Syntheses and Characterization of Aryldiimido Complexes of Tungsten PDF Download
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Author: Salil Kumar Jha
Publisher:
ISBN:
Category :
Languages : en
Pages : 118
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Author: Salil Kumar Jha
Publisher:
ISBN:
Category :
Languages : en
Pages : 118
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Author: Jeffrey Scott Rommel
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ISBN:
Category : Tungsten compounds
Languages : en
Pages : 520
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Author: Mee Kyoung Kim
Publisher:
ISBN:
Category : Tungsten compounds
Languages : en
Pages : 240
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Author: Corey B. Wilder
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Category :
Languages : en
Pages :
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A series of tungsten guanidinate and amidinate complexes were synthesized to serve as precursors for the metal-organic chemical vapor deposition of tungsten nitride. Compounds were characterized by 1H and 13C NMR. In addition, mass spectrometry was used for characterization as well as to give insight into precursor fragmentation tendencies. Crystallography experiments were also conducted to investigate the bonding motifs present in the series of compounds.
Author: Demircani Oktay
Publisher:
ISBN:
Category :
Languages : en
Pages : 74
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Author: William R. H. Wright
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Category : Alkenes
Languages : en
Pages : 0
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Author: Vladimir Kolesnichenko
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ISBN:
Category :
Languages : en
Pages : 146
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Author: Sanjay Kumar Mandal
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Category : Tungsten compounds
Languages : en
Pages : 374
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Author: Jürgen Koller
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Category :
Languages : en
Pages :
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Viability of the deposited films as Cu diffusion barriers was evaluated by depositing 100 nm of PVD Cu onto the diffusion barrier followed by annealing of the PVD Cu/WN[subscript x]C[subscript y] /Si (100) tri-stack at elevated temperatures (500 °C). The effect of ammonia (NH3) on film properties was studied by addition of NH3 into the carrier gas during CVD experiments. Film properties were determined by XPS, XRD, SEM and 4-point probe. Compositional data revealed an increase in N-incorporation into the produced films when NH3 was used as a co-reactant. Additionally, lower growth rates and less carbon/oxygen incorporation were observed. Annealing and XPS depth profiling were used to assess the quality of the produced films as Cu diffusion barriers. Mixed hydrazido guanidinate tungsten complexes were prepared and characterized by 1H and 13C NMR, mass spectrometry and single-crystal X-ray diffraction. X-ray studies were used to quantify the bonding behavior of the guanidinate ligands in the synthesized compounds. Mass spectrometry gave some insight into possible fragmentation pathways of these complexes.
Author: Javier Fraga-Hernández
Publisher:
ISBN:
Category :
Languages : en
Pages : 0
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