Analyse et modélisation d'un réacteur de CVD à fonctionnement continu

Analyse et modélisation d'un réacteur de CVD à fonctionnement continu PDF Author: Jean-Pierre Nieto
Publisher:
ISBN:
Category :
Languages : fr
Pages : 169

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Book Description
Cette étude traite de la modélisation du fonctionnement d'un réacteur industriel continu de dépôt en phase vapeur à pression atmosphérique (APCVD). Cet appareil est utilisé dans l'industrie micro-électronique pour déposer des couches minces de dioxyde de silicium, pur ou dopé aux oxydes de bore et/ou de phosphore. Le modèle combine les équations régissant l'hydrodynamique des gaz, le transfert thermique, le transfert de matière, et les vitesses de réactions chimiques des différentes espèces ; il utilise comme base le logiciel commercial ESTET. Les depôts de dioxyde de silicium pur sont réalisés à partir de mélanges de tétraéthoxylane (TEOS) et d'ozone, dilués dans l'azote. Dans ce cas, le modèle exploite un schéma chimique proposé par des chercheurs antérieurs, mais qui a dû être repris et perfectionné, jusqu'à ce que le modèle reproduise convenablement les données expérimentales. Une fois qu'il a été mis au point, le modèle a été exploité pour déterminer l'influence des paramètres principaux du procédé. Cette étude a permis de déterminer d'intéressantes possibilités d'augmentation de la productivité du réacteur et d'amélioration de la qualité des dépôts ; ces propositions devront être confirmées par des essais industriels.

Analyse et modélisation d'un réacteur de CVD à fonctionnement continu

Analyse et modélisation d'un réacteur de CVD à fonctionnement continu PDF Author: Jean-Pierre Nieto
Publisher:
ISBN:
Category :
Languages : fr
Pages : 169

Get Book Here

Book Description
Cette étude traite de la modélisation du fonctionnement d'un réacteur industriel continu de dépôt en phase vapeur à pression atmosphérique (APCVD). Cet appareil est utilisé dans l'industrie micro-électronique pour déposer des couches minces de dioxyde de silicium, pur ou dopé aux oxydes de bore et/ou de phosphore. Le modèle combine les équations régissant l'hydrodynamique des gaz, le transfert thermique, le transfert de matière, et les vitesses de réactions chimiques des différentes espèces ; il utilise comme base le logiciel commercial ESTET. Les depôts de dioxyde de silicium pur sont réalisés à partir de mélanges de tétraéthoxylane (TEOS) et d'ozone, dilués dans l'azote. Dans ce cas, le modèle exploite un schéma chimique proposé par des chercheurs antérieurs, mais qui a dû être repris et perfectionné, jusqu'à ce que le modèle reproduise convenablement les données expérimentales. Une fois qu'il a été mis au point, le modèle a été exploité pour déterminer l'influence des paramètres principaux du procédé. Cette étude a permis de déterminer d'intéressantes possibilités d'augmentation de la productivité du réacteur et d'amélioration de la qualité des dépôts ; ces propositions devront être confirmées par des essais industriels.

The General Theory of Homogenization

The General Theory of Homogenization PDF Author: Luc Tartar
Publisher: Springer Science & Business Media
ISBN: 3642051952
Category : Science
Languages : en
Pages : 466

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Book Description
Homogenization is not about periodicity, or Gamma-convergence, but about understanding which effective equations to use at macroscopic level, knowing which partial differential equations govern mesoscopic levels, without using probabilities (which destroy physical reality); instead, one uses various topologies of weak type, the G-convergence of Sergio Spagnolo, the H-convergence of François Murat and the author, and some responsible for the appearance of nonlocal effects, which many theories in continuum mechanics or physics guessed wrongly. For a better understanding of 20th century science, new mathematical tools must be introduced, like the author’s H-measures, variants by Patrick Gérard, and others yet to be discovered.

Microreaction Technology

Microreaction Technology PDF Author: M. Matlosz
Publisher: Springer Science & Business Media
ISBN: 3642567630
Category : Science
Languages : en
Pages : 584

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Book Description
IMRET 5 featured more than 80 oral and poster communications, covering the entire interdisciplinary field from design, production, modeling and characterization of microreactor devices to application of microstructured systems for production, energy and transportation, including many analytical and biological applications. A particularly strong topic was the investigation of the potential of microstructuring of reactors and systems components for process intensification. Perspectives of combining local, in situ, data acquisition with appropriate microstructuring of actuators and components within chemical and biological devices were explored in order to enhance process performance and facilitate process control.

ICREEC 2019

ICREEC 2019 PDF Author: Ahmed Belasri
Publisher: Springer Nature
ISBN: 9811554447
Category : Technology & Engineering
Languages : en
Pages : 659

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Book Description
This book highlights peer reviewed articles from the 1st International Conference on Renewable Energy and Energy Conversion, ICREEC 2019, held at Oran in Algeria. It presents recent advances, brings together researchers and professionals in the area and presents a platform to exchange ideas and establish opportunities for a sustainable future. Topics covered in this proceedings, but not limited to, are photovoltaic systems, bioenergy, laser and plasma technology, fluid and flow for energy, software for energy and impact of energy on the environment.

Reactor Core Materials

Reactor Core Materials PDF Author:
Publisher:
ISBN:
Category : Nuclear fuels
Languages : en
Pages : 304

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Book Description


Review of Fuel Failures in Water Cooled Reactors (2006-2015): IAEA Nuclear Energy Series No. Nf-T-2.5

Review of Fuel Failures in Water Cooled Reactors (2006-2015): IAEA Nuclear Energy Series No. Nf-T-2.5 PDF Author: International Atomic Energy Agency
Publisher:
ISBN: 9789201043191
Category : Business & Economics
Languages : en
Pages : 65

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Book Description
This updated version of Nuclear Energy Series NF-T-2.1 provides information on all aspects of fuel failures in current nuclear power plant operations.

PEM Electrolysis for Hydrogen Production

PEM Electrolysis for Hydrogen Production PDF Author: Dmitri Bessarabov
Publisher: CRC Press
ISBN: 1482252325
Category : Science
Languages : en
Pages : 401

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Book Description
An ever-increasing dependence on green energy has brought on a renewed interest in polymer electrolyte membrane (PEM) electrolysis as a viable solution for hydrogen production. While alkaline water electrolyzers have been used in the production of hydrogen for many years, there are certain advantages associated with PEM electrolysis and its relevan

Minor Actinide Burning in Thermal Reactors

Minor Actinide Burning in Thermal Reactors PDF Author:
Publisher:
ISBN:
Category :
Languages : en
Pages :

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Book Description


Finite Volumes for Complex Applications IX - Methods, Theoretical Aspects, Examples

Finite Volumes for Complex Applications IX - Methods, Theoretical Aspects, Examples PDF Author: Robert Klöfkorn
Publisher: Springer Nature
ISBN: 3030436519
Category : Computers
Languages : en
Pages : 727

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Book Description
The proceedings of the 9th conference on "Finite Volumes for Complex Applications" (Bergen, June 2020) are structured in two volumes. The first volume collects the focused invited papers, as well as the reviewed contributions from internationally leading researchers in the field of analysis of finite volume and related methods. Topics covered include convergence and stability analysis, as well as investigations of these methods from the point of view of compatibility with physical principles. Altogether, a rather comprehensive overview is given on the state of the art in the field. The properties of the methods considered in the conference give them distinguished advantages for a number of applications. These include fluid dynamics, magnetohydrodynamics, structural analysis, nuclear physics, semiconductor theory, carbon capture utilization and storage, geothermal energy and further topics. The second volume covers reviewed contributions reporting successful applications of finite volume and related methods in these fields. The finite volume method in its various forms is a space discretization technique for partial differential equations based on the fundamental physical principle of conservation. Many finite volume methods preserve further qualitative or asymptotic properties, including maximum principles, dissipativity, monotone decay of free energy, and asymptotic stability, making the finite volume methods compatible discretization methods, which preserve qualitative properties of continuous problems at the discrete level. This structural approach to the discretization of partial differential equations becomes particularly important for multiphysics and multiscale applications. The book is a valuable resource for researchers, PhD and master’s level students in numerical analysis, scientific computing and related fields such as partial differential equations, as well as engineers working in numerical modeling and simulations.

Genmix

Genmix PDF Author: D Brian Spalding
Publisher: Elsevier
ISBN: 1483188175
Category : Reference
Languages : en
Pages : 393

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Book Description
Genmix: A General Computer Program for Two-dimensional Parabolic Phenomena explains a computer program called GENMIX. The main intention of the program is to be used as a tool of instructions. The name of the program is a mixture of two considerations: its generality and its concern for mixing processes. The book aims to help the potential user to understand the physical and mathematical basis of the topic computer program. It is also the aim of the book to make the program applicable to practical problems. The book is arranged in such a way as to parallel a course of lectures and associated computer-workshop sessions wherein the student is allowed to do some elementary computations as soon as he has gained some knowledge of the method. The book contains the mathematical, physical, and computer-coding aspects of the program. Concepts such as the boundary layer, two-dimensional, and steady- flow are defined and discussed in depth. The text will be a useful tool for computer instructors and students.