Author: P. Rai-Choudhury
Publisher: IET
ISBN: 9780852969113
Category : Technology & Engineering
Languages : en
Pages : 716
Book Description
Contains useful process details, recipes, tables, charts and includes numerous device applications.
Handbook of Microlithography, Micromachining, and Microfabrication: Micromachining and microfabrication
Author: P. Rai-Choudhury
Publisher: IET
ISBN: 9780852969113
Category : Technology & Engineering
Languages : en
Pages : 716
Book Description
Contains useful process details, recipes, tables, charts and includes numerous device applications.
Publisher: IET
ISBN: 9780852969113
Category : Technology & Engineering
Languages : en
Pages : 716
Book Description
Contains useful process details, recipes, tables, charts and includes numerous device applications.
Handbook of Microlithography, Micromachining, and Microfabrication: Microlithography
Author: P. Rai-Choudhury
Publisher: SPIE Press
ISBN: 9780819423788
Category : Technology & Engineering
Languages : en
Pages : 780
Book Description
The dynamic field of lithography demands an authoritative handbook for process development and production, and to aid in the training of scientists and engineers. It contains process details, recipes, tables, charts, etc., and is useful as a reference book or as a textbook. Copublished with IEE.
Publisher: SPIE Press
ISBN: 9780819423788
Category : Technology & Engineering
Languages : en
Pages : 780
Book Description
The dynamic field of lithography demands an authoritative handbook for process development and production, and to aid in the training of scientists and engineers. It contains process details, recipes, tables, charts, etc., and is useful as a reference book or as a textbook. Copublished with IEE.
Handbook of Microlithography, Micromachining, and Microfabrication
Author: P. Rai-Choudhury
Publisher: INSPEC, Incorporated
ISBN: 9780852969106
Category : Microfabrication
Languages : en
Pages : 0
Book Description
Publisher: INSPEC, Incorporated
ISBN: 9780852969106
Category : Microfabrication
Languages : en
Pages : 0
Book Description
Handbook of Microlithography, Micromachining, and Microfabrication
Author: P. Rai-Choudhury {u. a.
Publisher:
ISBN:
Category : Microfabrication
Languages : en
Pages :
Book Description
Publisher:
ISBN:
Category : Microfabrication
Languages : en
Pages :
Book Description
Handbook of Microlithography, Micromachining, and Microfabrication
Author: Prosenjit Rai-Choudhury
Publisher:
ISBN:
Category : Electronic book
Languages : en
Pages : 776
Book Description
Publisher:
ISBN:
Category : Electronic book
Languages : en
Pages : 776
Book Description
Handbook of Microlithography, Micromachining, and Microfabrication
Author: P. Rai-Choudhury
Publisher:
ISBN:
Category :
Languages : en
Pages : 692
Book Description
Publisher:
ISBN:
Category :
Languages : en
Pages : 692
Book Description
Manufacturing Techniques for Microfabrication and Nanotechnology
Author: Marc J. Madou
Publisher: CRC Press
ISBN: 1420055194
Category : Technology & Engineering
Languages : en
Pages : 672
Book Description
Designed for science and engineering students, this text focuses on emerging trends in processes for fabricating MEMS and NEMS devices. The book reviews different forms of lithography, subtractive material removal processes, and additive technologies. Both top-down and bottom-up fabrication processes are exhaustively covered and the merits of the different approaches are compared. Students can use this color volume as a guide to help establish the appropriate fabrication technique for any type of micro- or nano-machine.
Publisher: CRC Press
ISBN: 1420055194
Category : Technology & Engineering
Languages : en
Pages : 672
Book Description
Designed for science and engineering students, this text focuses on emerging trends in processes for fabricating MEMS and NEMS devices. The book reviews different forms of lithography, subtractive material removal processes, and additive technologies. Both top-down and bottom-up fabrication processes are exhaustively covered and the merits of the different approaches are compared. Students can use this color volume as a guide to help establish the appropriate fabrication technique for any type of micro- or nano-machine.
Handbook of Microlithography, Micromachining, and Microfabrication
Author: Prosenjit Rai-Choudhury
Publisher:
ISBN: 9780819497864
Category :
Languages : en
Pages : 776
Book Description
The dynamic field of lithography demands an authoritative handbook for process development and production, and to aid in the training of scientists and engineers. It contains process details, recipes, tables, charts, etc., and is useful as a reference book or as a textbook.
Publisher:
ISBN: 9780819497864
Category :
Languages : en
Pages : 776
Book Description
The dynamic field of lithography demands an authoritative handbook for process development and production, and to aid in the training of scientists and engineers. It contains process details, recipes, tables, charts, etc., and is useful as a reference book or as a textbook.
Fundamentals of Microfabrication
Author: Marc J. Madou
Publisher: CRC Press
ISBN:
Category : Science
Languages : en
Pages : 640
Book Description
This reference work discusses topics such as: lithography; pattern transfer; wet and dry bulk micromachining; surface micromachining; and LIGA. Alternative micromachining technologies are described and electronics used with micromachined devices are also e
Publisher: CRC Press
ISBN:
Category : Science
Languages : en
Pages : 640
Book Description
This reference work discusses topics such as: lithography; pattern transfer; wet and dry bulk micromachining; surface micromachining; and LIGA. Alternative micromachining technologies are described and electronics used with micromachined devices are also e
Handbk.of Microlithography, Micromachining & Microfabrication
Author: P. Rai-Choudhury
Publisher:
ISBN:
Category :
Languages : en
Pages :
Book Description
Publisher:
ISBN:
Category :
Languages : en
Pages :
Book Description