Fast Modelling of Low Pressure Radio-frequency Collisional Capacitively Coupled Discharge and Investigation of the Formation of Non-Maxwellian Electron Distribution Function PDF Download
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Author: S. V. Berezhnoi
Publisher:
ISBN:
Category :
Languages : en
Pages : 34
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Book Description
Author: S. V. Berezhnoi
Publisher:
ISBN:
Category :
Languages : en
Pages : 34
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Book Description
Author: Peng Zhang
Publisher:
ISBN:
Category :
Languages : en
Pages : 322
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Book Description
Author: S. V. Berezohni
Publisher:
ISBN:
Category :
Languages : en
Pages : 28
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Book Description
Author: Yuri P. Raizer
Publisher: CRC Press
ISBN: 135141996X
Category : Science
Languages : en
Pages : 305
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Book Description
The first publication of its kind in the field, this book describes comprehensively and systematically radio-frequency (rf) capacitive gas discharges of intermediate and low pressure and their application to gas laser excitation and to plasma processing. Text presents the physics underlying rf discharges along with techniques for obtaining such discharges, experimental methods and results, and theoretical and numerical modeling findings. Radio-Frequency Capacitive Discharges is written by well-known specialists in the field, authors of many theoretical and experimental works. They provide simple and clear discussions of complicated physical phenomena. A complete review on the state of the art is included. This interesting new book can be used as a textbook for students and postgraduates and as a comprehensive guidebook by specialists.
Author: V. P. Savinov
Publisher: CRC Press
ISBN: 0429894236
Category : Science
Languages : en
Pages : 322
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Book Description
This book describes the physical mechanism of high-frequency (radio-frequency) capacitive discharge (RFCD) of low and medium pressure and the properties of discharge plasma in detail. The main properties and characteristics of RFCD, the features of electric breakdown in a high-frequency field are also investigated. The properties of near-electrode layers of a spatial discharge, the nature of the electric field in them, and the processes of charge transport to electrodes are explored. The work is intended for scientists engaged in gas discharge physics and low-temperature plasmas, graduate students and students of physics, physical chemistry, and relevant specialties.
Author: Igor D. Kaganovich
Publisher:
ISBN:
Category : Kinetic theory of gases
Languages : en
Pages : 12
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Book Description
Author:
Publisher:
ISBN:
Category : Physics
Languages : en
Pages : 916
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Book Description
Author: Zuoding Wang
Publisher:
ISBN:
Category :
Languages : en
Pages : 222
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Book Description
Author: Richard J. Winslow
Publisher:
ISBN:
Category : Electric discharges through gases
Languages : en
Pages : 838
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Book Description
Author: Pascal Chabert
Publisher: Cambridge University Press
ISBN: 9780521763004
Category : Science
Languages : en
Pages : 392
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Book Description
Low-temperature radio frequency plasmas are essential in various sectors of advanced technology, from micro-engineering to spacecraft propulsion systems and efficient sources of light. The subject lies at the complex interfaces between physics, chemistry and engineering. Focusing mostly on physics, this book will interest graduate students and researchers in applied physics and electrical engineering. The book incorporates a cutting-edge perspective on RF plasmas. It also covers basic plasma physics including transport in bounded plasmas and electrical diagnostics. Its pedagogic style engages readers, helping them to develop physical arguments and mathematical analyses. Worked examples apply the theories covered to realistic scenarios, and over 100 in-text questions let readers put their newly acquired knowledge to use and gain confidence in applying physics to real laboratory situations.
