Two- and Three-dimensional Ultrananocrystalline Diamond (UNCD) Structures for a High Resolution Diamond-based MEMS Technology PDF Download
Are you looking for read ebook online? Search for your book and save it on your Kindle device, PC, phones or tablets. Download Two- and Three-dimensional Ultrananocrystalline Diamond (UNCD) Structures for a High Resolution Diamond-based MEMS Technology PDF full book. Access full book title Two- and Three-dimensional Ultrananocrystalline Diamond (UNCD) Structures for a High Resolution Diamond-based MEMS Technology by . Download full books in PDF and EPUB format.
Author:
Publisher:
ISBN:
Category :
Languages : en
Pages : 9
Get Book Here
Book Description
Silicon is currently the most commonly used material for the fabrication of microelectromechanical systems (MEMS). However, silicon-based MEMS will not be suitable for long-endurance devices involving components rotating at high speed, where friction and wear need to be minimized, components such as 2-D cantilevers that may be subjected to very large flexural displacements, where stiction is a problem, or components that will be exposed to corrosive environments. The mechanical, thermal, chemical, and tribological properties of diamond make it an ideal material for the fabrication of long-endurance MEMS components. Cost-effective fabrication of these components could in principle be achieved by coating Si with diamond films and using conventional lithographic patterning methods in conjunction with e. g. sacrificial Ti or SiO2 layers. However, diamond coatings grown by conventional chemical vapor deposition (CVD) methods exhibit a coarse-grained structure that prevents high-resolution patterning, or a fine-grained microstructure with a significant amount of intergranular non-diamond carbon. The authors demonstrate here the fabrication of 2-D and 3-D phase-pure ultrananocrystalline diamond (UNCD) MEMS components by coating Si with UNCD films, coupled with lithographic patterning methods involving sacrificial release layers. UNCD films are grown by microwave plasma CVD using C60-Ar or CH4-Ar gas mixtures, which result in films that have 3--5 nm grain size, are 10--20 times smoother than conventionally grown diamond films, are extremely resistant to corrosive environments, and are predicted to have a brittle fracture strength similar to that of single crystal diamond.
Author:
Publisher:
ISBN:
Category :
Languages : en
Pages : 9
Get Book Here
Book Description
Silicon is currently the most commonly used material for the fabrication of microelectromechanical systems (MEMS). However, silicon-based MEMS will not be suitable for long-endurance devices involving components rotating at high speed, where friction and wear need to be minimized, components such as 2-D cantilevers that may be subjected to very large flexural displacements, where stiction is a problem, or components that will be exposed to corrosive environments. The mechanical, thermal, chemical, and tribological properties of diamond make it an ideal material for the fabrication of long-endurance MEMS components. Cost-effective fabrication of these components could in principle be achieved by coating Si with diamond films and using conventional lithographic patterning methods in conjunction with e. g. sacrificial Ti or SiO2 layers. However, diamond coatings grown by conventional chemical vapor deposition (CVD) methods exhibit a coarse-grained structure that prevents high-resolution patterning, or a fine-grained microstructure with a significant amount of intergranular non-diamond carbon. The authors demonstrate here the fabrication of 2-D and 3-D phase-pure ultrananocrystalline diamond (UNCD) MEMS components by coating Si with UNCD films, coupled with lithographic patterning methods involving sacrificial release layers. UNCD films are grown by microwave plasma CVD using C60-Ar or CH4-Ar gas mixtures, which result in films that have 3--5 nm grain size, are 10--20 times smoother than conventionally grown diamond films, are extremely resistant to corrosive environments, and are predicted to have a brittle fracture strength similar to that of single crystal diamond.
Author: Maarten De Boer
Publisher: Mrs Proceedings
ISBN:
Category : Science
Languages : en
Pages : 344
Get Book Here
Book Description
The MRS Symposium Proceeding series is an internationally recognised reference suitable for researchers and practitioners.
Author: Olga A. Shenderova
Publisher: William Andrew
ISBN: 1437734650
Category : Science
Languages : en
Pages : 582
Get Book Here
Book Description
Ultrananocrystalline Diamond: Synthesis, Properties, and Applications is a unique practical reference handbook. Written by the leading experts worldwide it introduces the science of UNCD for both the R&D community and applications developers using UNCD in a diverse range of applications from macro to nanodevices, such as energy-saving ultra-low friction and wear coatings for mechanical pump seals and tools, high-performance MEMS/NEMS-based systems (e.g. in telecommunications), the next generation of high-definition flat panel displays, in-vivo biomedical implants, and biosensors. This work brings together the basic science of nanoscale diamond structures, with detailed information on ultra-nanodiamond synthesis, properties, and applications. The book offers discussion on UNCD in its two forms, as a powder and as a chemical vapor deposited film. Also discussed are the superior mechanical, tribological, transport, electrochemical, and electron emission properties of UNCD for a wide range of applications including MEMS/ NEMS, surface acoustic wave (SAW) devices, electrochemical sensors, coatings for field emission arrays, photonic and RF switching, biosensors, and neural prostheses, etc. Ultrananocrystalline Diamond summarises the most recent developments in the nanodiamond field, and presents them in a way that will be useful to the R&D community in both academic and corporate sectors. Coverage of both nanodiamond particles and films make this a valuable resource for both the nanotechnology community and the field of thin films / vacuum deposition. Written by the world's leading experts in nanodiamond, this second edition builds on its predecessor's reputation as the most up-to-date resource in the field.
Author:
Publisher:
ISBN:
Category :
Languages : en
Pages : 14
Get Book Here
Book Description
MEMS devices are currently fabricated primarily in silicon because of the available surface machining technology. However, Si has poor mechanical and tribological properties, and practical MEMS devices are currently limited primarily to applications involving only bending and flexural motion, such as cantilever accelerometers and vibration sensors, However, because of the poor flexural strength and fracture toughness of Si, and the tendency of Si to adhere to hydrophyllic surfaces, even these simple devices have limited dynamic range. Future MEMS applications that involve significant rolling or sliding contact will require the use of new materials with significantly improved mechanical and tribological properties, and the ability to perform well in harsh environments. Diamond is a superhard material of high mechanical strength, exceptional chemical inertness, and outstanding thermal stability. The brittle fracture strength is 23 times that of Si, and the projected wear life of diamond MEMS moving mechanical assemblies (MEMS-MMAS) is 10,000 times greater than that of Si MMAs. However, as the hardest known material, diamond is notoriously difficult to fabricate. Conventional CVD thin film deposition methods offer an approach to the fabrication of ultra-small diamond structures, but the films have large grain size, high internal stress, poor intergranular adhesion, and very rough surfaces, and are consequently ill-suited for MEMS-MMA applications. A thin film deposition process has been developed that produces phase-pure ultrananocrystalline diamond (UNCD) with morphological and mechanical properties that are ideally suited for MEMS applications in general, and MMA use in particular. We have developed lithographic techniques for the fabrication of diamond microstructure including cantilevers and multi-level devices, acting as precursors to micro-bearings and gears, making UNCD a promising material for the development of high performance MEMS devices.
Author:
Publisher:
ISBN:
Category : Micromechanics
Languages : en
Pages : 508
Get Book Here
Book Description
Author: Y-C. Chen
Publisher: Elsevier Inc. Chapters
ISBN: 0128088044
Category : Technology & Engineering
Languages : en
Pages : 23
Get Book Here
Book Description
Diamond films have been considered as ideal candidates for protective coatings on bioimplants, as bioimplants themselves or as a guide for neural differentiation, because of their excellent mechanical properties, functional amenability, biocompatibility, and unique nanostructures. We separate nanocrystalline diamond films into two categories based on growth chemistries, nanostructure, and properties: nanocrystalline diamond (NCD) and ultrananocrystalline diamond (UNCD). UNCD is suitable for application as a hermetic coating for protection of implantable artificial retina medical devices, and also contributes to improvement of neural stem cell (NSC)-based cell transplantation, tissue engineering for neural tissue repair and regeneration and study of neural cell differentiation.
Author: Orlando Auciello
Publisher: Cambridge University Press
ISBN: 1107088739
Category : Technology & Engineering
Languages : en
Pages : 297
Get Book Here
Book Description
A comprehensive guide to ultrananocrystalline-diamond (UNCDTM) and thin film technology for implantable and external medical devices, edited by a pioneer in the field. Covering synthesis and properties, clinical applications, and regulation, it is essential reading for researchers and practitioners in materials science and biomedical engineering.
Author: Olga A. Shenderova
Publisher: Noyes Publications
ISBN: 9780815515241
Category : Technology & Engineering
Languages : en
Pages : 600
Get Book Here
Book Description
This unique, practical reference brings together the basic science of nanoscale carbon structures, particularly its diamond phase, with detailed information on nanodiamond synthesis, properties, and applications. Readers learn about the superior mechanical, tribological, transport, electrochemical, and electron emission properties of UNCD for a wide range of applications.
Author: O. Auciello
Publisher: Elsevier Inc. Chapters
ISBN: 0128088036
Category : Technology & Engineering
Languages : en
Pages : 28
Get Book Here
Book Description
This chapter discusses the integration of physiology, new biomaterials and micro and nanofabrication technologies, which enable the development of new devices implantable in the human eye for diagnosis, monitoring, and/or therapeutic treatment of vision. The chapter focuses on the science and technology of biomaterials for three main applications: to restore sight to people blinded by genetically induced degeneration of retina photoreceptors; for draining aqueous humour from the eyes of people with glaucoma condition; and a novel method for retina detachment therapy.
Author: Dieter M. Gruen
Publisher: Springer Science & Business Media
ISBN: 1402033222
Category : Science
Languages : en
Pages : 410
Get Book Here
Book Description
We are pleased to present the Proceedings of the NATO Advanced Research Workshop “Syntheses, Properties and Applications of Ultrananocrystalline Diamond” which was held June 7-10, 2004 in St. Petersburg, Russia. The main goal of the Workshop was to provide a forum for the intensive exchange of opinions between scientists from Russia and NATO countries in order to give additional impetus to the development of the science and applications of a new carbon nanostructure, called ultrananocrystalline diamond (UNCD) composed of 2-5 nm crystallites. There are two forms of UNCD, dispersed particles and films. The two communities of researchers working on these two forms of UNCD have hitherto lacked a common forum in which to explore areas of scientific and technological overlap. As a consequence, the two fields have up to now developed independently of each other. The time had clearly come to remedy this situation in order to be able to take full advantage of the enormous potential for societal benefits to be derived from exploiting the synergistic relationships between UNCD dispersed particulates and UNCD films. The NATO sponsored ARW therefore occurred in a very timely manner and was successful in beginning the desired dialogue, a precondition for making progress toward the above stated goal. The discovery of UNCD completes a triadof nanostructured carbonswhich includes fullerenes and nanotubes.
