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Languages : en
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Author:
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Author: Yoshihiro Deguchi
Publisher: Taylor & Francis
ISBN: 1439853398
Category : Science
Languages : en
Pages : 301
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Book Description
Tighter regulations of harmful substances such as NOx, CO, heavy metals, particles, emissions from commercial plants and automobiles reflect a growing demand for lowering the anthropogenic burdens on the environment. It is equally important to monitor controlling factors to improve the operation of industrial machinery and plants. Among the many me
Author: Neil A. Halliwell
Publisher: SPIE-International Society for Optical Engineering
ISBN:
Category : Science
Languages : en
Pages : 320
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Author: Ramaier Narayanaswamy
Publisher: Springer Science & Business Media
ISBN: 9783540408864
Category : Science
Languages : en
Pages : 456
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This interesting book covers latest aspects of a highly sophisticated technology; results treated in critical detail; demonstrates applicability of this technology to practical problems in process control, biochip methods, clinical analysis, environmental sciences
Author: Irving P. Herman
Publisher: Elsevier
ISBN: 0080538088
Category : Technology & Engineering
Languages : en
Pages : 815
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Book Description
This volume describes the increasing role of in situ optical diagnostics in thin film processing for applications ranging from fundamental science studies to process development to control during manufacturing. The key advantage of optical diagnostics in these applications is that they are usually noninvasive and nonintrusive. Optical probes of the surface, film, wafer, and gas above the wafer are described for many processes, including plasma etching, MBE, MOCVD, and rapid thermal processing. For each optical technique, the underlying principles are presented, modes of experimental implementation are described, and applications of the diagnostic in thin film processing are analyzed, with examples drawn from microelectronics and optoelectronics. Special attention is paid to real-time probing of the surface, to the noninvasive measurement of temperature, and to the use of optical probes for process control. Optical Diagnostics for Thin Film Processing is unique. No other volume explores the real-time application of optical techniques in all modes of thin film processing. The text can be used by students and those new to the topic as an introduction and review of the subject. It also serves as a comprehensive resource for engineers, technicians, researchers, and scientists already working in the field. The only volume that comprehensively explores in situ, real-time, optical probes for all types of thin film processing Useful as an introduction to the subject or as a resource handbook Covers a wide range of thin film processes including plasma etching, MBE, MOCVD, and rapid thermal processing Examples emphasize applications in microelectronics and optoelectronics Introductory chapter serves as a guide to all optical diagnostics and their applications Each chapter presents the underlying principles, experimental implementation, and applications for a specific optical diagnostic
Author: Benjamin Witzel
Publisher:
ISBN:
Category :
Languages : en
Pages :
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Author: Ramaier Narayanaswamy
Publisher: Springer Science & Business Media
ISBN: 3662091119
Category : Science
Languages : en
Pages : 438
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This interesting book covers latest aspects of a highly sophisticated technology; results treated in critical detail; demonstrates applicability of this technology to practical problems in process control, biochip methods, clinical analysis, environmental sciences
Author: P. Buchhave
Publisher: Springer Science & Business Media
ISBN: 1489912711
Category : Science
Languages : en
Pages : 387
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Book Description
The origin of optical methods for fluid flow investigations appears to be nontraceable. This is no matter for surprise. After all seeing provides the most direct and common way for humans to learn about their environment. But at the same time some of the most sophisticated methods for doing measurements in fluids are also based on light and often laser light. A very large amount of material has been published in this area over the last two decades. Why then another publication? Well, the field is still in a state of rapid development. It is characterised by the use of results and methods developed within very different areas like optical physics, spectroscopy, communication systems, electronics and computer science, mechanical engineering, chemical engineering and, of course, fluid dynamics. We are not aware of a book containing both introductory and more advanced material that covers the same material as presented here. The book is the result of a compilation and expansion of material presented at a summer school on Optical Diagnosticsfor Flow Processes,held at RiS0 National Laboratory and the Technical University of Denmark in September 1993. The aim of the course was to provide a solid background for understanding, evaluating, and using modem optical diagnostic methods, addressing Ph. D. students and researchers active in areas of fluid flow research. The disciplines represented by the participants ranged from atmospheric fluid dynamics to biomedicine.
Author: C Arcoumanis
Publisher: CRC Press
ISBN: 1482263181
Category : Science
Languages : en
Pages : 266
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Book Description
From the automotive industry to blood flow monitoring, optical techniques and laser diagnostics are becoming integral parts in engineering and medical instrumentation. Written by leading global experts from industry, academic groups, and laboratories, this volume provides an international perspective on both existing applications and leading-edge r
