Handbook of Silicon Based MEMS Materials and Technologies PDF Download
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Author: Markku Tilli
Publisher: Elsevier
ISBN: 0815519885
Category : Technology & Engineering
Languages : en
Pages : 670
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Book Description
A comprehensive guide to MEMS materials, technologies and manufacturing, examining the state of the art with a particular emphasis on current and future applications. Key topics covered include: - Silicon as MEMS material - Material properties and measurement techniques - Analytical methods used in materials characterization - Modeling in MEMS - Measuring MEMS - Micromachining technologies in MEMS - Encapsulation of MEMS components - Emerging process technologies, including ALD and porous silicon Written by 73 world class MEMS contributors from around the globe, this volume covers materials selection as well as the most important process steps in bulk micromachining, fulfilling the needs of device design engineers and process or development engineers working in manufacturing processes. It also provides a comprehensive reference for the industrial R&D and academic communities. - Veikko Lindroos is Professor of Physical Metallurgy and Materials Science at Helsinki University of Technology, Finland. - Markku Tilli is Senior Vice President of Research at Okmetic, Vantaa, Finland. - Ari Lehto is Professor of Silicon Technology at Helsinki University of Technology, Finland. - Teruaki Motooka is Professor at the Department of Materials Science and Engineering, Kyushu University, Japan. - Provides vital packaging technologies and process knowledge for silicon direct bonding, anodic bonding, glass frit bonding, and related techniques - Shows how to protect devices from the environment and decrease package size for dramatic reduction of packaging costs - Discusses properties, preparation, and growth of silicon crystals and wafers - Explains the many properties (mechanical, electrostatic, optical, etc), manufacturing, processing, measuring (incl. focused beam techniques), and multiscale modeling methods of MEMS structures
Author: Markku Tilli
Publisher: Elsevier
ISBN: 0815519885
Category : Technology & Engineering
Languages : en
Pages : 670
Get Book Here
Book Description
A comprehensive guide to MEMS materials, technologies and manufacturing, examining the state of the art with a particular emphasis on current and future applications. Key topics covered include: - Silicon as MEMS material - Material properties and measurement techniques - Analytical methods used in materials characterization - Modeling in MEMS - Measuring MEMS - Micromachining technologies in MEMS - Encapsulation of MEMS components - Emerging process technologies, including ALD and porous silicon Written by 73 world class MEMS contributors from around the globe, this volume covers materials selection as well as the most important process steps in bulk micromachining, fulfilling the needs of device design engineers and process or development engineers working in manufacturing processes. It also provides a comprehensive reference for the industrial R&D and academic communities. - Veikko Lindroos is Professor of Physical Metallurgy and Materials Science at Helsinki University of Technology, Finland. - Markku Tilli is Senior Vice President of Research at Okmetic, Vantaa, Finland. - Ari Lehto is Professor of Silicon Technology at Helsinki University of Technology, Finland. - Teruaki Motooka is Professor at the Department of Materials Science and Engineering, Kyushu University, Japan. - Provides vital packaging technologies and process knowledge for silicon direct bonding, anodic bonding, glass frit bonding, and related techniques - Shows how to protect devices from the environment and decrease package size for dramatic reduction of packaging costs - Discusses properties, preparation, and growth of silicon crystals and wafers - Explains the many properties (mechanical, electrostatic, optical, etc), manufacturing, processing, measuring (incl. focused beam techniques), and multiscale modeling methods of MEMS structures
Author: Sjoerd Harder
Publisher: John Wiley & Sons
ISBN: 3527344489
Category : Technology & Engineering
Languages : en
Pages : 400
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Book Description
Early Main Group Metal Catalysis gives a comprehensive overview of catalytic reactions in the presence of group 1 and group 2 metals. Chapters are ordered to reaction type, contain educational elements and deal with concepts illustrated by examples that cover the main developments. After a short introduction on polar organometallic chemistry and synthesis of early main group metal complexes, a variety of catalytic reactions are described, e.g. polymerization of alkenes, hydroamination and phosphination reactions, hydrosilylation, hydroboration and hydrogenation catalysis, as well as enantioselective and Lewis-acid catalysis. The book addresses organic chemists and researchers in industry interested in the state-of-the-art and new possibilities of early main group metal catalysis as well as newcomers to the field. Written by a team of leaders in the field, it is a very welcome addition to the area of main group metal chemistry, and to the field of catalysis.
Author: Silvia Diez-Gonzalez
Publisher: Royal Society of Chemistry
ISBN: 1782626816
Category : Science
Languages : en
Pages : 637
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Book Description
In less than 20 years N-heterocyclic carbenes (NHCs) have become well-established ancillary ligands for the preparation of transition metal-based catalysts. This is mainly due to the fact that NHCs tend to bind strongly to metal centres, avoiding the need of excess ligand in catalytic reactions. Also, NHC‒metal complexes are often insensitive to air and moisture, and have proven remarkably resistant to oxidation. This book showcases the wide variety of applications of NHCs in different chemistry fields beyond being simple phosphine mimics. This second edition has been updated throughout, and now includes a new chapter on NHC‒main group element complexes. It covers the synthesis of NHC ligands and their corresponding metal complexes, as well as their bonding and stereoelectronic properties and applications in catalysis. This is complemented by related topics such as organocatalysis and biologically active complexes. Written for organic and inorganic chemists, this book is ideal for postgraduates, researchers and industrialists.
Author: Michele Aresta
Publisher: Springer
ISBN: 366246831X
Category : Science
Languages : en
Pages : 423
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Book Description
This book provides an analysis of the reaction mechanisms relevant to a number of processes in which CO2 is converted into valuable products. Several different processes are considered that convert CO2 either in specialty chemicals or in bulk products or fuels. For each reaction, the mechanism is discussed and the assessed steps besides the dark sites of the reaction pathway are highlighted. From the insertion of CO2 into E-X bonds to the reduction of CO2 to CO or other C1 molecules or else to C2 or Cn molecules, the reactions are analysed in order to highlight the known and obscure reaction steps. Besides well known reaction mechanisms and energy profiles, several lesser known situations are discussed. Advancing knowledge of the latter would help to develop efficient routes for the conversion of CO2 into valuable products useful either in the chemical or in the energy industry. The content of this book is quite different from other books reporting the use of CO2. On account of its clear presentation, “Reaction Mechanisms in Carbon Dioxide Conversion” targets in particular researchers, teachers and PhD students.
Author: Thomas Wirth
Publisher: Springer Science & Business Media
ISBN: 3540441077
Category : Medical
Languages : en
Pages : 275
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Book Description
T. Wirth: Introduction and General Aspects.- M. Ochiai: Reactivities, Properties and Structures.- A. Varvoglis: Preparation of Hypervalent Iodine Compounds.- V.V. Zhdankin: C-C-Bond Forming Reactions.- G.F. Koser: C- Heteroatom-Bond Forming Reactions.- G.F. Koser: Heteroatom- Heteroatom-Bond Forming Reactions.- T. Wirth: Oxidations and Rearrangements.- H. Tohma, Y. Kita: Synthetic Applications (Total Synthesis and Natural Product Synthesis).
Author: Simon Cotton
Publisher:
ISBN: 9780333536032
Category : Actinide elements
Languages : en
Pages : 192
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Book Description
Author: Michael Lappert
Publisher: John Wiley & Sons
ISBN: 9780470740378
Category : Science
Languages : en
Pages : 370
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Book Description
Written by internationally recognised leaders in the field, Metal Amide Chemistry is the authoritative survey of this important class of compounds, the first since Lappert and Power’s 1980 book “Metal and Metalloid Amides.” An introduction to the topic is followed by in-depth discussions of the amide compounds of: alkali metals alkaline earth metals zinc, cadmium and mercury the transition metals group 3 and lanthanide metals group 13 metals silicon and the group 14 metals group 15 metals the actinide metals Accompanied by a substantial bibliography, this is an essential guide for researchers and advanced students in academia and research working in synthetic organometallic, organic and inorganic chemistry, materials chemistry and catalysis.
Author: Louis S. Hegedus
Publisher: University Science Books
ISBN: 9781891389047
Category : Science
Languages : en
Pages : 358
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Book Description
This second edition offers easy access to the field of organotransition metal chemistry. The book covers the basics of transition metal chemistry, giving a practical introduction to organotransition reaction mechanisms.
Author: William B. Tolman
Publisher: John Wiley & Sons
ISBN: 3527609377
Category : Science
Languages : en
Pages : 382
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Book Description
The first to combine both the bioinorganic and the organometallic view, this handbook provides all the necessary knowledge in one convenient volume. Alongside a look at CO2 and N2 reduction, the authors discuss O2, NO and N2O binding and reduction, activation of H2 and the oxidation catalysis of O2. Edited by the highly renowned William Tolman, who has won several awards for his research in the field.
Author: Lisa S. Baugh
Publisher: CRC Press
ISBN: 142001708X
Category : Science
Languages : en
Pages : 698
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Book Description
New synthetic techniques allow chemists to modify polymer microstructures more precisely than ever, making it possible to design materials that meet increasingly demanding performance requirements. Written and edited by experts in the field, Stereoselective Polymerization with Single-Site Catalysts reviews how the relative stereochemistry of
