Tungsten and Other Advanced Metals for ULSI Applications in 1990: Volume 6

Tungsten and Other Advanced Metals for ULSI Applications in 1990: Volume 6 PDF Author: Gregory C. Smith
Publisher: Mrs Conference Proceedings
ISBN:
Category : Science
Languages : en
Pages : 422

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Book Description
The MRS Symposium Proceeding series is an internationally recognised reference suitable for researchers and practitioners.

Tungsten and Other Advanced Metals for ULSI Applications in 1990: Volume 6

Tungsten and Other Advanced Metals for ULSI Applications in 1990: Volume 6 PDF Author: Gregory C. Smith
Publisher: Mrs Conference Proceedings
ISBN:
Category : Science
Languages : en
Pages : 422

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Book Description
The MRS Symposium Proceeding series is an internationally recognised reference suitable for researchers and practitioners.

Handbook of Semiconductor Manufacturing Technology

Handbook of Semiconductor Manufacturing Technology PDF Author: Yoshio Nishi
Publisher: CRC Press
ISBN: 1420017667
Category : Technology & Engineering
Languages : en
Pages : 1720

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Book Description
Retaining the comprehensive and in-depth approach that cemented the bestselling first edition's place as a standard reference in the field, the Handbook of Semiconductor Manufacturing Technology, Second Edition features new and updated material that keeps it at the vanguard of today's most dynamic and rapidly growing field. Iconic experts Robert Doering and Yoshio Nishi have again assembled a team of the world's leading specialists in every area of semiconductor manufacturing to provide the most reliable, authoritative, and industry-leading information available. Stay Current with the Latest Technologies In addition to updates to nearly every existing chapter, this edition features five entirely new contributions on... Silicon-on-insulator (SOI) materials and devices Supercritical CO2 in semiconductor cleaning Low-κ dielectrics Atomic-layer deposition Damascene copper electroplating Effects of terrestrial radiation on integrated circuits (ICs) Reflecting rapid progress in many areas, several chapters were heavily revised and updated, and in some cases, rewritten to reflect rapid advances in such areas as interconnect technologies, gate dielectrics, photomask fabrication, IC packaging, and 300 mm wafer fabrication. While no book can be up-to-the-minute with the advances in the semiconductor field, the Handbook of Semiconductor Manufacturing Technology keeps the most important data, methods, tools, and techniques close at hand.

Advanced Metallization for ULSI Applications

Advanced Metallization for ULSI Applications PDF Author:
Publisher:
ISBN:
Category : Electrochemical metallizing
Languages : en
Pages : 616

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Advanced Metallizations in Microelectronics: Volume 181

Advanced Metallizations in Microelectronics: Volume 181 PDF Author: Avishay Katz
Publisher:
ISBN:
Category : Technology & Engineering
Languages : en
Pages : 672

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Book Description
The MRS Symposium Proceeding series is an internationally recognised reference suitable for researchers and practitioners.

CVD-XI

CVD-XI PDF Author: Karl E. Spear
Publisher:
ISBN:
Category : Vapor-plating
Languages : en
Pages : 762

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Proceedings of the Symposium Om Process Control, Diagnostics, and Modeling in Semiconductor Manufacturing

Proceedings of the Symposium Om Process Control, Diagnostics, and Modeling in Semiconductor Manufacturing PDF Author: M. Meyyappan
Publisher: The Electrochemical Society
ISBN: 9781566770965
Category : Technology & Engineering
Languages : en
Pages : 644

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Advanced Techniques for Integrated Circuit Processing II

Advanced Techniques for Integrated Circuit Processing II PDF Author: James Bondur
Publisher:
ISBN:
Category : Technology & Engineering
Languages : en
Pages : 422

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Proceedings of the Symposium on Fundamental Gas-Phase and Surface Chemistry of Vapor-Phase Materials Synthesis

Proceedings of the Symposium on Fundamental Gas-Phase and Surface Chemistry of Vapor-Phase Materials Synthesis PDF Author: Mark Donald Allendorf
Publisher: The Electrochemical Society
ISBN: 9781566772174
Category : Science
Languages : en
Pages : 506

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Tungsten and Other Advanced Metals for VLSI/ULSI Applications

Tungsten and Other Advanced Metals for VLSI/ULSI Applications PDF Author:
Publisher:
ISBN:
Category : Heat resistant alloys
Languages : en
Pages : 456

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Journal of the Institution of Electronics and Telecommunication Engineers

Journal of the Institution of Electronics and Telecommunication Engineers PDF Author:
Publisher:
ISBN:
Category : Electronics
Languages : en
Pages : 618

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Book Description