Growth of Indium Nitride and Gallium Nitride on Silicon Using Metal Organic Hydride Vapor Phase Epitaxy PDF Download
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Author: Vaibhav Uday Chaudhari
Publisher:
ISBN:
Category :
Languages : en
Pages : 214
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Book Description
It was also found that the polycrystalline nature is as a result of polycrystalline nature of LT-GaN grown on the InN template. It was also shown that formation of completely enclosed uniformly distributed nanovoids were very essential to grow crack free thick GaN which is highly textured in 0002 orientation. It was also shown that GaN grown was very high quality crystal free of Indium. GaN growth on Indium metal deposited on Silicon was also studied. Depending on growth mode and conditions GaN 40 micron thick film and 100nm x 5000nm GaN wafers were successfully grown in same reactor.
Author: Vaibhav Uday Chaudhari
Publisher:
ISBN:
Category :
Languages : en
Pages : 214
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Book Description
It was also found that the polycrystalline nature is as a result of polycrystalline nature of LT-GaN grown on the InN template. It was also shown that formation of completely enclosed uniformly distributed nanovoids were very essential to grow crack free thick GaN which is highly textured in 0002 orientation. It was also shown that GaN grown was very high quality crystal free of Indium. GaN growth on Indium metal deposited on Silicon was also studied. Depending on growth mode and conditions GaN 40 micron thick film and 100nm x 5000nm GaN wafers were successfully grown in same reactor.
Author: Hyun Jong Park
Publisher:
ISBN:
Category :
Languages : en
Pages : 266
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Book Description
Crack-free, 3 mum GaN films were grown on GaN/AlGaN/Si template at 850°C although cracks developed when the thickness exceeded 7 mum. It was possible, however, to grow crack-free polycrystalline 40 mum thick GaN on Si using InN NRs as a buffer material.
Author: Taewoong Kim
Publisher:
ISBN:
Category :
Languages : en
Pages :
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Book Description
ABSTRACT: InN and In-rich compositions of In[subscript x]Ga[subscript 1-x]N, have potential for a variety of device applications including solar cells. This work addresses the growth of high quality InN by metalorganic vapor phase epitaxy. To better understand the material a thermodynamic assessment of the In-N-C-H system was performed to yield the In-N P-T diagram. In addition, the InN critical thickness was calculated for several candidate substrates to guide substrate selection. Furthermore, computational fluid dynamics was used to design an improved reactor. A vertical NH3 tube design produced the lowest reported [omega]-2[theta] rocking curve FWHM value of (574 arcsec) for InN grown on GaN/Al2O3 (0001). The film surface was also mirror-like as judged by AFM (RMS roughness = 4.2 nm). The PL peak energy of 0.82 eV was obtained for InN grown on Si, consistent with recent reports of a considerably lower of bandgap energy.
Author: Eunjung Cho
Publisher:
ISBN: 9783832284312
Category :
Languages : en
Pages : 146
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Book Description
Author: Alain E. Kaloyeros
Publisher:
ISBN:
Category : Chemical vapor deposition
Languages : en
Pages : 13
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Book Description
Low temperature growth of gallium nitride on silicon via vapor phase epitaxy was investigated. The use of different nitrogen and gallium sources was explored. The gallium nitride deposition process was optimized by varying surface preparation, seed and buffer layer growth, and annealing conditions. Films were extensively characterized via X-ray diffraction, Rutherford backscatter, atomic force microscopy, X-ray photoemission spectroscopy, and Auger electron spectroscopy. Optimized growth rates of 60-120 A/min were achieved at 0.8 torr pressure, with 1:1 gallium to nitride ratio to within 0.1%. Films were hexagonal and polycrystalline with 3 nitride bi-layer buffers, with annealing, allowed stoichiometric gallium nitride growth of up to 6000 A, but the temperatures used were not high enough to deposit epitaxial gallium nitride.
Author: Alain E. Kaloyeros
Publisher:
ISBN:
Category : Chemical vapor deposition
Languages : en
Pages : 0
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Book Description
Low temperature growth of gallium nitride on silicon via vapor phase epitaxy was investigated. The use of different nitrogen and gallium sources was explored. The gallium nitride deposition process was optimized by varying surface preparation, seed and buffer layer growth, and annealing conditions. Films were extensively characterized via X-ray diffraction, Rutherford backscatter, atomic force microscopy, X-ray photoemission spectroscopy, and Auger electron spectroscopy. Optimized growth rates of 60-120 A/min were achieved at 0.8 torr pressure, with 1:1 gallium to nitride ratio to within 0.1%. Films were hexagonal and polycrystalline with 3 nitride bi-layer buffers, with annealing, allowed stoichiometric gallium nitride growth of up to 6000 A, but the temperatures used were not high enough to deposit epitaxial gallium nitride.
Author: Michael D. Reed
Publisher:
ISBN:
Category :
Languages : en
Pages : 524
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Book Description
Author: Adrian Daniel Williams
Publisher:
ISBN:
Category :
Languages : en
Pages : 190
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Book Description
The GaN samples grown for this dissertation were studied by various techniques to characterize their structural, optical, and electrical properties.
Author: 楊富祥
Publisher:
ISBN:
Category :
Languages : en
Pages : 124
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Book Description
Author: Dirk Ehrentraut
Publisher: Springer Science & Business Media
ISBN: 3642048307
Category : Science
Languages : en
Pages : 337
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Book Description
This book discusses the important technological aspects of the growth of GaN single crystals by HVPE, MOCVD, ammonothermal and flux methods for the purpose of free-standing GaN wafer production.
