Processing Development and Characterization of GaN Field Effect Transistors PDF Download
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Author: Andrew P. Edwards
Publisher:
ISBN:
Category :
Languages : en
Pages : 252
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Author: Andrew P. Edwards
Publisher:
ISBN:
Category :
Languages : en
Pages : 252
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Author: Andrew Taiann Ping
Publisher:
ISBN:
Category :
Languages : en
Pages : 202
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Author:
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Category :
Languages : en
Pages :
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Author: Lei Zhang
Publisher:
ISBN:
Category : Gallium nitride
Languages : en
Pages : 416
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Author:
Publisher:
ISBN:
Category :
Languages : en
Pages :
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The physical properties of GaN, high saturation velocity, high breakdown fields, high electron mobility, wide bandgap energy and high thermal conductivity, make it a promising material for field effect transistor (FETs) devices for high speed, high power, and small channel length applications. Despite the success of GaN electronic devices such as heterojunction field effect transistors (HFETs), fabrication of GaN Metal Oxide Semiconductor (MOS) transistors remains a technical challenge. The primary reason for this is the non-availability of a gate dielectric with a low density of interface states and the simultaneous requirement of ohmic source/drain contacts which are compatible with enhancement mode structures. Unlike existing III-N HFET devices, which have a high free carrier density two dimensional electron gas (2DEG) in the semiconductor substrate, a MOSFET in either accumulation or inversion mode requires low free carrier concentration in the semiconductor channel, and a high density of free carriers in adjacent source and drain areas. This research explores the development, and demonstration of an enhancement mode (normally off) GaN MOSFET with highly doped source/drain ohmic contacts and compatible gate dielectric. Highly doped source/drain ohmic contacts were formed by selected area epitaxial regrowth of Si doped GaN by metalorganic chemical vapor deposition (MOCVD). The MOS gate dielectrics which have been investigated are Ga2O3/Gd2O3 and SiNx. To achieve uniform and highly doped GaN on reactive ion etched (RIE) and patterned GaN surfaces for source drain contacts, a low temperature regrowth (750-850oC) was developed. A model for growth morphology consistent with the low temperature regrowth of GaN on RIE patterned GaN surfaces is given. The detailed structural, optical, and chemical characterization of the low temperature regrown highly doped GaN for source and drain contacts has been provided. The structural characterization of GaN/Ga2O3/Gd2O3 interface.
Author: Jaesun Lee
Publisher:
ISBN:
Category : Heterostructures
Languages : en
Pages : 176
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Abstract: AlGaN/GaN high electron mobility transistors (HEMTs) have demonstrated high current levels, high breakdown voltages, and high frequency power performance due to its unique material properties. The further improvements of AlGaN/GaN HEMTs rely on the improvement of material quality and further reduction of parasitic resistance. The purpose of this study is to fabricate and characterize AlGaN/GaN HEMTs for high frequency and high power applications. The first focus of this research is to investigate the post-gate annealing effect on the direct current and radio frequency device performances. Post-gate annealing of AlGaN/GaN turns out to be one of the simple and effective techniques to improve breakdown voltage and power performance of devices dramatically. Especially, after post-annealing at 400 0C for 10 minutes, the maximum drain current at a gate bias of 1 V increases from 823 mA/mm to 956 mA/mm. The transconductance of the devices was improved from 223 mS/mm to 233 mS/mm. The breakdown voltages of the devices were enhanced remarkably from 25 V to 187 V. The threshold voltage exhibited a negative shift. The values fT and fMAX increase from 24 GHz and 80 GHz to 55 GHz and 150 GHz, respectively. The output power and associated gain at 10 GHz are improved from 16.4 dBm and 11.4 dB to 25.9 dBm and 19 dB, respectively. The power added efficiency (PAE) is improved from 29.4 to 52.5 %. The second focus is to develop self-aligned AlGaN/GaN HEMTs, which are very attractive because of the minimized source access resistance. However, the thick metal scheme and high processing temperature of ohmic contacts on III-nitrides hinder the realization of self-aligned devices. In this study, self-aligned AlGaN/GaN high electron mobility transistors are fabricated and characterized with the thin metal schemes of Ti/Al/Ti/Au and Mo/Al/Mo/Au for gate to source and drain self-alignment. Thin Mo/Al/Mo/Au metal layer show good ohmic contact behavior even after annealed for 5 minutes at 600 0C in a furnace while thin ohmic metal scheme of Ti/Al/Ti/Au does not produce ohmic contact even after annealed at 750 0C for 30 minutes. The third focus is to develop the enhancement mode AlGaN/GaN HEMTs. Quasi-enhancement mode AlGaN/GaN HEMT devices with 1-um gate length are fabricated. These quasi-enhancement mode devices exhibit the threshold voltage of as low as - 0.3 V, a gm of 140 mS/mm, an fT of 4.3 GHz, and an fMAX of 13.3 GHz, respectively. Further improvement of enhancement-mode GaN-based HEMT devices is desired for applications of complementary integrated circuits.
Author: Yogesh Singh Chauhan
Publisher: Elsevier
ISBN: 0323999409
Category : Technology & Engineering
Languages : en
Pages : 262
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Book Description
GaN Transistor Modeling for RF and Power Electronics: Using The ASM-GaN-HEMT Model covers all aspects of characterization and modeling of GaN transistors for both RF and Power electronics applications. Chapters cover an in-depth analysis of the industry standard compact model ASM-HEMT for GaN transistors. The book details the core surface-potential calculations and a variety of real device effects, including trapping, self-heating, field plate effects, and more to replicate realistic device behavior. The authors also include chapters on step-by-step parameter extraction procedures for the ASM-HEMT model and benchmark test results. GaN is the fastest emerging technology for RF circuits as well as power electronics. This technology is going to grow at an exponential rate over the next decade. This book is envisioned to serve as an excellent reference for the emerging GaN technology, especially for circuit designers, materials science specialists, device engineers and academic researchers and students. - Provides an overview of the operation and physics of GaN-based transistors - Features in-depth description (by the developers of the model) of all aspects of the industry standard ASM-HEMT model for GaN circuits - Details parameter extraction of GaN devices and measurement data requirements for GaN model extraction
Author: Michael Fieger
Publisher:
ISBN:
Category :
Languages : en
Pages : 0
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Author: Yoganand Nrusimha Saripalli
Publisher:
ISBN:
Category :
Languages : en
Pages : 208
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Keywords: Selected Area Regrowth, Reactive Ion Etching, MOSFETs, MOCVD, Epitaxial Growth, Low Temperature Regrowth, HFETs, GaN, Ohmic Contacts, Enhancement Mode GaN MOSFET.
Author: Jaime Alberto Zamudio Flores
Publisher: kassel university press GmbH
ISBN: 3862193640
Category : Gallium nitride
Languages : en
Pages : 257
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Book Description
This work presents a comprehensive modeling strategy for advanced large-size AlGaN/GaN HEMTs. A 22-element equivalent circuit with 12 extrinsic elements, including 6 capacitances, serves as small-signal model and as basis for a large-signal model. ANalysis of such capacitances leads to original equations, employed to form capacitance ratios. BAsic assumptions of existing parameter extractions for 22-element equivalent circuits are perfected: A) Required capacitance ratios are evaluated with device's top-view images. B) Influences of field plates and source air-bridges on these ratios are considered. The large-signal model contains a gate charge's non-quasi-static model and a dispersive-IDS model. THe extrinsic-to-intrinsic voltage transformation needed to calculate non-quasi-static parameters from small-signal parameters is improved with a new description for the measurement's boundary bias points. ALl IDS-model parameters, including time constants of charge-trapping and self-heating, are extracted using pulsed-DC IV and IDS-transient measurements, highlighting the modeling strategy's empirical character.
