The Growth and Characterization of III-V Compound Semiconductor Materials by Metalorganic Chemical Vapor Deposition and Laser Photochemical Vapor Deposition PDF Download
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Author: Pamela Kay York
Publisher:
ISBN:
Category :
Languages : en
Pages : 268
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Author: Pamela Kay York
Publisher:
ISBN:
Category :
Languages : en
Pages : 268
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Book Description
Author: Stuart Irvine
Publisher: John Wiley & Sons
ISBN: 1119313015
Category : Technology & Engineering
Languages : en
Pages : 582
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Book Description
Systematically discusses the growth method, material properties, and applications for key semiconductor materials MOVPE is a chemical vapor deposition technique that produces single or polycrystalline thin films. As one of the key epitaxial growth technologies, it produces layers that form the basis of many optoelectronic components including mobile phone components (GaAs), semiconductor lasers and LEDs (III-Vs, nitrides), optical communications (oxides), infrared detectors, photovoltaics (II-IV materials), etc. Featuring contributions by an international group of academics and industrialists, this book looks at the fundamentals of MOVPE and the key areas of equipment/safety, precursor chemicals, and growth monitoring. It covers the most important materials from III-V and II-VI compounds to quantum dots and nanowires, including sulfides and selenides and oxides/ceramics. Sections in every chapter of Metalorganic Vapor Phase Epitaxy (MOVPE): Growth, Materials Properties and Applications cover the growth of the particular materials system, the properties of the resultant material, and its applications. The book offers information on arsenides, phosphides, and antimonides; nitrides; lattice-mismatched growth; CdTe, MCT (mercury cadmium telluride); ZnO and related materials; equipment and safety; and more. It also offers a chapter that looks at the future of the technique. Covers, in order, the growth method, material properties, and applications for each material Includes chapters on the fundamentals of MOVPE and the key areas of equipment/safety, precursor chemicals, and growth monitoring Looks at important materials such as III-V and II-VI compounds, quantum dots, and nanowires Provides topical and wide-ranging coverage from well-known authors in the field Part of the Materials for Electronic and Optoelectronic Applications series Metalorganic Vapor Phase Epitaxy (MOVPE): Growth, Materials Properties and Applications is an excellent book for graduate students, researchers in academia and industry, as well as specialist courses at undergraduate/postgraduate level in the area of epitaxial growth (MOVPE/ MOCVD/ MBE).
Author:
Publisher:
ISBN:
Category : Dissertations, Academic
Languages : en
Pages : 942
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Author: University of Illinois (Urbana-Champaign campus). Engineering Experiment Station
Publisher:
ISBN:
Category : Engineering
Languages : en
Pages : 384
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Author: University of Illinois at Urbana-Champaign. Office of Engineering Publications
Publisher:
ISBN:
Category : Engineering
Languages : en
Pages : 408
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Author:
Publisher:
ISBN:
Category :
Languages : en
Pages : 288
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Book Description
This report describes the results of a program to develop a more complete understanding of the physical and chemical processes involved in low-temperature growth of III-V compounds by metal-organic chemical vapor deposition (MOCVD) and to develop a low-temperature process that is suitable for the growth of high-efficiency solar cells. The program was structured to develop a better understanding of the chemical reactions involved in MOCVD growth, to develop a model of the processes occurring in the gas phase, to understand the physical kinetics and reactions operative on the surface of the growing crystal, and to develop an understanding of the means by which these processes may be altered to reduce the temperature of growth and the utilization of toxic hydrides. The basic approach was to develop the required information about the chemical and physical kinetics operative in the gas phase and on the surface by the direct physical measurement of the processes whenever possible. The program included five tasks: (1) MOCVD growth process characterization, (2) photoenhanced MOCVD studies, (3) materials characterization, (4) device fabrication and characterization, and (5) photovoltaic training. Most of the goals of the program were met and significant progress was made in defining an approach that would allow both high throughput and high uniformity growth of compound semiconductors at low temperatures. The technical activity was focused on determining the rates of thermal decomposition of trimethyl gallium, exploring alternate arsenic sources for use MOCVD, and empirical studies of atomic layer epitaxy as an approach.
Author:
Publisher:
ISBN:
Category : Aeronautics
Languages : en
Pages : 1134
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Author: Robert M. Biefeld
Publisher:
ISBN:
Category :
Languages : en
Pages : 4
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Book Description
Author: Toivo T. Kodas
Publisher: Wiley-VCH
ISBN:
Category : Science
Languages : en
Pages : 570
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Book Description
High purity, thin metal coatings have a variety of important commercial applications, for example, in the microelectronics industry, as catalysts, as protective and decorative coatings as well as in gas-diffusion barriers. This book offers detailed, up- to-date coverage of the chemistry behind the vapor deposition of different metals from organometallic precursors. In nine chapters, the CVD of metals including aluminum, tungsten, gold, silver, platinum, palladium, nickel, as well as copper from copper(I) and copper(II) compounds is covered. The synthesis and properties of the precursors, the growth process, morphology, quality and adhesion of the resulting films as well as laser- assisted, ion- assisted and plasma-assisted methods are discussed. Present applications and prospects for future developments are summarized. With ca. 1000 references and a glossary, this book is a unique source of in-depth information. It is indispensable for chemists, physicists, engineers and materials scientists working with metal- coating processes and technologies. From Reviews: 'I highly recommend this book to anyone interested in learning more about the chemistry of metal CVD.' J. Am Chem. Soc.
Author: National Aeronautics and Space Adm Nasa
Publisher: Independently Published
ISBN: 9781792631511
Category :
Languages : en
Pages : 28
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Book Description
The purpose of this research is to design, install and operate a metal-organic chemical vapor deposition system which is to be used for the epitaxial growth of 3-5 semiconductor binary compounds, and ternary and quaternary alloys. The long-term goal is to utilize this vapor phase deposition in conjunction with existing current controlled liquid phase epitaxy facilities to perform hybrid growth sequences for fabricating integrated optoelectronic devices. Collis, Ward J. and Abul-Fadl, Ali NASA-CR-182346, NAS 1.26:182346 NAG1-403...
