Investigation of III-V Compound Semiconductor High Electron Mobility Field-Effect Transistors PDF Download
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Author: 陳利洋
Publisher:
ISBN:
Category :
Languages : en
Pages : 68
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Book Description
Author: 陳利洋
Publisher:
ISBN:
Category :
Languages : en
Pages : 68
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Book Description
Author: D. Nirmal
Publisher: CRC Press
ISBN: 0429862520
Category : Science
Languages : en
Pages : 446
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Book Description
This book focusses on III-V high electron mobility transistors (HEMTs) including basic physics, material used, fabrications details, modeling, simulation, and other important aspects. It initiates by describing principle of operation, material systems and material technologies followed by description of the structure, I-V characteristics, modeling of DC and RF parameters of AlGaN/GaN HEMTs. The book also provides information about source/drain engineering, gate engineering and channel engineering techniques used to improve the DC-RF and breakdown performance of HEMTs. Finally, the book also highlights the importance of metal oxide semiconductor high electron mobility transistors (MOS-HEMT). Key Features Combines III-As/P/N HEMTs with reliability and current status in single volume Includes AC/DC modelling and (sub)millimeter wave devices with reliability analysis Covers all theoretical and experimental aspects of HEMTs Discusses AlGaN/GaN transistors Presents DC, RF and breakdown characteristics of HEMTs on various material systems using graphs and plots
Author: Serge Oktyabrsky
Publisher: Springer Science & Business Media
ISBN: 1441915478
Category : Technology & Engineering
Languages : en
Pages : 451
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Book Description
Fundamentals of III-V Semiconductor MOSFETs presents the fundamentals and current status of research of compound semiconductor metal-oxide-semiconductor field-effect transistors (MOSFETs) that are envisioned as a future replacement of silicon in digital circuits. The material covered begins with a review of specific properties of III-V semiconductors and available technologies making them attractive to MOSFET technology, such as band-engineered heterostructures, effect of strain, nanoscale control during epitaxial growth. Due to the lack of thermodynamically stable native oxides on III-V's (such as SiO2 on Si), high-k oxides are the natural choice of dielectrics for III-V MOSFETs. The key challenge of the III-V MOSFET technology is a high-quality, thermodynamically stable gate dielectric that passivates the interface states, similar to SiO2 on Si. Several chapters give a detailed description of materials science and electronic behavior of various dielectrics and related interfaces, as well as physics of fabricated devices and MOSFET fabrication technologies. Topics also include recent progress and understanding of various materials systems; specific issues for electrical measurement of gate stacks and FETs with low and wide bandgap channels and high interface trap density; possible paths of integration of different semiconductor materials on Si platform.
Author: Zhaojun Liu
Publisher: Springer Nature
ISBN: 3031020286
Category : Technology & Engineering
Languages : en
Pages : 65
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Book Description
Ever since its invention in the 1980s, the compound semiconductor heterojunction-based high electron mobility transistor (HEMT) has been widely used in radio frequency (RF) applications. This book provides readers with broad coverage on techniques and new trends of HEMT, employing leading compound semiconductors, III-N and III-V materials. The content includes an overview of GaN HEMT device-scaling technologies and experimental research breakthroughs in fabricating various GaN MOSHEMT transistors. Readers are offered an inspiring example of monolithic integration of HEMT with LEDs, too. The authors compile the most relevant aspects of III-V HEMT, including the current status of state-of-art HEMTs, their possibility of replacing the Si CMOS transistor channel, and growth opportunities of III-V materials on an Si substrate. With detailed exploration and explanations, the book is a helpful source suitable for anyone learning about and working on compound semiconductor devices.
Author: S. J. Pearton
Publisher: World Scientific
ISBN: 9789810218843
Category : Technology & Engineering
Languages : en
Pages : 568
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Book Description
This book describes advanced epitaxial growth and self-aligned processing techniques for the fabrication of III-V semiconductor devices such as heterojunction bipolar transistors and high electron mobility transistors. It is the first book to describe the use of carbon-doping and low damage dry etching techniques that have proved indispensable in making reliable, high performance devices. These devices are used in many applications such as cordless telephones and high speed lightwave communication systems.
Author: Carl Wilmsen
Publisher: Springer Science & Business Media
ISBN: 1468448358
Category : Science
Languages : en
Pages : 472
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Book Description
The application of the 111-V compound semiconductors to device fabrica tion has grown considerably in the last few years. This process has been stimulated, in part, by the advancement in the understanding of the interface physics and chemistry of the III-V's. The literature on this subject is spread over the last 15 years and appears in many journals and conference proceedings. Understanding this literature requires consider able effort by the seasoned researcher, and even more for those starting out in the field or by engineers and scientists who wish to apply this knowledge to the fabrication of devices. The purpose of this book is to bring together much of the fundamental and practical knowledge on the physics and chemistry of the 111-V compounds with metals and dielectrics. The authors of this book have endeavored to provide concise overviews of these areas with many tahles ancI grarhs whic. h c. omr>are and summarize the literature. In this way, the book serves as both an insightful treatise on III-V interfaces and a handy reference to the literature. The selection of authors was mandated by the desire to include both fundamental and practical approaches, covering device and material aspects of the interfaces. All of the authors are recognized experts on III-V interfaces and each has worked for many years in his subject area. This experience is projected in the breadth of understanding in each chapter.
Author: Anup Sasikumar
Publisher:
ISBN:
Category : Modulation (Electronics)
Languages : en
Pages : 254
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Author: Alexandra Caroline Ford
Publisher:
ISBN:
Category :
Languages : en
Pages : 162
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Book Description
High electron mobility III-V compound semiconductors such as indium arsenide (InAs) are promising candidates for future active channel materials of electron devices to further enhance device performance. In particular, compound semiconductors heterogeneously integrated on Si substrates have been studied, combining the high mobility of III-V semiconductors and the well-established, low cost processing of Si technology. However, one of the primary challenges of III-V device fabrication is controllable, post-growth dopant profiling. Here InAs nanowires and ultrathin layers (nanoribbons) on SiO2/Si are investigated as the channel material for high performance field-effect transistors (FETs) and post-growth, patterned doping techniques are demonstrated. First, the synthesis of crystalline InAs nanowires with high yield and tunable diameters by using Ni nanoparticles as the catalyst material on SiO2/Si substrates is demonstrated. The back-gated InAs nanowire FETs have electron field-effect mobilities of 4̃,000 cm2/Vs and ION/IOFF 1̃04. The uniformity of the InAs nanowires is demonstrated by large-scale assembly of parallel arrays of nanowires (4̃00 nanowires) on SiO2/Si substrates by a contact printing process. This enables high performance, "printable" transistors with 5-10 mA ON currents. Second, an epitaxial transfer method for the integration of ultrathin layers of single-crystalline InAs on SiO2/Si substrates is demonstrated. As a parallel to silicon-on-insulator (SOI) technology, the abbreviation "XOI" is used to represent this compound semiconductor-on-insulator platform. A high quality InAs/dielectric interface is obtained by the use of a thermally grown interfacial InAsOx layer (1̃ nm thick). Top-gated FETs exhibit a peak transconductance of 1̃.6 mS/0µm at VDS=0.5V with ION/IOFF>104and subthreshold swings of 107-150 mV/decade for a channel length of 0̃.5 0µm. Next, temperature-dependent I-V and C-V studies of single InAs nanowire FETs are utilized to investigate the intrinsic electron transport properties as a function of nanowire radius. From C-V characterization, the densities of thermally-activated fixed charges and trap states on the surface of as-grown (unpassivated) nanowires are investigated to allow the accurate measurement of the gate oxide capacitance. This allows the direct assessment of the electron field-effect mobility. The field-effect mobility is found to monotonically decrease as the radius is reduced to sub-10 nm, with the low temperature transport data highlighting the impact of surface roughness scattering on the mobility degradation for smaller radius nanowires. Next, the electrical properties of the InAs XOI transistors are studied, showing the critical role of quantum confinement in the transport properties of ultrathin XOI layers. Following the investigation of the electrical properties of undoped InAs nanostructures, post-growth, surface doping processes for InAs nanostructures are addressed. Nanoscale, sulfur doping of InAs planar substrates with high dopant areal dose and uniformity by using a self-limiting monolayer doping approach is demonstrated as a means to create ultrashallow junctions. From transmission electron microscopy (TEM) and secondary ion mass spectrometry (SIMS), a dopant profile abruptness of 3̃.5 nm/decade is observed without significant lattice damage. The n+/p+ junctions fabricated using this doping method exhibit negative differential resistance (NDR) behavior, demonstrating the utility of this approach for device fabrication with high electrically active sulfur concentrations of 8̃x1018 cm-3. Next, a gas phase doping approach for InAs nanowires and ultrathin XOI layers using zinc is demonstrated as an effective means for enabling post-growth dopant profiling of nanostructures. The versatility of the approach is demonstrated by the fabrication of gated diodes and p-MOSFETs. Electrically active zinc concentrations of 1̃x1019 cm-3 are achieved which is necessary for compensating the high electron concentration at the surface of InAs to enable heavily p-doped structures. This work could have important applications for the fabrication of planar and non-planar devices based on InAs and other III-V nanostructures which are not compatible with conventional ion implantation processes that often cause severe lattice damage and local stoichiometry imbalance. Lastly, an ultrathin body InAs XOI tunneling field-effect transistor (TFET) on Si substrate is demonstrated. The post-growth, zinc surface doping approach is used for the formation of a p+ source contact which minimizes lattice damage to the ultrathin body InAs XOI compared to ion implantation. The transistor exhibits gated NDR behavior under forward bias, confirming the tunneling operation of the device. In this device architecture, the ON current is dominated by vertical band-to-band tunneling and is thereby less sensitive to the junction abruptness. This work presents a device and materials platform for studying III-V tunnel transistors.
Author: D. Nirmal
Publisher: CRC Press
ISBN: 0429862539
Category : Science
Languages : en
Pages : 430
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Book Description
This book focusses on III-V high electron mobility transistors (HEMTs) including basic physics, material used, fabrications details, modeling, simulation, and other important aspects. It initiates by describing principle of operation, material systems and material technologies followed by description of the structure, I-V characteristics, modeling of DC and RF parameters of AlGaN/GaN HEMTs. The book also provides information about source/drain engineering, gate engineering and channel engineering techniques used to improve the DC-RF and breakdown performance of HEMTs. Finally, the book also highlights the importance of metal oxide semiconductor high electron mobility transistors (MOS-HEMT). Key Features Combines III-As/P/N HEMTs with reliability and current status in single volume Includes AC/DC modelling and (sub)millimeter wave devices with reliability analysis Covers all theoretical and experimental aspects of HEMTs Discusses AlGaN/GaN transistors Presents DC, RF and breakdown characteristics of HEMTs on various material systems using graphs and plots
Author: R. F. Kopf
Publisher: The Electrochemical Society
ISBN: 9781566772662
Category : Technology & Engineering
Languages : en
Pages : 368
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Book Description
