Fast Kinetic Modelling of Low-pressure Inductively-coupled Discharges

Fast Kinetic Modelling of Low-pressure Inductively-coupled Discharges PDF Author: Oleg Polomarov
Publisher:
ISBN:
Category : Electric discharges through gases
Languages : en
Pages : 256

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Fast Kinetic Modelling of Low-pressure Inductively-coupled Discharges

Fast Kinetic Modelling of Low-pressure Inductively-coupled Discharges PDF Author: Oleg Polomarov
Publisher:
ISBN:
Category : Electric discharges through gases
Languages : en
Pages : 256

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Modeling and Experimental Study of Low Pressure Inductively Coupled Discharges

Modeling and Experimental Study of Low Pressure Inductively Coupled Discharges PDF Author: Namjun Kang
Publisher:
ISBN:
Category :
Languages : en
Pages : 168

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Book Description
Low pressure inductively coupled plasmas (ICPs) are investigated using theoretical modeling and experimental diagnostic methods. For various ICP discharges, time dependent global (volume averaged) models are developed and a number of diagnostic tools are used. In a low pressure argon discharge, a new method is proposed to improve the precision of the pressure-dependent electron temperature calculated by the line ratio method. Using the electron energy distribution functions (EEDFs) and the electron density from Langmuir probe, the coefficient of the cascade cross-section are provided as a function of the pressure for argon 4p1 and 4p5. The effective electron temperature calculated by the corrected cascade cross-section is shown and compared with Langmuir probe results. The production of argon excited states in the afterglow of pulse discharge is investigated. Experimentally time resolved optical emission spectroscopy (OES), optical absorption spectroscopy (OAS) and Langmuir probe are used to measure the emission of highly excited states, metastable atom density, electron density and electron temperature. From the time dependent global model, it is found that during the pulse-on time the electron impact excitation and the ionization from the ground state and Ar (3p54s) are the dominant population processes for all excited states. On the other hand, during the afterglow the main source of all excited states is the three body electron-ion recombination. As a consequence argon highly excited state can be populated more than during the pulse-on time. The E-H mode transition and hysteresis in low pressure argon inductively coupled discharges are investigated using the previous global model and a transformer model. The total absorbed power by plasma electrons and coil current are calculated as a function of the electron density at fixed injected power. We found that the transition is due to the difference of the absorbed power between the two modes. Moreover the calculation results show that the existence of an inaccessible region between E and H mode, as well as a threshold coil current and a minimum absorbed power for the H mode. The dissociation of the nitrogen molecule in an Ar-N2 ICP discharge is studied both experimentally and theoretically. Using the two-photon absorption laser-induced fluorescence (TALIF) an increase of the dissociation rate in highly Ar-diluted region is observed. A complete kinetic model is developed to understand the behavior of the Ar-N2 discharge. The calculated results are compared with the measured results, obtaining reasonably good agreement. In pure nitrogen discharge the N atoms are mainly created by electron impact dissociation at low pressure (20 mTorr) while it is due to metastable-metastable pooling dissociation at high pressure (200 mTorr). In Ar-N2 discharge, the N atom density increases despite less amount of N2 molecule in highly Ar-diluted region at 200 mTorr. From the model the charge transfer from Ar+ to N2 is an important source of nitrogen dissociation in Ar-N2 discharge. The global kinetic models are developed in low pressure He, Ne, Ar and Xe discharges to calculate the electron temperature and the electron density. The calculated results are compared with experiments and the dominant creation sources and the routes of loss for electron and metastable atoms are discussed as function of pressure. Finally the transformer model is used to calculate the electrical properties of He, Ne, Ar and Xe discharges.

Electron Kinetics and Applications of Glow Discharges

Electron Kinetics and Applications of Glow Discharges PDF Author: Uwe Kortshagen
Publisher: Springer
ISBN: 0306470764
Category : Science
Languages : en
Pages : 553

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Book Description
This book resulted from the NATO Advanced Research Workshop on “Electron Kinetics and Applications of Glow Discharges,” held in St. Petersburg, Russia, on May 19-23, 1997. Glow discharges have found widespread applications in many technological processes from the manufacture of semiconductors, to recent developments in na- technology, to the traditional fields of gas lasers, and discharge lamps. Consequently, the interest in the physics of glow discharges has experienced yet another resurgence of interest. While the non-equilibrium character of glow discharges is widely accepted, the opinion still prevails that the main features can be captured by fluid models, and that kinetic treatments are only required for the understanding of subtle details. The erroneousness of this belief is demonstrated by the failure of fluid models to describe many basic features of glow discharges such as, for instance, electrode phenomena, striations, and collisionless heating effects. An adequate description of glow discharges thus has to be of kinetic nature.

Fast Modelling of the Low-pressure Capacitively Coupled Radio Frequency Discharge Based on the Nonlocal Approach

Fast Modelling of the Low-pressure Capacitively Coupled Radio Frequency Discharge Based on the Nonlocal Approach PDF Author: S. V. Berezohni
Publisher:
ISBN:
Category :
Languages : en
Pages : 28

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Fast Modelling of Low Pressure Radio-frequency Collisional Capacitively Coupled Discharge and Investigation of the Formation of Non-Maxwellian Electron Distribution Function

Fast Modelling of Low Pressure Radio-frequency Collisional Capacitively Coupled Discharge and Investigation of the Formation of Non-Maxwellian Electron Distribution Function PDF Author: S. V. Berezhnoi
Publisher:
ISBN:
Category :
Languages : en
Pages : 34

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Computer Simulation of Low Pressure Plasma Discharges

Computer Simulation of Low Pressure Plasma Discharges PDF Author: Justin David Bukowski
Publisher:
ISBN:
Category : Electric discharges through gases
Languages : en
Pages : 402

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Non-local Electron Kinetics in an Inductively Coupled Plasma

Non-local Electron Kinetics in an Inductively Coupled Plasma PDF Author: Daniel Frederick Beale
Publisher:
ISBN:
Category :
Languages : en
Pages : 318

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Physical Review

Physical Review PDF Author:
Publisher:
ISBN:
Category : Fluids
Languages : en
Pages : 1476

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Book Description
Publishes papers that report results of research in statistical physics, plasmas, fluids, and related interdisciplinary topics. There are sections on (1) methods of statistical physics, (2) classical fluids, (3) liquid crystals, (4) diffusion-limited aggregation, and dendritic growth, (5) biological physics, (6) plasma physics, (7) physics of beams, (8) classical physics, including nonlinear media, and (9) computational physics.

Introduction to Complex Plasmas

Introduction to Complex Plasmas PDF Author: Michael Bonitz
Publisher: Springer Science & Business Media
ISBN: 3642105920
Category : Science
Languages : en
Pages : 451

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Book Description
Complex plasmas differ from traditional plasmas in many ways: these are low-temperature high pressure systems containing nanometer to micrometer size particles which may be highly charged and strongly interacting. The particles may be chemically reacting or be in contact with solid surfaces, and the electrons may show quantum behaviour. These interesting properties have led to many applications of complex plasmas in technology, medicine and science. Yet complex plasmas are extremely complicated, both experimentally and theoretically, and require a variety of new approaches which go beyond standard plasma physics courses. This book fills this gap presenting an introduction to theory, experiment and computer simulation in this field. Based on tutorial lectures at a very successful recent Summer Institute, the presentation is ideally suited for graduate students, plasma physicists and experienced undergraduates.

Dissertation Abstracts International

Dissertation Abstracts International PDF Author:
Publisher:
ISBN:
Category : Dissertations, Academic
Languages : en
Pages : 946

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