Ferroelectric Lead Zirconate Titanate (PZT) Thin Films by Metallo-organic Decomposition (MOD) Technology for Memory Applications PDF Download
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Author: Zhi Qing Liu
Publisher:
ISBN:
Category :
Languages : en
Pages : 151
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Author: Zhi Qing Liu
Publisher:
ISBN:
Category :
Languages : en
Pages : 151
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Category : Physics
Languages : en
Pages : 686
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Languages : en
Pages :
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Traditionally, multifunctional complex oxide thin films, like the common ferroelectric materials lead zirconate titanate (PZT) and barium titanate (BaTiO3) have been limited to substrates with noble metal or conductive oxide bottom electrodes. This constraint originates from the vulnerability of base metals to oxidation when traditional ceramic processing parameters--high temperatures and oxygen rich atmospheres--are used to synthesize ferroelectric films. With current technology, ferroelectric thin films have demonstrated vast applicability as tunable capacitors, sensors, piezoelectric actuators, and non-volatile memories. By integrating ferroelectrics thin films with base metals, the barrier to mass production is lowered through reduced expense and simplified electrode patternability. Moreover, base metals have higher conductivities and offer the possibility for increased functionality by incorporation of ferromagnetic or shape memory alloys. Recent research efforts have adapted 1970s thick film multilayer capacitor technology to process thin films of the (Ba, Sr)TiO3 family directly on nickel and copper substrates. This methodology relies on processing these materials within a window of temperature and oxygen partial pressure (pO2) that affords thermodynamic equilibrium between the oxidized perovskite film and unoxidized base metal substrate. Although the family of (Ba, Sr)TiO3 materials offers excellent dielectric properties, the material PZT could provide a complementary set of functionality to satisfy applications that require an enhanced ferroelectric or piezoelectric response. Unfortunately, fundamental materials differences--particularly PbO volatility and a narrow thermodynamic stability window--make equilibrium processing impractical for PZT/base metal systems. In this thesis, integration of PZT directly on copper surfaces via a chemical solution deposition (CSD) route is investigated. Using this platform a new me.
Author: Kirk-Othmer
Publisher: John Wiley & Sons
ISBN: 0470047488
Category : Science
Languages : en
Pages : 2762
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This is an easily-accessible two-volume encyclopedia summarizing all the articles in the main volumes Kirk-Othmer Encyclopedia of Chemical Technology, Fifth Edition organized alphabetically. Written by prominent scholars from industry, academia, and research institutions, the Encyclopedia presents a wide scope of articles on chemical substances, properties, manufacturing, and uses; on industrial processes, unit operations in chemical engineering; and on fundamentals and scientific subjects related to the field.
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Category : Engineering
Languages : en
Pages : 2264
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Since its creation in 1884, Engineering Index has covered virtually every major engineering innovation from around the world. It serves as the historical record of virtually every major engineering innovation of the 20th century. Recent content is a vital resource for current awareness, new production information, technological forecasting and competitive intelligence. The world?s most comprehensive interdisciplinary engineering database, Engineering Index contains over 10.7 million records. Each year, over 500,000 new abstracts are added from over 5,000 scholarly journals, trade magazines, and conference proceedings. Coverage spans over 175 engineering disciplines from over 80 countries. Updated weekly.
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Category :
Languages : en
Pages : 23
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The metallo-organic solution deposition ((MOSD) or sol-gel) technique can be used for preparing lead zirconate titanate (PZT) ceramics with a wide range of compositions and crystal structures for electro-optical applications. Film morphology is affected by stoichiometry of the film, hydrolysis and polymerization of the sol-gel solution, and thermal treatment of the deposited material. The lattice parameter decreases with the amount of titanium in PZT in agreement with ceramic data. A slight initial excess of lead in the coating solution is found to improve film morphology. Unlike traditional powder ceramic processing techniques, MOSD permits the growth of small uniform grains that are conducive to achieving consistent electronic and optical properties. Our results show that the properties of films prepared by the MOSD process can be tailored to meet the needs of device applications ... Electro-Optical, Polymerization, Film morphology, PZT, Hydrolysis, Sol-Gel, MOSD, Thermal treatment.
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Category : Ceramics
Languages : en
Pages : 950
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Author: San Yuan Chen
Publisher:
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Category :
Languages : en
Pages : 464
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Category : Electrical engineering
Languages : en
Pages : 1948
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Author: John Con Carrano
Publisher:
ISBN:
Category : Thin films
Languages : en
Pages : 286
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