Plasma-enhanced Chemical Vapor Deposition of Tungsten Silicide PDF Download
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Author: Andris Edgar Petriceks
Publisher:
ISBN:
Category :
Languages : en
Pages : 326
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Book Description
Author: Andris Edgar Petriceks
Publisher:
ISBN:
Category :
Languages : en
Pages : 326
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Book Description
Author: Hugh O. Pierson
Publisher: William Andrew
ISBN: 1437744885
Category : Technology & Engineering
Languages : en
Pages : 459
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Book Description
Handbook of Chemical Vapor Deposition: Principles, Technology and Applications provides information pertinent to the fundamental aspects of chemical vapor deposition. This book discusses the applications of chemical vapor deposition, which is a relatively flexible technology that can accommodate many variations. Organized into 12 chapters, this book begins with an overview of the theoretical examination of the chemical vapor deposition process. This text then describes the major chemical reactions and reviews the chemical vapor deposition systems and equipment used in research and production. Other chapters consider the materials deposited by chemical vapor deposition. This book discusses as well the potential applications of chemical vapor deposition in semiconductors and electronics. The final chapter deals with ion implantation as a major process in the fabrication of semiconductors. This book is a valuable resource for scientists, engineers, and students. Production and marketing managers and suppliers of equipment, materials, and services will also find this book useful.
Author:
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Category : Metallurgy
Languages : en
Pages : 1218
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Author: Jihperng Leu
Publisher:
ISBN:
Category :
Languages : en
Pages : 436
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Author: J. R. Van Orsdel
Publisher:
ISBN:
Category : Heat resistant materials
Languages : en
Pages : 30
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Book Description
This memorandum summarizes information on refractory materials and composites that was presented at the Thirteenth Meeting of the Refractory Composites Working Group in Seattle, Washington on July 18-20, 1966. The memorandum is based on 34 papers that were presented at the meeting. They are reviewed and discussed briefly within the framework of the following four broad areas: materials technology, process technology, specific hardware applications and tests, and evaluation techniques. Included in the section on materials technology are discussions dealing with bulk refractory materials, coated systems, and fiber-reinforced composites. The section on process technology discusses cladding and general fabrication processes. The specific hardware applications and tests cover rocket-motor components, and cladding of a probe used in the glass industry. The section on evaluation techniques covers thermal testing, and non-destructive testing. (Author).
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Category : Government reports announcements & index
Languages : en
Pages : 968
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Author:
Publisher:
ISBN:
Category : Science
Languages : en
Pages : 1136
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Author:
Publisher:
ISBN:
Category : Government reports announcements & index
Languages : en
Pages : 976
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Author:
Publisher:
ISBN:
Category : Aeronautics
Languages : en
Pages : 974
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Author: F. R. Mertens
Publisher:
ISBN:
Category : Aluminum alloys
Languages : en
Pages : 54
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