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Author: Miklos Szilagyi
Publisher: Springer Science & Business Media
ISBN: 1461309239
Category : Technology & Engineering
Languages : en
Pages : 550
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Book Description
The field of electron and ion optics is based on the analogy between geometrical light optics and the motion of charged particles in electromagnetic fields. The spectacular development of the electron microscope clearly shows the possibilities of image formation by charged particles of wavelength much shorter than that of visible light. As new applications such as particle accelerators, cathode ray tubes, mass and energy spectrometers, microwave tubes, scanning-type analytical instruments, heavy beam technologies, etc. emerged, the scope of particle beam optics has been exten ded to the formation of fine probes. The goal is to concentrate as many particles as possible in as small a volume as possible. Fabrication of microcircuits is a good example of the growing importance of this field. The current trend is towards increased circuit complexity and pattern density. Because of the diffraction limitation of processes using optical photons and the technological difficulties connected with x-ray processes, charged particle beams are becoming popular. With them it is possible to write directly on a wafer under computer control, without using a mask. Focused ion beams offer especially great possibilities in the submicron region. Therefore, electron and ion beam technologies will most probably playa very important role in the next twenty years or so.
Author: Miklos Szilagyi
Publisher: Springer Science & Business Media
ISBN: 1461309239
Category : Technology & Engineering
Languages : en
Pages : 550
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Book Description
The field of electron and ion optics is based on the analogy between geometrical light optics and the motion of charged particles in electromagnetic fields. The spectacular development of the electron microscope clearly shows the possibilities of image formation by charged particles of wavelength much shorter than that of visible light. As new applications such as particle accelerators, cathode ray tubes, mass and energy spectrometers, microwave tubes, scanning-type analytical instruments, heavy beam technologies, etc. emerged, the scope of particle beam optics has been exten ded to the formation of fine probes. The goal is to concentrate as many particles as possible in as small a volume as possible. Fabrication of microcircuits is a good example of the growing importance of this field. The current trend is towards increased circuit complexity and pattern density. Because of the diffraction limitation of processes using optical photons and the technological difficulties connected with x-ray processes, charged particle beams are becoming popular. With them it is possible to write directly on a wafer under computer control, without using a mask. Focused ion beams offer especially great possibilities in the submicron region. Therefore, electron and ion beam technologies will most probably playa very important role in the next twenty years or so.
Author: Poul Dahl
Publisher: Elsevier
ISBN: 0323160905
Category : Science
Languages : en
Pages : 156
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Book Description
Introduction to Electron and Ion Optics provides the theoretical background needed to understand the subject matter and even be helpful in laboratory works. Seven major parts comprise the book where each focuses on a certain aspect or field. The book begins with an introduction to the general principles about electron and ion optics, specifically as basis for the design of the optical components used in particle analyzers and accelerators. The following parts tackle different aspects such as geometrical optics; scaling rules and dispersion coefficients; fields (paraxial, sector, fringing, quadrupole); lenses (electrostatic, immersion, unipotential, etc.); analyzers (electrostatic, spherical, etc.); and space charge and beam production. Towards the last part of the book, there is an exercises section where various problems are given for the reader to answer. This book caters to students specifically in the field of physics.
Author: Martin Reiser
Publisher: John Wiley & Sons
ISBN: 3527617639
Category : Science
Languages : en
Pages : 634
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Book Description
Although particle accelerators are the book's main thrust, it offers a broad synoptic description of beams which applies to a wide range of other devices such as low-energy focusing and transport systems and high-power microwave sources. Develops material from first principles, basic equations and theorems in a systematic way. Assumptions and approximations are clearly indicated. Discusses underlying physics and validity of theoretical relationships, design formulas and scaling laws. Features a significant amount of recent work including image effects and the Boltzmann line charge density profiles in bunched beams.
Author:
Publisher:
ISBN:
Category : Government publications
Languages : en
Pages : 840
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Book Description
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Publisher:
ISBN:
Category : Power resources
Languages : en
Pages : 1468
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Book Description
Author: Vinh Van Ngo
Publisher:
ISBN:
Category :
Languages : en
Pages : 164
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Book Description
Author: Jon Orloff
Publisher: CRC Press
ISBN: 1420045555
Category : Science
Languages : en
Pages : 666
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Book Description
With the growing proliferation of nanotechnologies, powerful imaging technologies are being developed to operate at the sub-nanometer scale. The newest edition of a bestseller, the Handbook of Charged Particle Optics, Second Edition provides essential background information for the design and operation of high resolution focused probe instruments. The book’s unique approach covers both the theoretical and practical knowledge of high resolution probe forming instruments. The second edition features new chapters on aberration correction and applications of gas phase field ionization sources. With the inclusion of additional references to past and present work in the field, this second edition offers perfectly calibrated coverage of the field’s cutting-edge technologies with added insight into how they work. Written by the leading research scientists, the second edition of the Handbook of Charged Particle Optics is a complete guide to understanding, designing, and using high resolution probe instrumentation.
Author: J. Throck Watson
Publisher: John Wiley & Sons
ISBN: 1118681584
Category : Science
Languages : en
Pages : 972
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Book Description
Completely revised and updated, this text provides an easy-to-read guide to the concept of mass spectrometry and demonstrates its potential and limitations. Written by internationally recognised experts and utilising "real life" examples of analyses and applications, the book presents real cases of qualitative and quantitative applications of mass spectrometry. Unlike other mass spectrometry texts, this comprehensive reference provides systematic descriptions of the various types of mass analysers and ionisation, along with corresponding strategies for interpretation of data. The book concludes with a comprehensive 3000 references. This multi-disciplined text covers the fundamentals as well as recent advance in this topic, providing need-to-know information for researchers in many disciplines including pharmaceutical, environmental and biomedical analysis who are utilizing mass spectrometry
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ISBN:
Category : Controlled fusion
Languages : en
Pages : 310
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Book Description
Author: Stefano Cabrini
Publisher: CRC Press
ISBN: 1420090534
Category : Science
Languages : en
Pages : 546
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Book Description
While many books are dedicated to individual aspects of nanofabrication, there is no single source that defines and explains the total vision of the field. Filling this gap, Nanofabrication Handbook presents a unique collection of new and the most important established approaches to nanofabrication. Contributors from leading research facilities and
