Modeling of Neutral Gas Dynamics in High Density Plasmas PDF Download
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Author: Patrick Wellington Canupp
Publisher:
ISBN:
Category :
Languages : en
Pages : 146
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Book Description
Author: Patrick Wellington Canupp
Publisher:
ISBN:
Category :
Languages : en
Pages : 146
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Book Description
Author: A. I. Morozov
Publisher: CRC Press
ISBN: 1439881332
Category : Science
Languages : en
Pages : 828
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Book Description
As the twenty-first century progresses, plasma technology will play an increasing role in our lives, providing new sources of energy, ion-plasma processing of materials, wave electromagnetic radiation sources, space plasma thrusters, and more. Studies of the plasma state of matter not only accelerate technological developments but also improve the
Author: D. P. Stotler
Publisher:
ISBN:
Category : Computer simulation
Languages : en
Pages : 8
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Author: Masashi Shimada
Publisher:
ISBN:
Category :
Languages : en
Pages : 118
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Book Description
The central theme of this dissertation is to explore the impact of neutral depletion and coupling between plasma and neutral gas in weakly ionized unmagnetized plasma. Since there have been few systematic studies of the mechanism which leads to non-uniform neutral distribution in processing plasmas, this work investigated the spatial profiles of neutral temperature and pressure experimentally, and the mechanism of resulting neutral depletion by simulation. The experimental work is comprised of neutral temperature measurements using high resolution atomic spectroscopy and molecular spectroscopy, and neutral pressure measurements considering thermal transpiration. When thermal transpiration effects are used to correct the gas pressure measurements, the total pressure remains constant regardless of the plasma condition. Since the neutral gas follows the ideal gas law, the neutral gas density profile is also obtained from the measured neutral gas temperature and the corrected pressure measurements. The results show that neutral gas temperature rises close to 900K and the neutral gas density at the center of plasma chamber has a significant (factor of 2-4) decrease in the presence of a plasma discharge. In numerical work, neutral and ion transport phenomena were simulated by a hybrid-type direct simulation Monte Carlo (DSMC) method of one dimensional (1D) electrostatic plasma to identify the mechanism of the neutral gas density depletion in Ar/N2 mixtures. The simulation reveals that the neutral depletion is the result of the interplay between plasma and neutral gas, and a parametric study indicates that neutral depletion occurs mainly due to gas heating and pressure balance for the typical condition of plasma processing. In high density plasma sources where the plasma pressure becomes comparable to neutral pressure, total pressure (neutral pressure and plasma pressure) is conserved before and after the discharge. Therefore the neutral pressure is reduced due the balance of total pressure with plasma pressure (mainly electron pressure). Neutral gas heating is due to the elastic scattering and charge exchange collisions with ions, which are accelerated by the bulk plasma ambi-polar electrostatic field. The excellent agreement between experiment and simulation, and parametric study reveal that gas heating and pressure balance are the main mechanisms of gas depletion in an inductively coupled plasma. Coupling between plasma and neutral gas was observed by both experiment and simulation. The resulting gas depletion enhances the plasma transport to the surrounding wall, increases the particle loss, and decreases the plasma density.
Author:
Publisher:
ISBN:
Category : Nuclear energy
Languages : en
Pages : 632
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Book Description
NSA is a comprehensive collection of international nuclear science and technology literature for the period 1948 through 1976, pre-dating the prestigious INIS database, which began in 1970. NSA existed as a printed product (Volumes 1-33) initially, created by DOE's predecessor, the U.S. Atomic Energy Commission (AEC). NSA includes citations to scientific and technical reports from the AEC, the U.S. Energy Research and Development Administration and its contractors, plus other agencies and international organizations, universities, and industrial and research organizations. References to books, conference proceedings, papers, patents, dissertations, engineering drawings, and journal articles from worldwide sources are also included. Abstracts and full text are provided if available.
Author: Wolfgang G. Braun
Publisher:
ISBN:
Category : Plasma dynamics
Languages : en
Pages : 20
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Book Description
Author: Electrochemical Society. Dielectric Science and Technology Division
Publisher: The Electrochemical Society
ISBN: 9781566771641
Category : Plasma etching
Languages : en
Pages : 740
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Book Description
Author:
Publisher:
ISBN:
Category : Aeronautics
Languages : en
Pages : 1028
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Book Description
Lists citations with abstracts for aerospace related reports obtained from world wide sources and announces documents that have recently been entered into the NASA Scientific and Technical Information Database.
Author: Mark Allen Nierode
Publisher:
ISBN:
Category :
Languages : en
Pages : 146
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Book Description
Author: J. Leon Shohet
Publisher: CRC Press
ISBN: 1482214318
Category : Technology & Engineering
Languages : en
Pages : 1654
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Book Description
Technical plasmas have a wide range of industrial applications. The Encyclopedia of Plasma Technology covers all aspects of plasma technology from the fundamentals to a range of applications across a large number of industries and disciplines. Topics covered include nanotechnology, solar cell technology, biomedical and clinical applications, electronic materials, sustainability, and clean technologies. The book bridges materials science, industrial chemistry, physics, and engineering, making it a must have for researchers in industry and academia, as well as those working on application-oriented plasma technologies. Also Available Online This Taylor & Francis encyclopedia is also available through online subscription, offering a variety of extra benefits for researchers, students, and librarians, including: Citation tracking and alerts Active reference linking Saved searches and marked lists HTML and PDF format options Contact Taylor and Francis for more information or to inquire about subscription options and print/online combination packages. US: (Tel) 1.888.318.2367; (E-mail)
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