Author: Philip William Diodato
Publisher:
ISBN:
Category : Thin films
Languages : en
Pages : 348
Book Description
The Structural, Optical, and Electrical Properties of RF Sputtered (Hg0 --5Cd0 25)Te Thin Films
Author: Philip William Diodato
Publisher:
ISBN:
Category : Thin films
Languages : en
Pages : 348
Book Description
Publisher:
ISBN:
Category : Thin films
Languages : en
Pages : 348
Book Description
Electrical, Optical and Structural Properties of Indium Tin Oxide Thin Films Deposited on Glass, Pet and Polycarbonate Substrates by Rf Sputtering
Author: Teck-Shiun Lim
Publisher:
ISBN:
Category :
Languages : en
Pages : 140
Book Description
Publisher:
ISBN:
Category :
Languages : en
Pages : 140
Book Description
Selected Electrical Properties of R.f. Sputtered Al2O3-Cr2O3 Thin Films
Author: Bryant Coffin Bechtold
Publisher:
ISBN:
Category : Thin films
Languages : en
Pages : 202
Book Description
Publisher:
ISBN:
Category : Thin films
Languages : en
Pages : 202
Book Description
Electrical Properties of R.F. Sputtered Thin Oxide Films
Author: H. W. Hilou
Publisher:
ISBN:
Category :
Languages : en
Pages :
Book Description
Publisher:
ISBN:
Category :
Languages : en
Pages :
Book Description
Investigations of the Electrical and Optical Properties of RF Sputtered Bismuth Oxide Thin Films
Author: Haydar Mahmoud Salih
Publisher:
ISBN:
Category :
Languages : en
Pages :
Book Description
Publisher:
ISBN:
Category :
Languages : en
Pages :
Book Description
STRUCTURE AND ELECTRICAL PROPERTIES OF RF SPUTTER DEPOSITED INDIUM ANTIMON IDE THIN FILMS
Author:
Publisher:
ISBN:
Category :
Languages : en
Pages : 70
Book Description
During the last few years, sputtering has become a very important industrial technique for depositing thin films. Typical applications include metalization and passivation in the electronics industry, the deposition of complex cermets, glasses, and plastics, and the formation of coatings for corrosion, abrasion, and wear resistance. However, relatively little work has been reported on the growth of compound semiconducting films by sputtering.
Publisher:
ISBN:
Category :
Languages : en
Pages : 70
Book Description
During the last few years, sputtering has become a very important industrial technique for depositing thin films. Typical applications include metalization and passivation in the electronics industry, the deposition of complex cermets, glasses, and plastics, and the formation of coatings for corrosion, abrasion, and wear resistance. However, relatively little work has been reported on the growth of compound semiconducting films by sputtering.
RF- Sputtered Cadmium Oxide Thin Films for Gas Sensing Application
Author: Anil Kumar Gadipelly
Publisher: LAP Lambert Academic Publishing
ISBN: 9783659539350
Category :
Languages : en
Pages : 176
Book Description
In this book we have discussed the preparation and characterization of CdO thin films using RF reactive magnetron sputtering technique. The deposition parameters such as oxygen partial pressure, substrate temperature and film thickness are optimized for producing good quality films. Systematic characterization of as deposited and annealed films has been discussed from the crystal structure, surface morphology, film composition, optical and electrical properties. The films prepared under optimized conditions are tested for gas sensing characteristics towards ammonia gas.
Publisher: LAP Lambert Academic Publishing
ISBN: 9783659539350
Category :
Languages : en
Pages : 176
Book Description
In this book we have discussed the preparation and characterization of CdO thin films using RF reactive magnetron sputtering technique. The deposition parameters such as oxygen partial pressure, substrate temperature and film thickness are optimized for producing good quality films. Systematic characterization of as deposited and annealed films has been discussed from the crystal structure, surface morphology, film composition, optical and electrical properties. The films prepared under optimized conditions are tested for gas sensing characteristics towards ammonia gas.
Electrical and Optical Properties of RF Sputtered Tin Oxide Films
Author: Sarah Eunkyung Kim
Publisher:
ISBN:
Category :
Languages : en
Pages : 140
Book Description
Publisher:
ISBN:
Category :
Languages : en
Pages : 140
Book Description
Investigation on Electrical Properties of RF Sputtered Deposited BCN Thin Films
Author: Adithya Prakash
Publisher:
ISBN:
Category :
Languages : en
Pages : 53
Book Description
The ever increasing advancements in semiconductor technology and continuous scaling of CMOS devices mandate the need for new dielectric materials with low-k values. The interconnect delay can be reduced not only by the resistance of the conductor but also by decreasing the capacitance of dielectric layer. Also cross-talk is a major issue faced by semiconductor industry due to high value of k of the inter-dielectric layer (IDL) in a multilevel wiring scheme in Si ultra large scale integrated circuit (ULSI) devices. In order to reduce the time delay, it is necessary to introduce a wiring metal with low resistivity and a high quality insulating film with a low dielectric constant which leads to a reduction of the wiring capacitance. Boron carbon nitride (BCN) films are prepared by reactive magnetron sputtering from a B4C target and deposited to make metal-insulator-metal (MIM) sandwich structures using aluminum as the top and bottom electrodes. BCN films are deposited at various N2/Ar gas flow ratios, substrate temperatures and process pressures. The electrical characterization of the MIM devices includes capacitance vs. voltage (C-V), current vs voltage, and breakdown voltage characteristics. The above characterizations are performed as a function of deposition parameters.
Publisher:
ISBN:
Category :
Languages : en
Pages : 53
Book Description
The ever increasing advancements in semiconductor technology and continuous scaling of CMOS devices mandate the need for new dielectric materials with low-k values. The interconnect delay can be reduced not only by the resistance of the conductor but also by decreasing the capacitance of dielectric layer. Also cross-talk is a major issue faced by semiconductor industry due to high value of k of the inter-dielectric layer (IDL) in a multilevel wiring scheme in Si ultra large scale integrated circuit (ULSI) devices. In order to reduce the time delay, it is necessary to introduce a wiring metal with low resistivity and a high quality insulating film with a low dielectric constant which leads to a reduction of the wiring capacitance. Boron carbon nitride (BCN) films are prepared by reactive magnetron sputtering from a B4C target and deposited to make metal-insulator-metal (MIM) sandwich structures using aluminum as the top and bottom electrodes. BCN films are deposited at various N2/Ar gas flow ratios, substrate temperatures and process pressures. The electrical characterization of the MIM devices includes capacitance vs. voltage (C-V), current vs voltage, and breakdown voltage characteristics. The above characterizations are performed as a function of deposition parameters.
The Structural and Electrical Properties of Thin Films Sputtered from a Platinum Cathode in Argon-oxygen Mixtures
Author: Carl David Bennewitz
Publisher:
ISBN:
Category : Thin films
Languages : en
Pages : 0
Book Description
Publisher:
ISBN:
Category : Thin films
Languages : en
Pages : 0
Book Description