Design and Synthesis of CVD Precursors to Thin Film Ceramic Materials PDF Download

Are you looking for read ebook online? Search for your book and save it on your Kindle device, PC, phones or tablets. Download Design and Synthesis of CVD Precursors to Thin Film Ceramic Materials PDF full book. Access full book title Design and Synthesis of CVD Precursors to Thin Film Ceramic Materials by L. V. Interrante. Download full books in PDF and EPUB format.

Design and Synthesis of CVD Precursors to Thin Film Ceramic Materials

Design and Synthesis of CVD Precursors to Thin Film Ceramic Materials PDF Author: L. V. Interrante
Publisher:
ISBN:
Category :
Languages : en
Pages : 12

Get Book Here

Book Description
The application of cyclic organometallic compounds as single source precursors for the chemical vapor deposition of materials such as ALN and SiC is discussed and new results relating to the decomposition of a novel SiC CVD precursor are presented. The decomposition of the cyclic carbosilane (CH2)2Si(CH3)(H)Si(CH3)-(CH2SiH2CH3), on a heated glassy carbon substrate in an ultrahigh vacuum molecular beam system has been studied by pulsing the precursor molecule onto the surface and following the mass spectrum as a function of the substrate surface temperature. The evolution of CH3SiH2,C2H5 and Ch3 was evidenced, suggesting loss of excess carbon as C1 and C2 species. Keywords: Silicon Carbide, Thin films, Chemical vapor deposition; CVD precursor, Carbosilane, Aluminum nitride. (jes).