Advanced Technologies Based on Wave and Beam Generated Plasmas PDF Download

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Advanced Technologies Based on Wave and Beam Generated Plasmas

Advanced Technologies Based on Wave and Beam Generated Plasmas PDF Author: H. Schlüter
Publisher: Springer Science & Business Media
ISBN: 9401706336
Category : Science
Languages : en
Pages : 580

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Book Description
This book draws together three areas of work on plasma technologies: advanced efforts based on wave generated, high frequency plasmas, plasma assisted ion implantation, and electron beam generated plasma. It lays a foundation for the application of sources in industry and various research areas