Microscale Heat Conduction in Integrated Circuits and Their Constituent Films

Microscale Heat Conduction in Integrated Circuits and Their Constituent Films PDF Author: Y. Sungtaek Ju
Publisher: Springer Science & Business Media
ISBN: 1461552117
Category : Technology & Engineering
Languages : en
Pages : 115

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Book Description
The study of thermal phenomena in microdevices has attracted significant attention recently. The interdisciplinary nature of this topic, however, makes it very difficult for researchers to fully understand details of research results presented in journal articles. For many researchers intending to be active in this field, therefore, a more comprehensive treatment, complete with sufficient background information, is urgently needed. Advances in semiconductor device technology render the thermal characterization and design of ICs increasingly more important. The present book discusses experimental and theoretical studies of heat transfer in transistors and interconnects. A novel optical thermometry technique captures temperature fields with high temporal and spatial failures in devices that are subjected to electrical overstress (EOS) and electrostatic discharge (ESD). Also reported are techniques for determining the thermal transport properties of dielectric passivation layers and ultra-thin silicon-on-insulator (SOI) layers. Theoretical analysis on the data yields insight into the dependence of thermal properties on film processing conditions. The techniques and data presented here will greatly aid the thermal engineering of interconnects and transistors.

Microscale Heat Conduction in Integrated Circuits and Their Constituent Films

Microscale Heat Conduction in Integrated Circuits and Their Constituent Films PDF Author: Y. Sungtaek Ju
Publisher: Springer Science & Business Media
ISBN: 1461552117
Category : Technology & Engineering
Languages : en
Pages : 115

Get Book Here

Book Description
The study of thermal phenomena in microdevices has attracted significant attention recently. The interdisciplinary nature of this topic, however, makes it very difficult for researchers to fully understand details of research results presented in journal articles. For many researchers intending to be active in this field, therefore, a more comprehensive treatment, complete with sufficient background information, is urgently needed. Advances in semiconductor device technology render the thermal characterization and design of ICs increasingly more important. The present book discusses experimental and theoretical studies of heat transfer in transistors and interconnects. A novel optical thermometry technique captures temperature fields with high temporal and spatial failures in devices that are subjected to electrical overstress (EOS) and electrostatic discharge (ESD). Also reported are techniques for determining the thermal transport properties of dielectric passivation layers and ultra-thin silicon-on-insulator (SOI) layers. Theoretical analysis on the data yields insight into the dependence of thermal properties on film processing conditions. The techniques and data presented here will greatly aid the thermal engineering of interconnects and transistors.

Microscale and Nanoscale Heat Transfer

Microscale and Nanoscale Heat Transfer PDF Author: C.B. Sobhan
Publisher: CRC Press
ISBN: 1000654214
Category : Science
Languages : en
Pages : 317

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Book Description
Through analyses, experimental results, and worked-out numerical examples, Microscale and Nanoscale Heat Transfer: Fundamentals and Engineering Applications explores the methods and observations of thermophysical phenomena in size-affected domains. Compiling the most relevant findings from the literature, along with results from their own re

Microscale Heat Transfer - Fundamentals and Applications

Microscale Heat Transfer - Fundamentals and Applications PDF Author: S. Kakaç
Publisher: Springer Science & Business Media
ISBN: 9781402033605
Category : Science
Languages : en
Pages : 530

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Book Description
This volume provides a comprehensive state-of-the art assessment of the fundamentals of the Microscale heat transfer and transport phenomena and heat transfer and applications in Microsystems. The modern trend toward miniaturization of devices requires a better understanding of heat mass transfer phenomena in small dimensions. Devices having dimensions of order of microns are being developed for use of cooling of integrated circuits, and in biochemicals-biomedical applications and cryogenics. Microelectromechanical systems (MEMS) have an important impact in medicine, bioengineering, information technologies and other industries.

Heat Convection in Micro Ducts

Heat Convection in Micro Ducts PDF Author: Yitshak Zohar
Publisher: Springer Science & Business Media
ISBN: 147573607X
Category : Science
Languages : en
Pages : 210

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Book Description
As the field of Microsystems expands into more disciplines and new applications such as RF-MEMS, Optical MEMS and Bio-MEMS, thermal management is becoming a critical issue in the operation of many microdevices, including microelectronic chips. Heat Convection in Micro Ducts focuses on the fundamental physics of convective heat transfer in microscale and specific applications such as: microchannel heat sinks, micro heat pipes, microcoolers and micro capillary pumped loops. This book will be of interest to the professional engineer and graduate student interested in learning about heat removal and temperature control in advanced integrated circuits and microelectromechanical systems.

Thermal Energy

Thermal Energy PDF Author: Yatish T. Shah
Publisher: CRC Press
ISBN: 1315305933
Category : Technology & Engineering
Languages : en
Pages : 1112

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Book Description
The book details sources of thermal energy, methods of capture, and applications. It describes the basics of thermal energy, including measuring thermal energy, laws of thermodynamics that govern its use and transformation, modes of thermal energy, conventional processes, devices and materials, and the methods by which it is transferred. It covers 8 sources of thermal energy: combustion, fusion (solar) fission (nuclear), geothermal, microwave, plasma, waste heat, and thermal energy storage. In each case, the methods of production and capture and its uses are described in detail. It also discusses novel processes and devices used to improve transfer and transformation processes.

Heat and Mass Transfer

Heat and Mass Transfer PDF Author:
Publisher: BoD – Books on Demand
ISBN: 1789844460
Category : Science
Languages : en
Pages : 408

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Book Description
Heat and mass transfer is the core science for many industrial processes as well as technical and scientific devices. Automotive, aerospace, power generation (both by conventional and renewable energies), industrial equipment and rotating machinery, materials and chemical processing, and many other industries are requiring heat and mass transfer processes. Since the early studies in the seventeenth and eighteenth centuries, there has been tremendous technical progress and scientific advances in the knowledge of heat and mass transfer, where modeling and simulation developments are increasingly contributing to the current state of the art. Heat and Mass Transfer - Advances in Science and Technology Applications aims at providing researchers and practitioners with a valuable compendium of significant advances in the field.

Materials & Process Integration for MEMS

Materials & Process Integration for MEMS PDF Author: Francis E. H. Tay
Publisher: Springer Science & Business Media
ISBN: 1475757913
Category : Technology & Engineering
Languages : en
Pages : 302

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Book Description
The field of materials and process integration for MEMS research has an extensive past as well as a long and promising future. Researchers, academicians and engineers from around the world are increasingly devoting their efforts on the materials and process integration issues and opportunities in MEMS devices. These efforts are crucial to sustain the long-term growth of the MEMS field. The commercial MEMS community is heavily driven by the push for profitable and sustainable products. In the course of establishing high volume and low-cost production processes, the critical importance of materials properties, behaviors, reliability, reproducibility, and predictability, as well as process integration of compatible materials systems become apparent. Although standard IC fabrication steps, particularly lithographic techniques, are leveraged heavily in the creation of MEMS devices, additional customized and novel micromachining techniques are needed to develop sophisticated MEMS structures. One of the most common techniques is bulk micromachining, by which micromechanical structures are created by etching into the bulk of the substrates with either anisotropic etching with strong alk:ali solution or deep reactive-ion etching (DRIB). The second common technique is surface micromachining, by which planar microstructures are created by sequential deposition and etching of thin films on the surface of the substrate, followed by a fmal removal of sacrificial layers to release suspended structures. Other techniques include deep lithography and plating to create metal structures with high aspect ratios (LIGA), micro electrodischarge machining (J.

Micromachined Mirrors

Micromachined Mirrors PDF Author: Robert Conant
Publisher: Springer Science & Business Media
ISBN: 1475737645
Category : Technology & Engineering
Languages : en
Pages : 150

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Book Description
Micromachined Mirrors provides an overview of the performance enhancements that will be realized by miniaturizing scanning mirrors like those used for laser printers and barcode scanners, and the newly enabled applications, including raster-scanning projection video displays and compact, high-speed fiber-optic components. There are a wide variety of methods used to fabricate micromachined mirrors - each with its advantages and disadvantages. There are, however, performance criteria common to mirrors made from any of these fabrication processes. For example, optical resolution is related to the mirror aperture, the mirror flatness, and the scan angle. Micromachined Mirrors provides a framework for the design of micromirrors, and derives equations showing the fundamental limits for micromirror performance. These limits provide the micromirror designer tools with which to determine the acceptable mirror geometries, and to quickly and easily determine the range of possible mirror optical resolution and scan speed.

Principles and Applications of NanoMEMS Physics

Principles and Applications of NanoMEMS Physics PDF Author: Hector Santos
Publisher: Springer Science & Business Media
ISBN: 0387258345
Category : Technology & Engineering
Languages : en
Pages : 264

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Book Description
Presents the first unified exposition of the physical principles at the heart of NanoMEMS-based devices and applications Provides newcomers with a much needed coherent scientific base for undertaking study and research in this field Takes great pains in rendering transparent advanced physical concepts and techniques, such as quantum information, second quantization, Luttinger liquids, bosonization, and superconductivity

BioMEMS

BioMEMS PDF Author: Gerald Urban
Publisher: Springer Science & Business Media
ISBN: 0387287329
Category : Medical
Languages : en
Pages : 381

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Book Description
Explosive growth in the field of microsystem technology (MST) has introduced a variety of promising products in major disciplines from microelectronics to life sciences. Especially the life sciences and health care business was, and is expected to be a major market for MST products. Undoubtedly the merging of biological sciences with micro- and nanoscience will create a scientific and technological revolution in future. Microminiaturization of devices, down to the nanoscale, approaching the size of biological structures, will be a prerequisite for the future success of life sciences. Bioanalytical and therapeutic micro- and nanosystems will be mandatory for system biologists in the long run, to obtain insight into morphology, the function and the interactive processes of the living system. With such a deeper understanding new and personalized drugs could be developed leading to a revolution in life sciences. Today, microanalytical devices are used in clinical analytics or molecular biology as gene chips. In parallel, standard microbiomedical products are employed in the intensive care and surgical theatre, mainly for monitoring and implantation purposes. The gap between these two different scientific fields will be closed, however, as soon as functional micro devices can be produced, allowing a deeper view into the function of cells and whole organisms. Here, a new discipline evolved which focuses on microsystems for living systems called "BIOMEMS". In this review at a glance the exciting field of bio-microsystems, from their beginnings to indicators of future successes are presented. It will also show that a broad penetration of micro and nano technologies into biology and medicine will be mandatory for future scientific and new product development progress in life science.