Author: 黃立賢
Publisher:
ISBN:
Category :
Languages : en
Pages : 102
Book Description
Fabrication and Investigation of AlGaN/GaN Metal-oxide-semiconductor High-electron Mobility Field-effect Transistors with Gate Insulators Grown Using PEC Oxidation Method
Author: 黃立賢
Publisher:
ISBN:
Category :
Languages : en
Pages : 102
Book Description
Publisher:
ISBN:
Category :
Languages : en
Pages : 102
Book Description
Investigation and Fabrication of AlGaN/GaN Metal-oxide-semiconductor High-electron Mobility Transistors with Surface Treatment and the I-ZnO Gate Dielectric Layer
Author: 邱雅蘭
Publisher:
ISBN:
Category :
Languages : en
Pages : 109
Book Description
Publisher:
ISBN:
Category :
Languages : en
Pages : 109
Book Description
Fabrication of AlGaN-GaN-InN High Electron Mobility Transistors
Author:
Publisher:
ISBN:
Category :
Languages : en
Pages : 10
Book Description
The effect of various growth parameters such as temperature, V/III ratio and the growth rate on the properties of InN layers grown by MOCVD was investigated. The InN layers were deposited onto 2 micrometer thick GaN-on-c-plane sapphire films. In addition, the different precursor injection procedures were investigated. Since the growth of InN required very low deposition temperatures around 600 deg. C, for the deposition of InN/GaN heterostructures similar experiments were performed to optimize the growth of GaN at comparable growth temperatures. The fabrication of GaN/InN/GaN structures for device applications was complicated by intermixing and surface segregation of indium and defect formation in heterostructures related to the large lattice mismatch of 10% between GaN and InN.
Publisher:
ISBN:
Category :
Languages : en
Pages : 10
Book Description
The effect of various growth parameters such as temperature, V/III ratio and the growth rate on the properties of InN layers grown by MOCVD was investigated. The InN layers were deposited onto 2 micrometer thick GaN-on-c-plane sapphire films. In addition, the different precursor injection procedures were investigated. Since the growth of InN required very low deposition temperatures around 600 deg. C, for the deposition of InN/GaN heterostructures similar experiments were performed to optimize the growth of GaN at comparable growth temperatures. The fabrication of GaN/InN/GaN structures for device applications was complicated by intermixing and surface segregation of indium and defect formation in heterostructures related to the large lattice mismatch of 10% between GaN and InN.
Fabrication and Characterization of AlGaN/GaN Metal-Insulator-Semiconductor High Electron Mobility Transistors for High Power Applications
Author: Anthony Calzolaro
Publisher:
ISBN:
Category :
Languages : en
Pages : 0
Book Description
Publisher:
ISBN:
Category :
Languages : en
Pages : 0
Book Description
Enhancement Mode AlGaN/GaN Metal-Oxide-Semiconductor High Electron Mobility Transistors Using Self-Aligned Gate-Recessed Process
Author: 徐健軒
Publisher:
ISBN:
Category :
Languages : en
Pages : 70
Book Description
Publisher:
ISBN:
Category :
Languages : en
Pages : 70
Book Description
Growth, Characterization and Device Processing of GaN Metal Oxide Semiconductor Field Effect Transistor (MOSFET) Structures
Author:
Publisher:
ISBN:
Category :
Languages : en
Pages :
Book Description
The physical properties of GaN, high saturation velocity, high breakdown fields, high electron mobility, wide bandgap energy and high thermal conductivity, make it a promising material for field effect transistor (FETs) devices for high speed, high power, and small channel length applications. Despite the success of GaN electronic devices such as heterojunction field effect transistors (HFETs), fabrication of GaN Metal Oxide Semiconductor (MOS) transistors remains a technical challenge. The primary reason for this is the non-availability of a gate dielectric with a low density of interface states and the simultaneous requirement of ohmic source/drain contacts which are compatible with enhancement mode structures. Unlike existing III-N HFET devices, which have a high free carrier density two dimensional electron gas (2DEG) in the semiconductor substrate, a MOSFET in either accumulation or inversion mode requires low free carrier concentration in the semiconductor channel, and a high density of free carriers in adjacent source and drain areas. This research explores the development, and demonstration of an enhancement mode (normally off) GaN MOSFET with highly doped source/drain ohmic contacts and compatible gate dielectric. Highly doped source/drain ohmic contacts were formed by selected area epitaxial regrowth of Si doped GaN by metalorganic chemical vapor deposition (MOCVD). The MOS gate dielectrics which have been investigated are Ga2O3/Gd2O3 and SiNx. To achieve uniform and highly doped GaN on reactive ion etched (RIE) and patterned GaN surfaces for source drain contacts, a low temperature regrowth (750-850oC) was developed. A model for growth morphology consistent with the low temperature regrowth of GaN on RIE patterned GaN surfaces is given. The detailed structural, optical, and chemical characterization of the low temperature regrown highly doped GaN for source and drain contacts has been provided. The structural characterization of GaN/Ga2O3/Gd2O3 interface.
Publisher:
ISBN:
Category :
Languages : en
Pages :
Book Description
The physical properties of GaN, high saturation velocity, high breakdown fields, high electron mobility, wide bandgap energy and high thermal conductivity, make it a promising material for field effect transistor (FETs) devices for high speed, high power, and small channel length applications. Despite the success of GaN electronic devices such as heterojunction field effect transistors (HFETs), fabrication of GaN Metal Oxide Semiconductor (MOS) transistors remains a technical challenge. The primary reason for this is the non-availability of a gate dielectric with a low density of interface states and the simultaneous requirement of ohmic source/drain contacts which are compatible with enhancement mode structures. Unlike existing III-N HFET devices, which have a high free carrier density two dimensional electron gas (2DEG) in the semiconductor substrate, a MOSFET in either accumulation or inversion mode requires low free carrier concentration in the semiconductor channel, and a high density of free carriers in adjacent source and drain areas. This research explores the development, and demonstration of an enhancement mode (normally off) GaN MOSFET with highly doped source/drain ohmic contacts and compatible gate dielectric. Highly doped source/drain ohmic contacts were formed by selected area epitaxial regrowth of Si doped GaN by metalorganic chemical vapor deposition (MOCVD). The MOS gate dielectrics which have been investigated are Ga2O3/Gd2O3 and SiNx. To achieve uniform and highly doped GaN on reactive ion etched (RIE) and patterned GaN surfaces for source drain contacts, a low temperature regrowth (750-850oC) was developed. A model for growth morphology consistent with the low temperature regrowth of GaN on RIE patterned GaN surfaces is given. The detailed structural, optical, and chemical characterization of the low temperature regrown highly doped GaN for source and drain contacts has been provided. The structural characterization of GaN/Ga2O3/Gd2O3 interface.
A Simple Oxidation Process for AlGaN/GaN Passivated Metal-Oxide-Semiconductor High Electron Mobility Transistor
Author: 李國弘
Publisher:
ISBN:
Category :
Languages : en
Pages : 79
Book Description
Publisher:
ISBN:
Category :
Languages : en
Pages : 79
Book Description
Design and Fabrication of RF Power AlGaN/GaN Metal-Oxide-Semiconductor High-Electron-Mobility Transistor
Author: Bo-Kang Lai
Publisher:
ISBN:
Category :
Languages : en
Pages :
Book Description
Publisher:
ISBN:
Category :
Languages : en
Pages :
Book Description
Device Design and Fabrication of AlGaN/GaN Metal-oxide-semiconductor Heterostructure Field-effect Transistors
Author: Xuhong Hu
Publisher:
ISBN:
Category :
Languages : en
Pages : 286
Book Description
Publisher:
ISBN:
Category :
Languages : en
Pages : 286
Book Description
Design, Growth, and Characterization of AlGaN-GaN High Electron Mobility Transistors
Author: Michael James Murphy
Publisher:
ISBN:
Category :
Languages : en
Pages : 226
Book Description
Publisher:
ISBN:
Category :
Languages : en
Pages : 226
Book Description