Transmission Electron Microscopy in Micro-nanoelectronics PDF Download
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Author: Alain Claverie
Publisher: John Wiley & Sons
ISBN: 1118579054
Category : Technology & Engineering
Languages : en
Pages : 280
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Book Description
Today, the availability of bright and highly coherent electron sources and sensitive detectors has radically changed the type and quality of the information which can be obtained by transmission electron microscopy (TEM). TEMs are now present in large numbers not only in academia, but also in industrial research centers and fabs. This book presents in a simple and practical way the new quantitative techniques based on TEM which have recently been invented or developed to address most of the main challenging issues scientists and process engineers have to face to develop or optimize semiconductor layers and devices. Several of these techniques are based on electron holography; others take advantage of the possibility of focusing intense beams within nanoprobes. Strain measurements and mappings, dopant activation and segregation, interfacial reactions at the nanoscale, defect identification and specimen preparation by FIB are among the topics presented in this book. After a brief presentation of the underlying theory, each technique is illustrated through examples from the lab or fab.
Author: Alain Claverie
Publisher: John Wiley & Sons
ISBN: 1118579054
Category : Technology & Engineering
Languages : en
Pages : 280
Get Book Here
Book Description
Today, the availability of bright and highly coherent electron sources and sensitive detectors has radically changed the type and quality of the information which can be obtained by transmission electron microscopy (TEM). TEMs are now present in large numbers not only in academia, but also in industrial research centers and fabs. This book presents in a simple and practical way the new quantitative techniques based on TEM which have recently been invented or developed to address most of the main challenging issues scientists and process engineers have to face to develop or optimize semiconductor layers and devices. Several of these techniques are based on electron holography; others take advantage of the possibility of focusing intense beams within nanoprobes. Strain measurements and mappings, dopant activation and segregation, interfacial reactions at the nanoscale, defect identification and specimen preparation by FIB are among the topics presented in this book. After a brief presentation of the underlying theory, each technique is illustrated through examples from the lab or fab.
Author: Weilie Zhou
Publisher: Springer Science & Business Media
ISBN: 0387396209
Category : Technology & Engineering
Languages : en
Pages : 533
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Book Description
This book presents scanning electron microscopy (SEM) fundamentals and applications for nanotechnology. It includes integrated fabrication techniques using the SEM, such as e-beam and FIB, and it covers in-situ nanomanipulation of materials. The book is written by international experts from the top nano-research groups that specialize in nanomaterials characterization. The book will appeal to nanomaterials researchers, and to SEM development specialists.
Author: Nan Yao
Publisher: Springer Science & Business Media
ISBN: 1402080069
Category : Technology & Engineering
Languages : en
Pages : 745
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Book Description
Nanostructured materials take on an enormously rich variety of properties and promise exciting new advances in micromechanical, electronic, and magnetic devices as well as in molecular fabrications. The structure-composition-processing-property relationships for these sub 100 nm-sized materials can only be understood by employing an array of modern microscopy and microanalysis tools. Handbook of Microscopy for Nanotechnology aims to provide an overview of the basics and applications of various microscopy techniques for nanotechnology. This handbook highlights various key microcopic techniques and their applications in this fast-growing field. Topics to be covered include the following: scanning near field optical microscopy, confocal optical microscopy, atomic force microscopy, magnetic force microscopy, scanning turning microscopy, high-resolution scanning electron microscopy, orientational imaging microscopy, high-resolution transmission electron microscopy, scanning transmission electron microscopy, environmental transmission electron microscopy, quantitative electron diffraction, Lorentz microscopy, electron holography, 3-D transmission electron microscopy, high-spatial resolution quantitative microanalysis, electron-energy-loss spectroscopy and spectral imaging, focused ion beam, secondary ion microscopy, and field ion microscopy.
Author: Thomas Vogt
Publisher: Springer Science & Business Media
ISBN: 146142190X
Category : Science
Languages : en
Pages : 190
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Book Description
This book presents advances in nanoscale imaging capabilities of scanning transmission electron microscopes, along with superresolution techniques, special denoising methods, application of mathematical/statistical learning theory, and compressed sensing.
Author: Litao Sun
Publisher: Springer Nature
ISBN: 9811968454
Category : Technology & Engineering
Languages : en
Pages : 378
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Book Description
This book focuses on in-situ transmission electron microscopy (TEM), an investigatory technique used to observe a sample’s response to a given stimulus (including electron irradiation, thermal excitation, mechanical force, optical excitation, electric and magnetic fields) at the nanoscale in real time. The book introduces readers to the technical strategy behind the in-situ technique and its developments. It reviews the research frontiers of using in-situ TEM in energy conversion and storage, catalysis, nanomaterials synthesis, nanoelectronics, etc. Furthermore, it discusses the future prospects for in-situ TEM. The book offers a valuable guide for all undergraduate and graduate students who are interested in TEM characterization technology. It also serves as a reference source on cutting-edge in-situ techniques for researchers and engineers.
Author: Zhongquan Liao
Publisher:
ISBN:
Category :
Languages : en
Pages :
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Book Description
Author: Challa S.S.R. Kumar
Publisher: Springer Science & Business Media
ISBN: 3642389341
Category : Science
Languages : en
Pages : 718
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Book Description
Third volume of a 40volume series on nanoscience and nanotechnology, edited by the renowned scientist Challa S.S.R. Kumar. This handbook gives a comprehensive overview about Transmission electron microscopy characterization of nanomaterials. Modern applications and state-of-the-art techniques are covered and make this volume an essential reading for research scientists in academia and industry.
Author: Osvaldo de Oliveira Jr
Publisher: William Andrew
ISBN: 0323497799
Category : Technology & Engineering
Languages : en
Pages : 224
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Book Description
Nanocharacterization Techniques covers the main characterization techniques used in nanomaterials and nanostructures. The chapters focus on the fundamental aspects of characterization techniques and their distinctive approaches. Significant advances that have taken place over recent years in refining techniques are covered, and the mathematical foundations needed to use the techniques are also explained in detail. This book is an important reference for materials scientists and engineers looking for a through analysis of nanocharacterization techniques in order to establish which is best for their needs. Includes a detailed analysis of different nanocharacterization techniques, allowing readers to explore which one is best for their particular needs Provides examples of how each characterization technique has been used, giving readers a greater understanding of how each technique can be profitably used Covers the mathematical background needed to utilize each of these techniques to their best effect, meaning that readers can gain a full understanding of the theoretical principles behind each technique covered Serves as an important, go-to reference for materials scientists and engineers
Author: Royal Society of Chemistry (Great Britain)
Publisher: Royal Society of Chemistry
ISBN: 0854042415
Category : Science
Languages : en
Pages : 319
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Book Description
Nanocharacterisation is a rapidly developing field. Contributions in this book from across the globe provide an overview of the different microscopic techniques for the characterisation of nanostructures.
Author: Jian Min Zuo
Publisher: Springer
ISBN: 1493966073
Category : Technology & Engineering
Languages : en
Pages : 741
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Book Description
This volume expands and updates the coverage in the authors' popular 1992 book, Electron Microdiffraction. As the title implies, the focus of the book has changed from electron microdiffraction and convergent beam electron diffraction to all forms of advanced transmission electron microscopy. Special attention is given to electron diffraction and imaging, including high-resolution TEM and STEM imaging, and the application of these methods to crystals, their defects, and nanostructures. The authoritative text summarizes and develops most of the useful knowledge which has been gained over the years from the study of the multiple electron scattering problem, the recent development of aberration correctors and their applications to materials structure characterization, as well as the authors' extensive teaching experience in these areas. Advanced Transmission Electron Microscopy: Imaging and Diffraction in Nanoscience is ideal for use as an advanced undergraduate or graduate level text in support of course materials in Materials Science, Physics or Chemistry departments.
