X-ray Scattering From Semiconductors And Other Materials (3rd Edition) PDF Download
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Author: Paul F Fewster
Publisher: World Scientific
ISBN: 9814436941
Category : Science
Languages : en
Pages : 510
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Book Description
This third edition has been extended considerably to incorporate more information on instrument influences on the interpretation of X-ray scattering profiles and reciprocal space maps. Another significant inclusion is on the scattering from powder samples, covering a new theoretical approach that explains features that conventional theory cannot. The new edition includes some of the latest methodologies and theoretical treatments, including the latest thinking on dynamical theory and diffuse scattering. Recent advances in detectors also present new opportunities for rapid data collection and some very different approaches in data collection techniques; the possibilities associated with these advances will be included.This edition should be of interest to those who use X-ray scattering to understand more about their samples, so that they can make a better judgment of the parameter and confidence levels in their analyses, and how the combination of instrument, sample and detection should be considered as a whole to ensure this.
Author: Paul F Fewster
Publisher: World Scientific
ISBN: 9814436941
Category : Science
Languages : en
Pages : 510
Get Book Here
Book Description
This third edition has been extended considerably to incorporate more information on instrument influences on the interpretation of X-ray scattering profiles and reciprocal space maps. Another significant inclusion is on the scattering from powder samples, covering a new theoretical approach that explains features that conventional theory cannot. The new edition includes some of the latest methodologies and theoretical treatments, including the latest thinking on dynamical theory and diffuse scattering. Recent advances in detectors also present new opportunities for rapid data collection and some very different approaches in data collection techniques; the possibilities associated with these advances will be included.This edition should be of interest to those who use X-ray scattering to understand more about their samples, so that they can make a better judgment of the parameter and confidence levels in their analyses, and how the combination of instrument, sample and detection should be considered as a whole to ensure this.
Author: Paul F Fewster
Publisher: World Scientific
ISBN: 178326098X
Category : Technology & Engineering
Languages : en
Pages : 315
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Book Description
This book presents a practical guide to the analysis of materials and includes a thorough description of the underlying theories and instrumental aberrations caused by real experiments. The main emphasis concerns the analysis of thin films and multilayers, primarily semiconductors, although the techniques are very general. Semiconductors can be very perfect composite crystals and therefore their study can lead to the largest volume of information, since X-ray scattering can assess the deviation from perfection.The description is intentionally conceptual so that the reader can grasp the real processes involved. In this way the analysis becomes significantly easier, making the reader aware of misleading artifacts and assisting in the determination of a more complete and reliable analysis. The theory of scattering is very important and is covered in such a way that the assumptions are clear. Greatest emphasis is placed on the dynamical diffraction theory including new developments extending its applicability to reciprocal space mapping and modelling samples with relaxed and distorted interfaces.A practical guide to the measurement of diffraction patterns, including the smearing effects introduced to the measurement, is also presented.
Author: Paul F Fewster
Publisher: World Scientific
ISBN: 1783262079
Category : Science
Languages : en
Pages : 303
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Book Description
X-ray scattering is used extensively to provide detailed structural information about materials. Semiconductors have benefited from X-ray scattering techniques as an essential feedback method for crystal growth, including compositional and thickness determination of thin layers. The methods have been developed to reveal very detailed structural information concerning material quality, interface structure, relaxation, defects, surface damage, etc.This book provides a thorough description of the techniques involved in obtaining that information, including X-ray diffractometers and their associated instrument functions, data collection methods, and the simulation of the diffraction patterns observed. Also presented are examples and procedures for interpreting the data to build a picture of the sample, much of which will be common to materials other than semiconductors./a
Author: Paul F. Fewster
Publisher: Imperial College Pr
ISBN: 9781860943607
Category : Science
Languages : en
Pages : 299
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Book Description
This book presents a practical guide to the analysis of materials and includes a thorough description of the underlying theories and instrumental aberrations caused by real experiments. The main emphasis concerns the analysis of thin films and multilayers, primarily semiconductors, although the techniques are very general. Semiconductors can be very perfect composite crystals and therefore their study can lead to the largest volume of information, since X-ray scattering can assess the deviation from perfection.The description is intentionally conceptual so that the reader can grasp the real processes involved. In this way the analysis becomes significantly easier, making the reader aware of misleading artifacts and assisting in the determination of a more complete and reliable analysis. The theory of scattering is very important and is covered in such a way that the assumptions are clear. Greatest emphasis is placed on the dynamical diffraction theory including new developments extending its applicability to reciprocal space mapping and modelling samples with relaxed and distorted interfaces.A practical guide to the measurement of diffraction patterns, including the smearing effects introduced to the measurement, is also presented.
Author: D. Keith Bowen
Publisher: CRC Press
ISBN: 1420005650
Category : Technology & Engineering
Languages : en
Pages : 296
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Book Description
The scales involved in modern semiconductor manufacturing and microelectronics continue to plunge downward. Effective and accurate characterization of materials with thicknesses below a few nanometers can be achieved using x-rays. While many books are available on the theory behind x-ray metrology (XRM), X-Ray Metrology in Semiconductor Manufacturing is the first book to focus on the practical aspects of the technology and its application in device fabrication and solving new materials problems. Following a general overview of the field, the first section of the book is organized by application and outlines the techniques that are best suited to each. The next section delves into the techniques and theory behind the applications, such as specular x-ray reflectivity, diffraction imaging, and defect mapping. Finally, the third section provides technological details of each technique, answering questions commonly encountered in practice. The authors supply real examples from the semiconductor and magnetic recording industries as well as more than 150 clearly drawn figures to illustrate the discussion. They also summarize the principles and key information about each method with inset boxes found throughout the text. Written by world leaders in the field, X-Ray Metrology in Semiconductor Manufacturing provides real solutions with a focus on accuracy, repeatability, and throughput.
Author: Ullrich Pietsch
Publisher: Springer Science & Business Media
ISBN: 1475740506
Category : Technology & Engineering
Languages : en
Pages : 410
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Book Description
During the last 20 years interest in high-resolution x-ray diffractometry and reflectivity has grown as a result of the development of the semiconductor industry and the increasing interest in material research of thin layers of magnetic, organic, and other materials. For example, optoelectronics requires a subsequent epitaxy of thin layers of different semiconductor materials. Here, the individuallayer thicknesses are scaled down to a few atomic layers in order to exploit quantum effects. For reasons of electronic and optical confinement, these thin layers are embedded within much thicker cladding layers or stacks of multilayers of slightly different chemical composition. It is evident that the interface quality of those quantum weHs is quite important for the function of devices. Thin metallic layers often show magnetic properties which do not ap pear for thick layers or in bulk material. The investigation of the mutual interaction of magnetic and non-magnetic layers leads to the discovery of colossal magnetoresistance, for example. This property is strongly related to the thickness and interface roughness of covered layers.
Author: Alessandro Cunsolo
Publisher: World Scientific
ISBN: 9813229500
Category : Science
Languages : en
Pages : 325
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Book Description
Since its development toward the end of the past millennium, high-resolution Inelastic X-Ray Scattering (IXS) has substantially improved our knowledge of the collective dynamics of liquids at mesoscopic scales, that is, over distances and time-lapses approaching those typical of first neighboring atoms' interactions. However, despite the undoubted scientific relevance and the rapid evolution toward maturity, comprehensive monographs on this technique are not available. The primary purpose of this book is to partially fill this lack while providing a helpful reference for both mature scientists and less experienced researchers in the field.After a general introduction to the fundamental aspects of scattering measurements, the IXS cross-section is analytically derived, and the complementarity with Inelastic Neutron Scattering is discussed in detail.The remainder of the book reviews representative IXS studies on simple fluids focusing on topics as relevant as the dynamic crossover from the hydrodynamic to the kinetic regime, the onset of relaxation phenomena and related high-frequency viscoelasticity, the gradual emergence of quantum effects, the evidence of dynamic boundaries partitioning the supercritical domain, the prevalence of solid-like aspects in the high-frequency dynamics of fluids, and the dynamic fingerprints of the polymorphic nature of liquid aggregates.
Author: Yoshio Waseda
Publisher: Springer
ISBN: 354046008X
Category : Technology & Engineering
Languages : en
Pages : 224
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Book Description
The production of multi layered thin films with sufficient reliability is a key technology for device fabrication in micro electronics. In the Co/Cu type multi layers, for example, magnetoresistance has been found as large as 80 % at 4. 2 K and 50 % at room temperature. In addition to such gigantic mag netoresistance, these multi layers indicate anti ferromagnetic and ferromag netic oscillation behavior with an increase in the thickness of the layers of the non magnetic component. These interesting properties of the new synthetic flmctional materials are attributed to their periodic and interracial structures at a microscopic level, although the origin of such peculiar features is not fully understood. Information on the surface structure or the number density of atoms in the near surface region may provide better insight. Amorphous alloys, frequently referred to as metallic glasses, are produced by rapid quenching from the melt. The second generation amorphous alloys, called "bulk amorphous alloys", have been discovered in some Pd based and Zr based alloy systems, with a super cooled liquid region at more than 120 K. In these alloy systems, one can obtain a sample thickness of several centime ters. Growing scientific and technological curiosity about the new amorphous alloys has focused on the fundamental factors, such as the atomic scale struc ture, which are responsible for the thermal stability with certain chemical compositions.
Author: Elias Vlieg
Publisher:
ISBN:
Category :
Languages : en
Pages : 141
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Book Description
Author: Alicia Esther Ares
Publisher: BoD – Books on Demand
ISBN: 9535128876
Category : Technology & Engineering
Languages : en
Pages : 230
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Book Description
X-ray scattering techniques are a family of nondestructive analytical techniques. Using these techniques, scientists obtain information about the crystal structure and chemical and physical properties of materials. Nowadays, different techniques are based on observing the scattered intensity of an X-ray beam hitting a sample as a function of incident and scattered angle, polarization, and wavelength. This book is intended to give overviews of the relevant X-ray scattering techniques, particularly about inelastic X-ray scattering, elastic scattering, grazing-incidence small-angle X-ray scattering, small-angle X-ray scattering, and high-resolution X-ray diffraction, and, finally, applications of X-ray spectroscopy to study different biological systems.
