Advanced MEMS/NEMS Fabrication and Sensors

Advanced MEMS/NEMS Fabrication and Sensors PDF Author: Zhuoqing Yang
Publisher: Springer Nature
ISBN: 303079749X
Category : Technology & Engineering
Languages : en
Pages : 312

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Book Description
This book begins by introducing new and unique fabrication, micromachining, and integration manufacturing methods for MEMS (Micro-Electro-Mechanical Systems) and NEMS (Nano-Electro-Mechanical Systems) devices, as well as novel nanomaterials for sensor fabrications. The second section focuses on novel sensors based on these emerging MEMS/NEMS fabrication methods, and their related applications in industrial, biomedical, and environmental monitoring fields, which makes up the sensing layer (or perception layer) in IoT architecture. This authoritative guide offers graduate students, postgraduates, researchers, and practicing engineers with state-of-the-art processes and cutting-edge technologies on MEMS /NEMS, micro- and nanomachining, and microsensors, addressing progress in the field and prospects for future development. Presents latest international research on MEMS/NEMS fabrication technologies and novel micro/nano sensors; Covers a broad spectrum of sensor applications; Written by leading experts in the field.

Advanced MEMS/NEMS Fabrication and Sensors

Advanced MEMS/NEMS Fabrication and Sensors PDF Author: Zhuoqing Yang
Publisher: Springer Nature
ISBN: 303079749X
Category : Technology & Engineering
Languages : en
Pages : 312

Get Book Here

Book Description
This book begins by introducing new and unique fabrication, micromachining, and integration manufacturing methods for MEMS (Micro-Electro-Mechanical Systems) and NEMS (Nano-Electro-Mechanical Systems) devices, as well as novel nanomaterials for sensor fabrications. The second section focuses on novel sensors based on these emerging MEMS/NEMS fabrication methods, and their related applications in industrial, biomedical, and environmental monitoring fields, which makes up the sensing layer (or perception layer) in IoT architecture. This authoritative guide offers graduate students, postgraduates, researchers, and practicing engineers with state-of-the-art processes and cutting-edge technologies on MEMS /NEMS, micro- and nanomachining, and microsensors, addressing progress in the field and prospects for future development. Presents latest international research on MEMS/NEMS fabrication technologies and novel micro/nano sensors; Covers a broad spectrum of sensor applications; Written by leading experts in the field.

Development of CMOS-MEMS/NEMS Devices

Development of CMOS-MEMS/NEMS Devices PDF Author: Jaume Verd
Publisher: MDPI
ISBN: 3039210688
Category : Technology & Engineering
Languages : en
Pages : 166

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Book Description
Micro and nano-electro-mechanical system (M/NEMS) devices constitute key technological building blocks to enable increased additional functionalities within Integrated Circuits (ICs) in the More-Than-Moore era, as described in the International Technology Roadmap for Semiconductors. The CMOS ICs and M/NEMS dies can be combined in the same package (SiP), or integrated within a single chip (SoC). In the SoC approach the M/NEMS devices are monolithically integrated together with CMOS circuitry allowing the development of compact and low-cost CMOS-M/NEMS devices for multiple applications (physical sensors, chemical sensors, biosensors, actuators, energy actuators, filters, mechanical relays, and others). On-chip CMOS electronics integration can overcome limitations related to the extremely low-level signals in sub-micrometer and nanometer scale electromechanical transducers enabling novel breakthrough applications. This Special Issue aims to gather high quality research contributions dealing with MEMS and NEMS devices monolithically integrated with CMOS, independently of the final application and fabrication approach adopted (MEMS-first, interleaved MEMS, MEMS-last or others).]

Self-Powered and Soft Polymer MEMS/NEMS Devices

Self-Powered and Soft Polymer MEMS/NEMS Devices PDF Author: Ajay Giri Prakash Kottapalli
Publisher: Springer
ISBN: 303005554X
Category : Technology & Engineering
Languages : en
Pages : 94

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Book Description
This book explores the fabrication of soft material and biomimetic MEMS sensors, presents a review of MEMS/NEMS energy harvesters and self-powered sensors, and focuses on the recent efforts in developing flexible and wearable piezoelectric nanogenerators. It also includes a critical analysis of various energy harvesting principles, such as electromagnetic, piezoelectric, electrostatic, triboelectric, and magnetostrictive. This multidisciplinary book is appropriate for students and professionals in the fields of material science, mechanical engineering, electrical engineering, and bioengineering.

Chemical Sensors 7 -and- MEMS/NEMS 7

Chemical Sensors 7 -and- MEMS/NEMS 7 PDF Author: Peter J. Hesketh
Publisher: The Electrochemical Society
ISBN: 1566775108
Category : Chemical detectors
Languages : en
Pages : 517

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Book Description
The latest developments in chemical and biological sensor research and development. Topics include: 1. new selective species recognition surfaces and materials; 2. molecular recognition materials and approaches to minimize non-specific binding; 3. semi-selective species recognition materials; 4. novel methods for signal processing, signal amplification, and detection; 5. detection systems for multiple analytes in complex samples; 6. sensor arrays; and 7. analytical systems and approaches.

MEMS/NEMS Sensors

MEMS/NEMS Sensors PDF Author: Goutam Koley
Publisher: MDPI
ISBN: 3039216341
Category : Technology & Engineering
Languages : en
Pages : 242

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Book Description
Due to the ever-expanding applications of micro/nano-electromechanical systems (NEMS/MEMS) as sensors and actuators, interest in their development has rapidly expanded over the past decade. Encompassing various excitation and readout schemes, the MEMS/NEMS devices transduce physical parameter changes, such as temperature, mass or stress, caused by changes in desired measurands, to electrical signals that can be further processed. Some common examples of NEMS/MEMS sensors include pressure sensors, accelerometers, magnetic field sensors, microphones, radiation sensors, and particulate matter sensors.

Environmental, Chemical and Medical Sensors

Environmental, Chemical and Medical Sensors PDF Author: Shantanu Bhattacharya
Publisher: Springer
ISBN: 9811077517
Category : Technology & Engineering
Languages : en
Pages : 414

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Book Description
This book covers the fundamentals of sensor technologies as well as the recent research for the development of environmental, chemical and medical sensor technologies. Chapters include current research on microflow cytometry, microfluidic devices, colorimetric sensors, and the development of low-cost optical densitometric sensors and paper based analytical devices for environmental and biomedical applications. Special focus has been given to nanotechnology and nanostructures- their fabrication, uses and utility in different fields of research such as for the design of tools for medical diagnostics, therapeutics, as well as for detection and estimation of pollutant levels in water and air quality monitoring. This book is intended as a resource for researchers working in the field of sensor development across the world.

Physics and Technology of Silicon Carbide Devices

Physics and Technology of Silicon Carbide Devices PDF Author: Yasuto Hijikata
Publisher: BoD – Books on Demand
ISBN: 9535109170
Category : Science
Languages : en
Pages : 416

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Book Description
Recently, some SiC power devices such as Schottky-barrier diodes (SBDs), metal-oxide-semiconductor field-effect-transistors (MOSFETs), junction FETs (JFETs), and their integrated modules have come onto the market. However, to stably supply them and reduce their cost, further improvements for material characterizations and those for device processing are still necessary. This book abundantly describes recent technologies on manufacturing, processing, characterization, modeling, and so on for SiC devices. In particular, for explanation of technologies, I was always careful to argue physics underlying the technologies as much as possible. If this book could be a little helpful to progress of SiC devices, it will be my unexpected happiness.

Mems for Biomedical Applications

Mems for Biomedical Applications PDF Author: Shekhar Bhansali
Publisher: Elsevier
ISBN: 0857096273
Category : Technology & Engineering
Languages : en
Pages : 511

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Book Description
The application of Micro Electro Mechanical Systems (MEMS) in the biomedical field is leading to a new generation of medical devices. MEMS for biomedical applications reviews the wealth of recent research on fabrication technologies and applications of this exciting technology.The book is divided into four parts: Part one introduces the fundamentals of MEMS for biomedical applications, exploring the microfabrication of polymers and reviewing sensor and actuator mechanisms. Part two describes applications of MEMS for biomedical sensing and diagnostic applications. MEMS for in vivo sensing and electrical impedance spectroscopy are investigated, along with ultrasonic transducers, and lab-on-chip devices. MEMS for tissue engineering and clinical applications are the focus of part three, which considers cell culture and tissue scaffolding devices, BioMEMS for drug delivery and minimally invasive medical procedures. Finally, part four reviews emerging biomedical applications of MEMS, from implantable neuroprobes and ocular implants to cellular microinjection and hybrid MEMS.With its distinguished editors and international team of expert contributors, MEMS for biomedical applications provides an authoritative review for scientists and manufacturers involved in the design and development of medical devices as well as clinicians using this important technology. - Reviews the wealth of recent research on fabrication technologies and applications of Micro Electro Mechanical Systems (MEMS) in the biomedical field - Introduces the fundamentals of MEMS for biomedical applications, exploring the microfabrication of polymers and reviewing sensor and actuator mechanisms - Considers MEMS for biomedical sensing and diagnostic applications, along with MEMS for in vivo sensing and electrical impedance spectroscopy

Advanced Biomaterials and Biodevices

Advanced Biomaterials and Biodevices PDF Author: Ashutosh Tiwari
Publisher: John Wiley & Sons
ISBN: 1118774132
Category : Technology & Engineering
Languages : en
Pages : 414

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Book Description
This cutting-edge book focuses on the emerging area of biomaterials and biodevices that incorporate therapeutic agents, molecular targeting, and diagnostic imaging capabilities The design and development of biomaterials play a significant role in the diagnosis, treatment, and prevention of diseases. When used with highly selective and sensitive biomaterials, cutting-edge biodevices can allow the rapid and accurate diagnosis of disease, creating a platform for research and development, especially in the field of treatment for prognosis and detection of diseases in the early stage. This book emphasizes the emerging area of biomaterials and biodevices that incorporate therapeutic agents, molecular targeting, and diagnostic imaging capabilities. The 15 comprehensive chapters written by leading experts cover such topics as: The use of severe plastic deformation technique to enhance the properties of nanostructured metals Descriptions of the different polymers for use in controlled drug release Chitin and chitosan as renewable healthcare biopolymers for biomedical applications Innovated devices such as “label-free biochips” and polymer MEMS Molecular imprinting and nanotechnology Prussian Blue biosensing applications The evaluation of different types of biosensors in terms of their cost effectiveness, selectivity, and sensitivity Stimuli-responsive polypeptide nanocarriers for malignancy therapeutics

Global Perspectives of Nanoscience and Engineering Education

Global Perspectives of Nanoscience and Engineering Education PDF Author: Kurt Winkelmann
Publisher: Springer
ISBN: 3319318330
Category : Technology & Engineering
Languages : en
Pages : 399

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Book Description
This book presents the perspectives of nanotechnology educators from around the world. Experts present the pressing challenges of teaching nanoscience and engineering to students in all levels of education, postsecondary and informal environments. The book was inspired by the 2014 NSF workshop for Nanoscience and Engineering Education. Since nanotechnology is a relatively new field, authors present recommendations for designing nanotechnology education programs. The chapters describe methods to teach specific topics, such as probe microscopy, size and scale, and nanomaterial safety, in classrooms around the world. Other chapters describe the ways that organizations like NNIN and the NISE Network have influenced informal nanotechnology education. Information technology plays a growing role in all types of education and several chapters are devoted to describing ways how educators can use online curricula for teaching nanotechnology to students from preschool to graduate school.