Handbook of Advanced Plasma Processing Techniques PDF Download
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Author: R.J. Shul
Publisher: Springer Science & Business Media
ISBN: 3642569897
Category : Technology & Engineering
Languages : en
Pages : 664
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Book Description
Pattern transfer by dry etching and plasma-enhanced chemical vapor de position are two of the cornerstone techniques for modern integrated cir cuit fabrication. The success of these methods has also sparked interest in their application to other techniques, such as surface-micromachined sen sors, read/write heads for data storage and magnetic random access memory (MRAM). The extremely complex chemistry and physics of plasmas and their interactions with the exposed surfaces of semiconductors and other materi als is often overlooked at the manufacturing stage. In this case, the process is optimized by an informed "trial-and-error" approach which relies heavily on design-of-experiment techniques and the intuition of the process engineer. The need for regular cleaning of plasma reactors to remove built-up reaction or precursor gas products adds an extra degree of complexity because the interaction of the reactive species in the plasma with the reactor walls can also have a strong effect on the number of these species available for etching or deposition. Since the microelectronics industry depends on having high process yields at each step of the fabrication process, it is imperative that a full understanding of plasma etching and deposition techniques be achieved.
Author: R.J. Shul
Publisher: Springer Science & Business Media
ISBN: 3642569897
Category : Technology & Engineering
Languages : en
Pages : 664
Get Book Here
Book Description
Pattern transfer by dry etching and plasma-enhanced chemical vapor de position are two of the cornerstone techniques for modern integrated cir cuit fabrication. The success of these methods has also sparked interest in their application to other techniques, such as surface-micromachined sen sors, read/write heads for data storage and magnetic random access memory (MRAM). The extremely complex chemistry and physics of plasmas and their interactions with the exposed surfaces of semiconductors and other materi als is often overlooked at the manufacturing stage. In this case, the process is optimized by an informed "trial-and-error" approach which relies heavily on design-of-experiment techniques and the intuition of the process engineer. The need for regular cleaning of plasma reactors to remove built-up reaction or precursor gas products adds an extra degree of complexity because the interaction of the reactive species in the plasma with the reactor walls can also have a strong effect on the number of these species available for etching or deposition. Since the microelectronics industry depends on having high process yields at each step of the fabrication process, it is imperative that a full understanding of plasma etching and deposition techniques be achieved.
Author: Reza Ghodssi
Publisher: Springer Science & Business Media
ISBN: 0387473181
Category : Technology & Engineering
Languages : en
Pages : 1211
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Book Description
MEMs Materials and Processes Handbook" is a comprehensive reference for researchers searching for new materials, properties of known materials, or specific processes available for MEMS fabrication. The content is separated into distinct sections on "Materials" and "Processes". The extensive Material Selection Guide" and a "Material Database" guides the reader through the selection of appropriate materials for the required task at hand. The "Processes" section of the book is organized as a catalog of various microfabrication processes, each with a brief introduction to the technology, as well as examples of common uses in MEMs.
Author: Mohammad Jawaid
Publisher: Springer Nature
ISBN: 9811618542
Category : Technology & Engineering
Languages : en
Pages : 486
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Book Description
This book explores vegetable fiber composite as an eco-friendly, biodegradable, and sustainable material that has many potential industrial applications. The use of vegetable fiber composite supports the sustainable development goals (SDGs) to utilize more sustainable and greener composite materials, which are also easy to handle and locally easily available with economical production costs. This book presents various types of vegetable fiber composite and its processing methods and treatments to obtain desirable properties for certain applications. The book caters to researchers and students who are working in the field of bio-composites and green materials.
Author: Nikolay L. Kazanskiy
Publisher: CRC Press
ISBN: 1315279916
Category : Science
Languages : en
Pages : 223
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Book Description
This reference book concentrates on microstructuring surfaces of optical materials with directed fluxes of off-electrode plasma generated by high-voltage gas discharge and developing methods and equipment related to this technique. It covers theoretical and experimental studies on the electrical and physical properties of high-voltage gas discharges used to generate plasma outside an electrode gap. A new class of methods and devices that makes it possible to implement a series of processes for fabricating diffraction microstructures on large format wafers is also discussed.
Author: Hema Singh
Publisher: Springer
ISBN: 9811022690
Category : Technology & Engineering
Languages : en
Pages : 58
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Book Description
This book focuses on EM propagation characteristics within multilayered plasma-dielectric-metallic media. The method used for analysis is impedance transformation method. Plasma covered radar absorbing material is approximated as a multi-layered dielectric medium. The plasma is considered to be bounded homogeneous/inhomogeneous medium. The reflection coefficient and hence return loss is analytically derived. The role of plasma parameters, such as electron density, collision frequency, plasma thickness, and plasma density profile in the absorption behavior of multi-layered plasma-RAM structure is described. This book provides a clearer picture of EM propagation within plasma. The reader will get an insight of plasma parameters that play significant role in deciding the absorption characteristics of plasma covered surfaces.
Author: Georgios Stefanidis
Publisher: Royal Society of Chemistry
ISBN: 1839167653
Category : Science
Languages : en
Pages : 631
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Book Description
The role of carbon dioxide in our changing climate is now hard to ignore, and many countries are making pledges to reduce or eliminate their carbon output. Chemical valorisation of carbon dioxide, as an alternative to sequestration, is likely to play an important part in reaching these targets, and as such is one of the fastest developing areas of green chemistry and chemical reaction engineering. Providing a comprehensive panorama of recent advances in the methods and technologies for chemical valorisation of carbon dioxide, this book is essential reading for anyone with an interest in sustainability and green chemistry. Both the technological improvements in traditional processes and new methods and concepts are discussed, including various (renewable) electricity-based methods, as well as novel catalytic, photocatalytic and biocatalytic approaches.
Author: Anupama B. Kaul
Publisher: CRC Press
ISBN: 1466509554
Category : Science
Languages : en
Pages : 445
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Book Description
Composed of contributions from top experts, Microelectronics to Nanoelectronics: Materials, Devices and Manufacturability offers a detailed overview of important recent scientific and technological developments in the rapidly evolving nanoelectronics arena. Under the editorial guidance and technical expertise of noted materials scientist Anupama B. Kaul of California Institute of Technology’s Jet Propulsion Lab, this book captures the ascent of microelectronics into the nanoscale realm. It addresses a wide variety of important scientific and technological issues in nanoelectronics research and development. The book also showcases some key application areas of micro-electro-mechanical-systems (MEMS) that have reached the commercial realm. Capitalizing on Dr. Kaul’s considerable technical experience with micro- and nanotechnologies and her extensive research in prestigious academic and industrial labs, the book offers a fresh perspective on application-driven research in micro- and nanoelectronics, including MEMS. Chapters explore how rapid developments in this area are transitioning from the lab to the market, where new and exciting materials, devices, and manufacturing technologies are revolutionizing the electronics industry. Although many micro- and nanotechnologies still face major scientific and technological challenges and remain within the realm of academic research labs, rapid advances in this area have led to the recent emergence of new applications and markets. This handbook encapsulates that exciting recent progress by providing high-quality content contributed by international experts from academia, leading industrial institutions—such as Hewlett-Packard—and government laboratories including the U.S. Department of Energy’s Sandia National Laboratory. Offering something for everyone, from students to scientists to entrepreneurs, this book showcases the broad spectrum of cutting-edge technologies that show significant promise for electronics and related applications in which nanotechnology plays a key role.
Author: M. Jamal Deen
Publisher: John Wiley & Sons
ISBN: 1119940907
Category : Technology & Engineering
Languages : en
Pages : 426
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Book Description
The creation of affordable high speed optical communications using standard semiconductor manufacturing technology is a principal aim of silicon photonics research. This would involve replacing copper connections with optical fibres or waveguides, and electrons with photons. With applications such as telecommunications and information processing, light detection, spectroscopy, holography and robotics, silicon photonics has the potential to revolutionise electronic-only systems. Providing an overview of the physics, technology and device operation of photonic devices using exclusively silicon and related alloys, the book includes: Basic Properties of Silicon Quantum Wells, Wires, Dots and Superlattices Absorption Processes in Semiconductors Light Emitters in Silicon Photodetectors , Photodiodes and Phototransistors Raman Lasers including Raman Scattering Guided Lightwaves Planar Waveguide Devices Fabrication Techniques and Material Systems Silicon Photonics: Fundamentals and Devices outlines the basic principles of operation of devices, the structures of the devices, and offers an insight into state-of-the-art and future developments.
Author: Jinlian Hu
Publisher: Woodhead Publishing
ISBN: 0081002653
Category : Technology & Engineering
Languages : en
Pages : 486
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Book Description
Active Coatings for Smart Textiles presents the latest information on active materials and their application to textiles in the form of coatings and finishes for the purpose of improving performance and creating active functional effects. This important book provides detailed coverage of smart coating types, processes, and applications. After an introduction to the topic, Part One introduces various types of smart and active coatings, including memory polymer coatings, durable and self-cleaning coatings, and breathable coatings. Technologies and related processes for the application of coatings to textiles is the focus of Part Two, with chapters devoted to microencapsulation technology, plasma surface treatments, and nanotechnology-based treatments. The book ends with a section on applications of smart textiles with responsive coatings, which are increasingly finding commercial niches in sportswear, protective clothing, medical textiles, and architecture. - Introduces various types of smart and active coatings for textiles - Covers technologies and application processes for the coating and finishing of textiles - Reviews commercial applications of such coatings, including in sportswear, protective clothing, medical textiles and architecture
Author: Stephen Pearton
Publisher: Elsevier
ISBN: 0128145226
Category : Technology & Engineering
Languages : en
Pages : 510
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Book Description
Gallium Oxide: Technology, Devices and Applications discusses the wide bandgap semiconductor and its promising applications in power electronics, solar blind UV detectors, and in extreme environment electronics. It also covers the fundamental science of gallium oxide, providing an in-depth look at the most relevant properties of this materials system. High quality bulk Ga2O3 is now commercially available from several sources and n-type epi structures are also coming onto the market. As researchers are focused on creating new complex structures, the book addresses the latest processing and synthesis methods. Chapters are designed to give readers a complete picture of the Ga2O3 field and the area of devices based on Ga2O3, from their theoretical simulation, to fabrication and application. - Provides an overview of the advantages of the gallium oxide materials system, the advances in in bulk and epitaxial crystal growth, device design and processing - Reviews the most relevant applications, including photodetectors, FETs, FINFETs, MOSFETs, sensors, catalytic applications, and more - Addresses materials properties, including structural, mechanical, electrical, optical, surface and contact
