Laser Chemical Processing of Semiconductor Devices PDF Download
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Author:
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ISBN:
Category : Laser beams
Languages : en
Pages : 136
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Book Description
Author:
Publisher:
ISBN:
Category : Laser beams
Languages : en
Pages : 136
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Book Description
Author: Materials Research Society
Publisher:
ISBN:
Category :
Languages : en
Pages :
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Book Description
Author: Materials Research Society. Meeting Symposium B.
Publisher:
ISBN:
Category : Lasers in chemistry
Languages : en
Pages : 136
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Book Description
Author: F. A. Houle
Publisher:
ISBN:
Category :
Languages : en
Pages : 127
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Book Description
The conference emphasized the following areas: Fundamental mechanisms, laser-assisted growth of semiconductor films, process diagnostics, metallization from thin films and gases, photochemical etching, fundamental processes, and dielectric photoformation. Keywords: Semiconductor devices; Laser diagnostics; Lasers; Metallization; Photochemical Etching; Dielectric Photoformation. (Author).
Author:
Publisher:
ISBN:
Category :
Languages : en
Pages : 136
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Book Description
Author: F.A. Houle
Publisher:
ISBN:
Category :
Languages : en
Pages :
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Book Description
Author: Materials Research Society. Meeting Symposium B.
Publisher:
ISBN:
Category : Lasers in chemistry
Languages : en
Pages : 150
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Book Description
Author: F. A. Houle
Publisher:
ISBN:
Category :
Languages : en
Pages : 0
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Book Description
Author: Dieter Bäuerle
Publisher: Springer Science & Business Media
ISBN: 3662025051
Category : Science
Languages : en
Pages : 253
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Book Description
Materials processing with lasers is a rapidly expanding field which is increasingly captivating the attention of scientists, engineers and manufacturers alike. The aspect of most interest to scientists is provided by the basic interaction mechanisms between the intense light of a laser and materials exposed to a chemically reactive or nonreactive surrounding medium. Engineers and manufacturers see in the laser a new tool which will not only make manufacturing cheaper, faster, cleaner and more accurate but which also opens up entirely new technologies and manufacturing methods that are simply not available using existing techniques. Actual and potential applications range from laser machining to laser-induced materials transformation, coating, patterning, etc. , opening up the prospect of exciting new processing methods for micromechanics, metallurgy, integrated optics, semiconductor manufacture and chemical engineering. This book concentrates on the new and interdisciplinary field of 1 aser-i nduced chemicaZ process i ng of materi als. The techni que permits maskless single-step deposition of thin films of metals, semiconductors or insulators with lateral dimensions ranging from a few tenths of a micrometer up to several centimeters. Moreover, materials removal or synthesis, or surface modifications, such as oxidation, nitridation, reduction, metallization and doping, are also possible within similar dimensions. This book is meant as an introduction. It attempts to cater for the very broad range of specific interests which different groups of readers will have, and this thinking underlies the way in which the material has been arranged.
Author: Dieter Bäuerle
Publisher: Springer Science & Business Media
ISBN: 3642176135
Category : Science
Languages : en
Pages : 846
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Book Description
Laser Processing and Chemistry gives an overview of the fundamentals and applications of laser-matter interactions, in particular with regard to laser material processing. Special attention is given to laser-induced physical and chemical processes at gas-solid, liquid-solid, and solid-solid interfaces. Starting with the background physics, the book proceeds to examine applications of laser techniques in micro-machining, and the patterning, coating, and modification of material surfaces. This fourth edition has been revised and enlarged to cover new topics such as 3D microfabrication, advances in nanotechnology, ultrafast laser technology and laser chemical processing (LCP). Graduate students, physicists, chemists, engineers, and manufacturers alike will find this book an invaluable reference work on laser processing.
