Acoustic Wave and Electromechanical Resonators PDF Download
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Author: Humberto Campanella
Publisher: Artech House
ISBN: 1607839784
Category : Technology & Engineering
Languages : en
Pages : 364
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Book Description
This groundbreaking book provides you with a comprehensive understanding of FBAR (thin-film bulk acoustic wave resonator), MEMS (microelectomechanical system), and NEMS (nanoelectromechanical system) resonators. For the first time anywhere, you find extensive coverage of these devices at both the technology and application levels. This practical reference offers you guidance in design, fabrication, and characterization of FBARs, MEMS and NEBS. It discusses the integration of these devices with standard CMOS (complementary-metal-oxide-semiconductor) technologies, and their application to sensing and RF systems. Moreover, this one-stop resource looks at the main characteristics, differences, and limitations of FBAR, MEMS, and NEMS devices, helping you to choose the right approaches for your projects. Over 280 illustrations and more than 130 equations support key topics throughout the book.
Author: Humberto Campanella
Publisher: Artech House
ISBN: 1607839784
Category : Technology & Engineering
Languages : en
Pages : 364
Get Book Here
Book Description
This groundbreaking book provides you with a comprehensive understanding of FBAR (thin-film bulk acoustic wave resonator), MEMS (microelectomechanical system), and NEMS (nanoelectromechanical system) resonators. For the first time anywhere, you find extensive coverage of these devices at both the technology and application levels. This practical reference offers you guidance in design, fabrication, and characterization of FBARs, MEMS and NEBS. It discusses the integration of these devices with standard CMOS (complementary-metal-oxide-semiconductor) technologies, and their application to sensing and RF systems. Moreover, this one-stop resource looks at the main characteristics, differences, and limitations of FBAR, MEMS, and NEMS devices, helping you to choose the right approaches for your projects. Over 280 illustrations and more than 130 equations support key topics throughout the book.
Author: Spartak Gevorgian
Publisher: Springer Science & Business Media
ISBN: 9781447158448
Category : Technology & Engineering
Languages : en
Pages : 264
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Book Description
To handle many standards and ever increasing bandwidth requirements, large number of filters and switches are used in transceivers of modern wireless communications systems. It makes the cost, performance, form factor, and power consumption of these systems, including cellular phones, critical issues. At present, the fixed frequency filter banks based on Film Bulk Acoustic Resonators (FBAR) are regarded as one of the most promising technologies to address performance -form factor-cost issues. Even though the FBARs improve the overall performances the complexity of these systems remains high.a Attempts are being made to exclude some of the filters by bringing the digital signal processing (including channel selection) as close to the antennas as possible. However handling the increased interference levels is unrealistic for low-cost battery operated radios. Replacing fixed frequency filter banks by one tuneable filter is the most desired and widely considered scenario. As an example, development of the software based cognitive radios is largely hindered by the lack of adequate agile components, first of all tuneable filters. In this sense the electrically switchable and tuneable FBARs are the most promising components to address the complex cost-performance issues in agile microwave transceivers, smart wireless sensor networks etc.Tuneable Film Bulk Acoustic Wave Resonators discusses FBAR need, physics, designs, modelling, fabrication and applications. Tuning of the resonant frequency of the FBARs is considered. Switchable and tuneable FBARs based on electric field induced piezoelectric effect in paraelectric phase ferroelectrics are covered. The resonance of these resonators may be electrically switched on and off and tuned without hysteresis.The book is aimed at microwave and sensor specialists in the industry and graduate students. Readers will learn about principles of operation and possibilities of the switchable and tuneable FBARs, and will be given general guidelines for designing, fabrication and applications of these devices."
Author: Li-feng Ge
Publisher: World Scientific
ISBN: 9811235023
Category : Science
Languages : en
Pages : 444
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Book Description
Solid Acoustic Waves and Vibration: Theory and Applications is an exciting new book that takes readers inside a fascinating subject. It is charming that there is a complex and delicate structure in characteristic values, which is revealed by introducing a conceptual system including space operator, space-time variable, reference Poisson's ratio, etc., and developing the analytical models for all limiting cases. The dispersion curves of waves in an elastic plate are determined completely, and a systematic and concise description of the fundamental theory of this subject is given.As MEMS and NEMS technology develops, a number of new issues presents, such as the effects of residual stress, thin-film, air captured in micro-air-gaps and coating on the system, which make the problem complicated and spark debates. Micro-diaphragms are modeled by a plate in tension and mounted on air-spring, a general TDK equation of vibration of plates, including free, forced and damped vibrations, and its solutions are developed. The loading effect of coating is modeled by a mass load; a micro-load theory is presented. This book is a summary of the author's long-term research on electromechanical transducers and these related issues, and they provide an excellent description combining theory and application. The principle of electromechanical transducers, which achieve the conversion between mechanical and electrical energy, occupying a particularly important position in the field of robotics and intelligent machines, is elucidated by introducing the concepts of space-time operator, complex transformation factor, inversion impedance, etc., and an unfiled equivalent circuit is presented. The applications in micromachined capacitive ultrasonic transducers (mCUTs, CMUTs) for biomedical imaging and ultrasonic mass resonators (mUMRs) for biochemical sensing, including plate-type, beam-type, nanowire, bulk-wave, LAW and SAW delay-line ultrasonic resonators are described. This interdisciplinary book will be increasingly attractive as MEMS and NEMS technology develops.
Author: Marco G. Beghi
Publisher: BoD – Books on Demand
ISBN: 9535111892
Category : Technology & Engineering
Languages : en
Pages : 616
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Book Description
Acoustics is a mature field which enjoys a never ending youth. New developments are induced by either the search for a better understanding, or by technological innovations. Micro-fabrication techniques introduced a whole new class of microdevices, which exploit acoustic waves for various tasks, and in particular for information processing and for sensing purposes. Performance improvements are achievable by better modelling tools, able to deal with more complex configurations, and by more refined techniques of fabrication and of integration in technological systems, like wireless communications. Several chapters of this book deal with modelling and fabrication techniques for microdevices, including unconventional phenomena and configurations. But this is far from exhausting the research lines in acoustics. Theoretical analyses and modelling techniques are presented, for phenomena ranging from the detection of cracks to the acoustics of the oceans. Measurement methods are also discussed, which probe by acoustic waves the properties of widely different systems.
Author: Vikas Choudhary
Publisher: CRC Press
ISBN: 135183228X
Category : Medical
Languages : en
Pages : 481
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Book Description
The microelectromechanical systems (MEMS) industry has experienced explosive growth over the last decade. Applications range from accelerometers and gyroscopes used in automotive safety to high-precision on-chip integrated oscillators for reference generation and mobile phones. MEMS: Fundamental Technology and Applications brings together groundbreaking research in MEMS technology and explores an eclectic set of novel applications enabled by the technology. The book features contributions by top experts from industry and academia from around the world. The contributors explain the theoretical background and supply practical insights on applying the technology. From the historical evolution of nano micro systems to recent trends, they delve into topics including: Thin-film integrated passives as an alternative to discrete passives The possibility of piezoelectric MEMS Solutions for MEMS gyroscopes Advanced interconnect technologies Ambient energy harvesting Bulk acoustic wave resonators Ultrasonic receiver arrays using MEMS sensors Optical MEMS-based spectrometers The integration of MEMS resonators with conventional circuitry A wearable inertial and magnetic MEMS sensor assembly to estimate rigid body movement patterns Wireless microactuators to enable implantable MEMS devices for drug delivery MEMS technologies for tactile sensing and actuation in robotics MEMS-based micro hot-plate devices Inertial measurement units with integrated wireless circuitry to enable convenient, continuous monitoring Sensors using passive acousto-electric devices in wired and wireless systems Throughout, the contributors identify challenges and pose questions that need to be resolved, paving the way for new applications. Offering a wide view of the MEMS landscape, this is an invaluable resource for anyone working to develop and commercialize MEMS applications.
Author: Ken-Ya Hashimoto
Publisher: Springer Science & Business Media
ISBN: 9783540672326
Category : Technology & Engineering
Languages : en
Pages : 352
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Book Description
Surface acoustic wave (SAW) devices are widely used in mobile communications, a rapidly evolving market. This book gives an overview on the latest SAW technologies with an emphasis on the design and simulation of devices, such as resonator-based devices employing the SH-type leaky SAW.
Author: Harmeet Bhugra
Publisher: Springer
ISBN: 3319286889
Category : Technology & Engineering
Languages : en
Pages : 423
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Book Description
This book introduces piezoelectric microelectromechanical (pMEMS) resonators to a broad audience by reviewing design techniques including use of finite element modeling, testing and qualification of resonators, and fabrication and large scale manufacturing techniques to help inspire future research and entrepreneurial activities in pMEMS. The authors discuss the most exciting developments in the area of materials and devices for the making of piezoelectric MEMS resonators, and offer direct examples of the technical challenges that need to be overcome in order to commercialize these types of devices. Some of the topics covered include: Widely-used piezoelectric materials, as well as materials in which there is emerging interest Principle of operation and design approaches for the making of flexural, contour-mode, thickness-mode, and shear-mode piezoelectric resonators, and examples of practical implementation of these devices Large scale manufacturing approaches, with a focus on the practical aspects associated with testing and qualification Examples of commercialization paths for piezoelectric MEMS resonators in the timing and the filter markets ...and more! The authors present industry and academic perspectives, making this book ideal for engineers, graduate students, and researchers.
Author: Md. Zahurul Haq
Publisher: BoD – Books on Demand
ISBN: 953510103X
Category : Technology & Engineering
Languages : en
Pages : 406
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Book Description
Measurement is a multidisciplinary experimental science. Measurement systems synergistically blend science, engineering and statistical methods to provide fundamental data for research, design and development, control of processes and operations, and facilitate safe and economic performance of systems. In recent years, measuring techniques have expanded rapidly and gained maturity, through extensive research activities and hardware advancements. With individual chapters authored by eminent professionals in their respective topics, Applied Measurement Systems attempts to provide a comprehensive presentation and in-depth guidance on some of the key applied and advanced topics in measurements for scientists, engineers and educators.
Author: Oliver Brand
Publisher: John Wiley & Sons
ISBN: 3527676368
Category : Technology & Engineering
Languages : en
Pages : 512
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Book Description
Part of the AMN book series, this book covers the principles, modeling and implementation as well as applications of resonant MEMS from a unified viewpoint. It starts out with the fundamental equations and phenomena that govern the behavior of resonant MEMS and then gives a detailed overview of their implementation in capacitive, piezoelectric, thermal and organic devices, complemented by chapters addressing the packaging of the devices and their stability. The last part of the book is devoted to the cutting-edge applications of resonant MEMS such as inertial, chemical and biosensors, fluid properties sensors, timing devices and energy harvesting systems.
Author: John X. J. Zhang
Publisher: William Andrew
ISBN: 1455776769
Category : Science
Languages : en
Pages : 512
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Book Description
With applications ranging from medical diagnostics to environmental monitoring, molecular sensors (also known as biosensors, chemical sensors, or chemosensors), along with emerging nanotechnologies offer not only valuable tools but also unlimited possibilities for engineers and scientists to explore the world. New generation of functional microsystems can be designed to provide a variety of small scale sensing, imaging and manipulation techniques to the fundamental building blocks of materials. This book provides comprehensive coverage of the current and emerging technologies of molecular sensing, explaining the principles of molecular sensor design and assessing the sensor types currently available. Having explained the basic sensor structures and sensing principles, the authors proceed to explain the role of nano/micro fabrication techniques in molecular sensors, including MEMS, BioMEMS, MicroTAS among others. The miniaturization of versatile molecular sensors opens up a new design paradigm and a range of novel biotechnologies, which is illustrated through case studies of groundbreaking applications in the life sciences and elsewhere. As well as the techniques and devices themselves, the authors also cover the critical issues of implantability, biocompatibility and the regulatory framework. The book is aimed at a broad audience of engineering professionals, life scientists and students working in the multidisciplinary area of biomedical engineering. It explains essential principles of electrical, chemical, optical and mechanical engineering as well as biomedical science, intended for readers with a variety of scientific backgrounds. In addition, it will be valuable for medical professionals and researchers. An online tutorial developed by the authors provides learning reinforcement for students and professionals alike. - Reviews of state-of-the-art molecular sensors and nanotechnologies - Explains principles of sensors and fundamental theories with homework problems at the end of each chapter to facilitate learning - Demystifies the vertical integration from nanomaterials to devices design - Covers practical applications the recent progress in state-of-the-art sensor technologies - Includes case studies of important commercial products - Covers the critical issues of implantability, biocompatibility and the regulatory framework
