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Author: Electrochemical Society. Meeting
Publisher: The Electrochemical Society
ISBN: 9781566772846
Category : Science
Languages : en
Pages : 720
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Book Description
"... papers that were presented at the Sixth Symposium on High Purity Silicon held in Phoenix, Arizona at the 198th Meeting of the Electrochemical Society, October 22-27, 2000."--Preface.
Author: Electrochemical Society. Meeting
Publisher: The Electrochemical Society
ISBN: 9781566772846
Category : Science
Languages : en
Pages : 720
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Book Description
"... papers that were presented at the Sixth Symposium on High Purity Silicon held in Phoenix, Arizona at the 198th Meeting of the Electrochemical Society, October 22-27, 2000."--Preface.
Author: C. L. Claeys
Publisher: SPIE-International Society for Optical Engineering
ISBN: 9780819438904
Category :
Languages : en
Pages : 715
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Book Description
Author: Cor L. Claeys
Publisher: The Electrochemical Society
ISBN: 9781566774185
Category : Technology & Engineering
Languages : en
Pages : 454
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Book Description
"This Proceedings Volume includes papers that were presented at the Eighth Symposium on High Purity Silicon held in Honolulu, Hawaii at the 206th Meeting of the Electrochemical Society, October 3-8, 2004"--Pref.
Author: Cor L. Claeys
Publisher: The Electrochemical Society
ISBN: 156677652X
Category : Crystal growth
Languages : en
Pages : 370
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Book Description
The issue of the 10th High Purity Silicon symposium provides an overview of the latest developments in the growth, characterization, devices processing, and application of high purity silicon in either bulk or epitaxial form. The emphasis is on the control and prevention of impurity incorporation, characterization and detection of defects and impurity states in high purity and high resistivity silicon for superior device performances. Device and circuit aspects related to the application of devices fabricated on high resistivity silicon wafers will also be addressed. Special attention will be given to alternative and high-mobility substrates and their material and device aspects.
Author:
Publisher:
ISBN:
Category : Crystal growth
Languages : en
Pages : 724
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Book Description
Author: Cor L. Claeys
Publisher: The Electrochemical Society
ISBN: 9781566773447
Category : Science
Languages : en
Pages : 428
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Book Description
Author: Cor L. Claeys
Publisher: The Electrochemical Society
ISBN: 1566775043
Category : Crystal growth
Languages : en
Pages : 504
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Book Description
This issue discusses the latest developments in the growth, characterization, device processing and applications of high-purity silicon in either bulk or epitaxial form. Information is given on the control and prevention of impurity incorporation, characterization and detection of defects and impurity states. Device and circuit aspects are also covered. Advanced substrates such as SOI, strained Si and germanium-on-insulator are discussed.
Author: Cor L. Claeys
Publisher: The Electrochemical Society
ISBN: 9781566772075
Category : Science
Languages : en
Pages : 498
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Book Description
Author: Howard R. Huff
Publisher: The Electrochemical Society
ISBN: 9781566773744
Category : Science
Languages : en
Pages : 650
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Book Description
Author: Markku Tilli
Publisher: Elsevier
ISBN: 012817787X
Category : Technology & Engineering
Languages : en
Pages : 1028
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Book Description
Handbook of Silicon Based MEMS Materials and Technologies, Third Edition is a comprehensive guide to MEMS materials, technologies, and manufacturing with a particular emphasis on silicon as the most important starting material used in MEMS. The book explains the fundamentals, properties (mechanical, electrostatic, optical, etc.), materials selection, preparation, modeling, manufacturing, processing, system integration, measurement, and materials characterization techniques of MEMS structures. The third edition of this book provides an important up-to-date overview of the current and emerging technologies in MEMS making it a key reference for MEMS professionals, engineers, and researchers alike, and at the same time an essential education material for undergraduate and graduate students. - Provides comprehensive overview of leading-edge MEMS manufacturing technologies through the supply chain from silicon ingot growth to device fabrication and integration with sensor/actuator controlling circuits - Explains the properties, manufacturing, processing, measuring and modeling methods of MEMS structures - Reviews the current and future options for hermetic encapsulation and introduces how to utilize wafer level packaging and 3D integration technologies for package cost reduction and performance improvements - Geared towards practical applications presenting several modern MEMS devices including inertial sensors, microphones, pressure sensors and micromirrors
