respective fields. Proceedings of SPIE are among the most cited references in patent literature.
Author: Daniel J. C. Herr
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ISBN: 9780819448439
Category : Integrated circuits
Languages : en
Pages : 0
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Author: Martha I. Sanchez
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ISBN: 9781510607422
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