Contributions to the Physics of Micro /Nano/ Fabrication PDF Download
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Author: JULIUS J. MURAY
Publisher:
ISBN:
Category :
Languages : en
Pages : 0
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Book Description
Author: JULIUS J. MURAY
Publisher:
ISBN:
Category :
Languages : en
Pages : 0
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Book Description
Author: Ivor Brodie
Publisher: Springer Science & Business Media
ISBN: 1475767757
Category : Science
Languages : en
Pages : 661
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Book Description
In this revised and expanded edition, the authors provide a comprehensive overview of the tools, technologies, and physical models needed to understand, build, and analyze microdevices. Students, specialists within the field, and researchers in related fields will appreciate their unified presentation and extensive references.
Author: Brodie
Publisher:
ISBN: 9788184894134
Category :
Languages : en
Pages : 670
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Book Description
Author: Ivor Brodie
Publisher: Springer Science & Business Media
ISBN: 1489921605
Category : Technology & Engineering
Languages : en
Pages : 518
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Book Description
The Physical Electronics Department of SRI International (formerly Stanford Research Institute) has been pioneering the development of devices fabricated to submicron tolerances for well over 20 years. In 1961, a landmark paper on electron-beam lithography and its associated technologies was published by K. R. Shoulderst (then at SRI), which set the stage for our subsequent efforts in this field. He had the foresight to believe that the building of such small devices was actually within the range of human capabilities. As a result of this initial momentum, our experience in the technologies associated with microfabrication has become remarkably comprehensive, despite the relatively small size of our research activity. We have frequently been asked to deliver seminars or provide reviews on various aspects of micro fabrication. These activities made us aware of the need for a comprehensive overview of the physics of microfabrication. We hope that this book will fill that need.
Author: Jiwang Yan
Publisher: Springer
ISBN: 9789811300974
Category : Technology & Engineering
Languages : en
Pages : 0
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Book Description
This volume focuses on the state-of-the-art micro/nanofabrication technologies for creating miniature structures with high precision. These multidisciplinary technologies include mechanical, electrical, optical, physical, and chemical methods, as well as hybrid processes, covering subtractive and additive material manufacturing, as well as net-shape manufacturing. The materials the volume deals with include metals, alloys, semiconductors, polymers, crystals, glass, ceramics, composites, and nanomaterials. The volume is composed of 30 chapters, which are grouped into five parts. Engaging with the latest research in the field, these chapters provide important perspectives on key topics, from process developments at the shop level to scientific investigations at the academic level, offering both experimental work and theoretical analysis. Moreover, the content of this volume is highly interdisciplinary in nature, with insights from not only manufacturing technology but also mechanical/material science, optics, physics, chemistry, and more.
Author: Marc J. Madou
Publisher: CRC Press
ISBN: 1482274663
Category : Technology & Engineering
Languages : en
Pages : 1992
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Book Description
Now in its third edition, Fundamentals of Microfabrication and Nanotechnology continues to provide the most complete MEMS coverage available. Thoroughly revised and updated the new edition of this perennial bestseller has been expanded to three volumes, reflecting the substantial growth of this field. It includes a wealth of theoretical and practical information on nanotechnology and NEMS and offers background and comprehensive information on materials, processes, and manufacturing options. The first volume offers a rigorous theoretical treatment of micro- and nanosciences, and includes sections on solid-state physics, quantum mechanics, crystallography, and fluidics. The second volume presents a very large set of manufacturing techniques for micro- and nanofabrication and covers different forms of lithography, material removal processes, and additive technologies. The third volume focuses on manufacturing techniques and applications of Bio-MEMS and Bio-NEMS. Illustrated in color throughout, this seminal work is a cogent instructional text, providing classroom and self-learners with worked-out examples and end-of-chapter problems. The author characterizes and defines major research areas and illustrates them with examples pulled from the most recent literature and from his own work.
Author: Tommaso Baldacchini
Publisher: William Andrew
ISBN: 0128178280
Category : Technology & Engineering
Languages : en
Pages : 762
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Book Description
Three-Dimensional Microfabrication Using Two-Photon Polymerization, Second Edition offers a comprehensive guide to TPP microfabrication and a unified description of TPP microfabrication across disciplines. It offers in-depth discussion and analysis of all aspects of TPP, including the necessary background, pros and cons of TPP microfabrication, material selection, equipment, processes and characterization. Current and future applications are covered, along with case studies that illustrate the book's concepts. This new edition includes updated chapters on metrology, synthesis and the characterization of photoinitiators used in TPP, negative- and positive-tone photoresists, and nonlinear optical characterization of polymers. This is an important resource that will be useful for scientists involved in microfabrication, generation of micro- and nano-patterns and micromachining. - Discusses the major types of nanomaterials used in the agriculture and forestry sectors, exploring how their properties make them effective for specific applications - Explores the design, fabrication, characterization and applications of nanomaterials for new Agri-products - Offers an overview of regulatory aspects regarding the use of nanomaterials for agriculture and forestry
Author: Zheng Cui
Publisher: Springer
ISBN: 9783642066979
Category : Technology & Engineering
Languages : en
Pages : 0
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Book Description
The book is a collection of the author’s years of experience and research findings, as well as the latest development, in micro-nanofabrication technologies. It gives a detailed introduction on the basics of micro-nanofabrication, including optical lithography, electron beam lithography, focused ion beam technique, X-ray lithography, various etching and replication techniques. For each of the fabrication technology it introduces, the emphasis is on clear explanation of the basic principle, the essential steps in the processes, various process conditions and typical process parameters. The advantages and disadvantages of each technique are also analysed. The applications of micro-nanofabrication technologies focus on manufacturing of very large scale integrated circuits (VLSI), nanoelectronics, optoelectronics, high density magnetic storage, micro-electro-mechanical system or MEMS, biochip or lab-on-chip and nanotechnology. Each of the applications is accompanied by practical examples to demonstrate how particular fabrication techniques are applied. There is an extensive list of references following each chapter for readers to explore further. The book is not only a good supplementary reading material for university undergraduates or postgraduates who are novices in this field, but also a good reference book for experienced engineering professionals who wish to know other fabrication techniques outside their own field.
Author: Stefano Cabrini
Publisher: CRC Press
ISBN: 1420090526
Category : Technology & Engineering
Languages : en
Pages : 548
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Book Description
While many books are dedicated to individual aspects of nanofabrication, there is no single source that defines and explains the total vision of the field. Filling this gap, Nanofabrication Handbook presents a unique collection of new and the most important established approaches to nanofabrication. Contributors from leading research facilities and academic institutions around the world define subfields, offer practical instructions and examples, and pave the way for future research. Helping readers to select the proper fabricating technique for their experiments, the book provides a broad vision of the most critical problems and explains how to solve them. It includes basic definitions and introduces the main underlying concepts of nanofabrication. The book also discusses the major advantages and disadvantages of each approach and offers a wide variety of examples of cutting-edge applications. Each chapter focuses on a particular method or aspect of study. For every method, the contributors describe the underlying theoretical basis, resolution, patterns and substrates used, and applications. They show how applications at the nanoscale require a different process and understanding than those at the microscale. For each experiment, they elucidate key solutions to problems relating to materials, methods, and surface considerations. A complete resource for this rapidly emerging interdisciplinary field, this handbook provides practical information for planning the experiments of any project that employs nanofabrication techniques. It gives readers a foundation to enter the complex world of nanofabrication and inspires the scientific community at large to push the limits of nanometer resolution.
Author: Fernando A. Lasagni
Publisher: Springer Science & Business Media
ISBN: 3642177824
Category : Technology & Engineering
Languages : en
Pages : 227
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Book Description
This book shows an update in the field of micro/nano fabrications techniques of two and three dimensional structures as well as ultimate three dimensional characterization methods from the atom range to the micro scale. Several examples are presented showing their direct application in different technological fields such as microfluidics, photonics, biotechnology and aerospace engineering, between others. The effects of the microstructure and topography on the macroscopic properties of the studied materials are discussed, together with a detailed review of 3D imaging techniques.
