Resolution Enhancement Techniques in Optical Lithography PDF Download

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Resolution Enhancement Techniques in Optical Lithography

Resolution Enhancement Techniques in Optical Lithography PDF Author: Alfred Kwok-Kit Wong
Publisher: SPIE Press
ISBN: 9780819439956
Category : Science
Languages : en
Pages : 238

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Book Description
Ever-smaller IC devices are pushing the optical lithography envelope, increasing the importance of resolution enhancement techniques. This tutorial encompasses two decades of research. It discusses theoretical and practical aspects of commonly used techniques, including optical imaging and resolution, modified illumination, optical proximity correction, alternating and attenuating phase-shifting masks, selecting RETs, and second-generation RETs. Useful for students and practicing lithographers