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Author: Jingsong Wei
Publisher: Springer Nature
ISBN: 9811509433
Category : Science
Languages : en
Pages : 215
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Book Description
This book provides a systematic description and analysis of laser heat-mode lithography, addressing the basic principles, lithography system, manipulation of feature size, grayscale lithography, resist thin films, and pattern transfer, while also presenting typical experimental results and applications. It introduces laser heat-mode lithography, where the resist thin films are essentially an opto-thermal response to the laser beam with changeable wavelength and are not sensitive to laser wavelength. Laser heat-mode lithography techniques greatly simplify production procedures because they require neither a particular light source nor a particular environment; further, there are no pre-baking and post-baking steps required for organic photoresists. The pattern feature size can be either larger or smaller than the laser spot by adjusting the writing strategy. The lithographic feature size can also be arbitrarily tuned from nanoscale to micrometer without changing the laser spot size. Lastly, the line edge roughness can be controlled at a very low value because the etching process is a process of breaking bonds among atoms. The book offers an invaluable reference guide for all advanced undergraduates, graduate students, researchers and engineers working in the fields of nanofabrication, lithography techniques and systems, phase change materials, etc.
Author: Jingsong Wei
Publisher: Springer Nature
ISBN: 9811509433
Category : Science
Languages : en
Pages : 215
Get Book Here
Book Description
This book provides a systematic description and analysis of laser heat-mode lithography, addressing the basic principles, lithography system, manipulation of feature size, grayscale lithography, resist thin films, and pattern transfer, while also presenting typical experimental results and applications. It introduces laser heat-mode lithography, where the resist thin films are essentially an opto-thermal response to the laser beam with changeable wavelength and are not sensitive to laser wavelength. Laser heat-mode lithography techniques greatly simplify production procedures because they require neither a particular light source nor a particular environment; further, there are no pre-baking and post-baking steps required for organic photoresists. The pattern feature size can be either larger or smaller than the laser spot by adjusting the writing strategy. The lithographic feature size can also be arbitrarily tuned from nanoscale to micrometer without changing the laser spot size. Lastly, the line edge roughness can be controlled at a very low value because the etching process is a process of breaking bonds among atoms. The book offers an invaluable reference guide for all advanced undergraduates, graduate students, researchers and engineers working in the fields of nanofabrication, lithography techniques and systems, phase change materials, etc.
Author: Koji Sugioka
Publisher: MDPI
ISBN: 3038974102
Category : Science
Languages : en
Pages : 155
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Book Description
This book is a printed edition of the Special Issue "Laser-Based Nano Fabrication and Nano Lithography" that was published in Nanomaterials
Author: United States. Patent and Trademark Office
Publisher:
ISBN:
Category : Patents
Languages : en
Pages : 1248
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Book Description
Author: Gan Fuxi
Publisher: CRC Press
ISBN: 9814613207
Category : Science
Languages : en
Pages : 730
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Book Description
In the big data era, data storage is one of the cores in the whole information chain, which includes production, transfer, sharing, and finally processing. Over the years, the growth of data volume has been explosive. Today, various storage services need memories with higher density and capacity. Moreover, information storage in the big data applic
Author:
Publisher:
ISBN:
Category : Physics
Languages : en
Pages : 676
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ISBN:
Category : Physics
Languages : en
Pages : 680
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ISBN:
Category : Technology
Languages : en
Pages : 548
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Author: Hannu Eskola
Publisher: Springer
ISBN: 9811051224
Category : Technology & Engineering
Languages : en
Pages : 1168
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Book Description
This volume presents the proceedings of the joint conference of the European Medical and Biological Engineering Conference (EMBEC) and the Nordic-Baltic Conference on Biomedical Engineering and Medical Physics (NBC), held in Tampere, Finland, in June 2017. The proceedings present all traditional biomedical engineering areas, but also highlight new emerging fields, such as tissue engineering, bioinformatics, biosensing, neurotechnology, additive manufacturing technologies for medicine and biology, and bioimaging, to name a few. Moreover, it emphasizes the role of education, translational research, and commercialization.
Author: Jonathan R. Lawrence
Publisher: Elsevier
ISBN: 1845699815
Category : Technology & Engineering
Languages : en
Pages : 865
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Book Description
Because of its capacity for continuous development and flexibility of use, the laser has become a mainstream manufacturing tool in many industrial sectors. This timely book relays the state-of-the-art in laser materials processing technology and applications and likely advances to be made from current research taking place around the world. The book also promotes appreciation for laser applications in a variety of industrial sectors.After two introductory chapters, the book reviews the main areas of laser processing. Starting with laser cutting and machining, the book discusses laser welding, annealing and hardening. It then considers surface treatment, coating and materials deposition as well as other engineering techniques such as peening and net-shape engineering, before discussing laser micro and nano-fabrication techniques. The book concludes by looking at modelling and process control.With its distinguished editorial team and contributions from renowned researchers working in every corner of the globe, Advances in laser materials processing provides a comprehensive yet detailed coverage of the many topics that comprise the field of laser materials processing. It provides a reference source for the scientists and engineers in such areas as metals processing and microelectronics, as well those conducting laser materials processing research in either academia or industry. - A comprehensive practitioner guide and reference work explaining state-of-the-art laser processing technologies in manufacturing and other disciplines - Explores the challenges, potential and future directions through the continuous development of new, application-specific lasers in materials processing - Discusses coatings and material deposition with lasers with including the production of coatings by laser-assisted processes, laser direct metal deposition and laser induced forward transfer (LIFT)
Author:
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ISBN:
Category : Electrical engineering
Languages : en
Pages : 1860
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Book Description
