Infrared Spectroscopic Ellipsometry PDF Download
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Author: Arnulf Röseler
Publisher: VCH
ISBN:
Category : Ellipsometry
Languages : en
Pages : 168
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Book Description
Author: Arnulf Röseler
Publisher: VCH
ISBN:
Category : Ellipsometry
Languages : en
Pages : 168
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Book Description
Author: Michael Scott Thomas
Publisher:
ISBN:
Category : Ellipsometry
Languages : en
Pages : 188
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Book Description
Author: Hiroyuki Fujiwara
Publisher: John Wiley & Sons
ISBN: 9780470060186
Category : Technology & Engineering
Languages : en
Pages : 388
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Book Description
Ellipsometry is a powerful tool used for the characterization of thin films and multi-layer semiconductor structures. This book deals with fundamental principles and applications of spectroscopic ellipsometry (SE). Beginning with an overview of SE technologies the text moves on to focus on the data analysis of results obtained from SE, Fundamental data analyses, principles and physical backgrounds and the various materials used in different fields from LSI industry to biotechnology are described. The final chapter describes the latest developments of real-time monitoring and process control which have attracted significant attention in various scientific and industrial fields.
Author: Tino Hofmann
Publisher:
ISBN:
Category :
Languages : en
Pages : 0
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Book Description
Author: Harland G. Tompkins
Publisher: Momentum Press
ISBN: 1606507281
Category : Technology & Engineering
Languages : en
Pages : 138
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Book Description
Ellipsometry is an experimental technique for determining the thickness and optical properties of thin films. It is ideally suited for films ranging in thickness from sub-nanometer to several microns. Spectroscopic measurements have greatly expanded the capabilities of this technique and introduced its use into all areas where thin films are found: semiconductor devices, flat panel and mobile displays, optical coating stacks, biological and medical coatings, protective layers, and more. While several scholarly books exist on the topic, this book provides a good introduction to the basic theory of the technique and its common applications. The target audience is not the ellipsometry scholar, but process engineers and students of materials science who are experts in their own fields and wish to use ellipsometry to measure thin film properties without becoming an expert in ellipsometry itself.
Author: Ahmad Abbas Chaudhry
Publisher:
ISBN:
Category :
Languages : en
Pages : 79
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Book Description
The objective of this dissertation is to present opto-mechanical design of a synchrotron radiation based far-infrared spectroscopic ellipsometer with a strong external magnetic-field capability. Since high magnetic field has enabled major breakthrough in science such instrument will be highly important to the field of condensed matter physics and characterization of advanced electronic materials. This instrument will be installed at the multi-User facility with the most advanced synchrotron light source: Natonal Synchrotron Source (NSLS-II) at Brookhaven National Laboratory (BNL).The proposed here instrument is capable to measure full Mueller matrix spectroscopic ellipsometry spectra in high magnetic fields of up to 9 Tesla. The designed instrument consists of Polarization State Generator (PSG) chamber, Spectromag optical solenoid (high magnetic field up to 9 T), cryogenic sample stage, Polarization State Analyzer (PSA) chamber, and a bolometer. The PSG and PSA vacuum chambers are separated from the magnet volume with two pairs of gate valves equipped with optical windows. This instrument is capable of using synchrotron radiation in the spectral range of 20 cm-1 and 4000 cm-1. The sample stage could operate in the low temperature range down to 4 K with an option to cool sample down to 1.6 K. This instrument allows User to switch between Faraday and Voigt configurations for external magnetic field. This ellipsometer will be able to measure the full-Mueller matrix spectra using rotating retarders and rotating polarizers.
Author: Xianming Liu
Publisher:
ISBN: 9789533075877
Category :
Languages : en
Pages :
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Author: Andrew T. S. Wee
Publisher: John Wiley & Sons
ISBN: 3527833951
Category : Technology & Engineering
Languages : en
Pages : 213
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Book Description
A one-of-a-kind text offering an introduction to the use of spectroscopic ellipsometry for novel material characterization In Introduction to Spectroscopic Ellipsometry of Thin Film Materials: Instrumentation, Data Analysis and Applications, a team of eminent researchers delivers an incisive exploration of how the traditional experimental technique of spectroscopic ellipsometry is used to characterize the intrinsic properties of novel materials. The book focuses on the scientifically and technologically important two-dimensional transition metal dichalcogenides (2D-TMDs), magnetic oxides like manganite materials, and unconventional superconductors, including copper oxide systems. The distinguished authors discuss the characterization of properties, like electronic structures, interfacial properties, and the consequent quasiparticle dynamics in novel quantum materials. Along with illustrative and specific case studies on how spectroscopic ellipsometry is used to study the optical and quasiparticle properties of novel systems, the book includes: Thorough introductions to the basic principles of spectroscopic ellipsometry and strongly correlated systems, including copper oxides and manganites Comprehensive explorations of two-dimensional transition metal dichalcogenides Practical discussions of single layer graphene systems and nickelate systems In-depth examinations of potential future developments and applications of spectroscopic ellipsometry Perfect for master’s- and PhD-level students in physics and chemistry, Introduction to Spectroscopic Ellipsometry of Thin Film Materials will also earn a place in the libraries of those studying materials science seeking a one-stop reference for the applications of spectroscopic ellipsometry to novel developed materials.
Author: Mathias Schubert
Publisher: Springer Science & Business Media
ISBN: 9783540232490
Category : Science
Languages : en
Pages : 216
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Book Description
The study of semiconductor-layer structures using infrared ellipsometry is a rapidly growing field within optical spectroscopy. This book offers basic insights into the concepts of phonons, plasmons and polaritons, and the infrared dielectric function of semiconductors in layered structures. It describes how strain, composition, and the state of the atomic order within complex layer structures of multinary alloys can be determined from an infrared ellipsometry examination. Special emphasis is given to free-charge-carrier properties, and magneto-optical effects. A broad range of experimental examples are described, including multinary alloys of zincblende and wurtzite structure semiconductor materials, and future applications such as organic layer structures and highly correlated electron systems are proposed.
Author: Andreas Furchner
Publisher:
ISBN:
Category :
Languages : en
Pages :
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Book Description
