Optical Characterization of Epitaxial Semiconductor Layers PDF Download
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Author: Günther Bauer
Publisher: Springer Science & Business Media
ISBN: 3642796788
Category : Technology & Engineering
Languages : en
Pages : 446
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Book Description
The characterization of epitaxial layers and their surfaces has benefitted a lot from the enormous progress of optical analysis techniques during the last decade. In particular, the dramatic improvement of the structural quality of semiconductor epilayers and heterostructures results to a great deal from the level of sophistication achieved with such analysis techniques. First of all, optical techniques are nondestructive and their sensitivity has been improved to such an extent that nowadays the epilayer analysis can be performed on layers with thicknesses on the atomic scale. Furthermore, the spatial and temporal resolution have been pushed to such limits that real time observation of surface processes during epitaxial growth is possible with techniques like reflectance difference spectroscopy. Of course, optical spectroscopies complement techniques based on the inter action of electrons with matter, but whereas the latter usually require high or ultrahigh vacuum conditions, the former ones can be applied in different environments as well. This advantage could turn out extremely important for a rather technological point of view, i.e. for the surveillance of modern semiconductor processes. Despite the large potential of techniques based on the interaction of electromagnetic waves with surfaces and epilayers, optical techniques are apparently moving only slowly into this area of technology. One reason for this might be that some prejudices still exist regarding their sensitivity.
Author: Günther Bauer
Publisher: Springer Science & Business Media
ISBN: 3642796788
Category : Technology & Engineering
Languages : en
Pages : 446
Get Book Here
Book Description
The characterization of epitaxial layers and their surfaces has benefitted a lot from the enormous progress of optical analysis techniques during the last decade. In particular, the dramatic improvement of the structural quality of semiconductor epilayers and heterostructures results to a great deal from the level of sophistication achieved with such analysis techniques. First of all, optical techniques are nondestructive and their sensitivity has been improved to such an extent that nowadays the epilayer analysis can be performed on layers with thicknesses on the atomic scale. Furthermore, the spatial and temporal resolution have been pushed to such limits that real time observation of surface processes during epitaxial growth is possible with techniques like reflectance difference spectroscopy. Of course, optical spectroscopies complement techniques based on the inter action of electrons with matter, but whereas the latter usually require high or ultrahigh vacuum conditions, the former ones can be applied in different environments as well. This advantage could turn out extremely important for a rather technological point of view, i.e. for the surveillance of modern semiconductor processes. Despite the large potential of techniques based on the interaction of electromagnetic waves with surfaces and epilayers, optical techniques are apparently moving only slowly into this area of technology. One reason for this might be that some prejudices still exist regarding their sensitivity.
Author: Theodore Sidney Moise
Publisher:
ISBN:
Category :
Languages : en
Pages :
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Book Description
Author: Henry Kressel
Publisher: Elsevier Science & Technology
ISBN:
Category : Science
Languages : en
Pages : 236
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Book Description
Author: Jeff J. Peterson
Publisher:
ISBN:
Category :
Languages : en
Pages : 634
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Book Description
Author: W. E. Quinn
Publisher:
ISBN:
Category :
Languages : en
Pages : 4
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Book Description
Device designers are placing new demands on crystal growers by requesting increasingly complex structures with more stringent constraints on composition, layer thickness and interface abruptness. Post growth analysis is no longer sufficient to meet these constraints and efforts are now underway to develop real lime methods of monitoring and controlling crystal growth. A number of diagnostic techniques are available for studying semiconductor surfaces during the growth process. Optical methods are preferred because they may be used at atmospheric pressure, in any transparent medium, and the photon flux is low so that the growth process is riot disturbed. However, optical techniques have a limited spectral range, and low surface sensitivity. Fortunately, the 1.5 to 6 eV energy range of quartz-optics systems contains most of the bonding-antibonding transitions for materials used in the growth of III-V semiconductors.
Author: O. J. Glembocki
Publisher: SPIE-International Society for Optical Engineering
ISBN:
Category : Technology & Engineering
Languages : en
Pages : 296
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Book Description
Author: Ted Wangensteen
Publisher:
ISBN:
Category : Epitaxy
Languages : en
Pages : 4
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Book Description
Author: Udo W. Pohl
Publisher: Springer Nature
ISBN: 3030438694
Category : Technology & Engineering
Languages : en
Pages : 546
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Book Description
The extended and revised edition of this textbook provides essential information for a comprehensive upper-level graduate course on the crystalline growth of semiconductor heterostructures. Heteroepitaxy is the basis of today’s advanced electronic and optoelectronic devices, and it is considered one of the most important fields in materials research and nanotechnology. The book discusses the structural and electronic properties of strained epitaxial layers, the thermodynamics and kinetics of layer growth, and it describes the major growth techniques: metalorganic vapor-phase epitaxy, molecular-beam epitaxy, and liquid-phase epitaxy. It also examines in detail cubic and hexagonal semiconductors, strain relaxation by misfit dislocations, strain and confinement effects on electronic states, surface structures, and processes during nucleation and growth. Requiring only minimal knowledge of solid-state physics, it provides natural sciences, materials science and electrical engineering students and their lecturers elementary introductions to the theory and practice of epitaxial growth, supported by references and over 300 detailed illustrations. In this second edition, many topics have been extended and treated in more detail, e.g. in situ growth monitoring, application of surfactants, properties of dislocations and defects in organic crystals, and special growth techniques like vapor-liquid-solid growth of nanowires and selective-area epitaxy.
Author: Thomas B. Elliot
Publisher: Nova Publishers
ISBN: 9781594549205
Category : Science
Languages : en
Pages : 236
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Book Description
Includes within its scope, topics such as: studies of the structural, electrical, optical and acoustical properties of bulk, low-dimensional and amorphous semiconductors; and, interface properties, including the physics and chemistry of heterojunctions, metal-semiconductor and insulator-semiconductor junctions.
Author: Antonio Cricenti
Publisher: World Scientific
ISBN: 9814471607
Category : Science
Languages : en
Pages : 191
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Book Description
This special volume contains the proceedings of the 9th Epioptics Workshop, held at the Ettore Majorana Foundation and Centre for Scientific Culture, Erice, Sicily, from July 20 to 26, 2006. The workshop was the 9th in the Epioptics series and the 39th of the International School of Solid State Physics.The workshop was aimed at assessing the capabilities of state-of-the-art optical techniques in elucidating the fundamental electronic and structural properties of semiconductor and metal surfaces, interfaces, thin layers, and layer structures, and at assessing the usefulness of these techniques for optimization of high-quality multilayer samples through feedback control during materials growth and processing. Particular emphasis is dedicated to the theory of non-linear optics and to dynamical processes through the use of pump-probe techniques together with the search for new optical sources. Some new applications of scanning probe microscopy to material science and biological samples, dried and in vivo, with the use of different laser sources are also presented.
