Design, Test, and Microfabrication of MEMS and MOEMS PDF Download
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Author:
Publisher:
ISBN:
Category : Computer-aided design
Languages : en
Pages : 648
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Author:
Publisher:
ISBN:
Category : Computer-aided design
Languages : en
Pages : 648
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Book Description
Author: Bernard Courtois
Publisher:
ISBN: 9780819431547
Category : Computer-aided design
Languages : en
Pages : 1192
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Author: Benoit Charlot
Publisher:
ISBN: 9781538629529
Category :
Languages : en
Pages :
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Author:
Publisher:
ISBN: 9781479986255
Category :
Languages : en
Pages : 380
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Author: M. Edward Motamedi
Publisher: SPIE Press
ISBN: 9780819450210
Category : Technology & Engineering
Languages : en
Pages : 640
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Book Description
This book introduces the exciting and fast-moving field of MOEMS to graduate students, scientists, and engineers by providing a foundation of both micro-optics and MEMS that will enable them to conduct future research in the field. Born from the relatively new fields of MEMS and micro-optics, MOEMS are proving to be an attractive and low-cost solution to a range of device problems requiring high optical functionality and high optical performance. MOEMS solutions include optical devices for telecommunication, sensing, and mobile systems such as v-grooves, gratings, shutters, scanners, filters, micromirrors, switches, alignment aids, lens arrays, and hermetic wafer-scale optical packaging. An international team of leading researchers contributed to this book, and it presents examples and problems employing cutting-edge MOEM devices. It will inspire researchers to further advance the design, fabrication, and analysis of MOEM systems.
Author:
Publisher:
ISBN: 9782355000201
Category : Computer-aided design
Languages : en
Pages :
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Author:
Publisher:
ISBN: 9782355000287
Category : Microelectromechanical systems
Languages : en
Pages : 376
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Author: IEEE Staff
Publisher:
ISBN: 9781479986279
Category :
Languages : en
Pages :
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Book Description
The goal of the Symposium is to provide a forum for in depth investigations and interdisciplinary discussions involving design, modeling, testing, micromachining, microfabrication, integration and packaging of structures, devices, and systems
Author:
Publisher: IEEE
ISBN: 9781424438747
Category : Technology & Engineering
Languages : en
Pages : 424
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Author:
Publisher:
ISBN: 9782355000201
Category :
Languages : en
Pages : 259
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