Linearly Tunable RF-MEMS Capacitors Implemented Using an Integrated Removable Self-masking Technique

Linearly Tunable RF-MEMS Capacitors Implemented Using an Integrated Removable Self-masking Technique PDF Author: John Michael Wilson
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ISBN:
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Languages : en
Pages : 241

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Book Description
Keywords: Sandia, gear, rotate, varactor, SUMMiT, removable mask, RF, self masking, metallization, tunable capacitor, MEMS, RF MEMS.