Tribology Issues and Opportunities in MEMS

Tribology Issues and Opportunities in MEMS PDF Author: Bharat Bhushan
Publisher: Springer Science & Business Media
ISBN: 9780792350248
Category : Science
Languages : en
Pages : 690

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Book Description
Micro Electro Mechanical Systems (MEMS) is already about a billion dollars a year industry and is growing rapidly. So far major emphasis has been placed on the fabrication processes for various devices. There are serious issues related to tribology, mechanics, surfacechemistry and materials science in the operationand manufacturingof many MEMS devices and these issues are preventing an even faster commercialization. Very little is understood about tribology and mechanical properties on micro- to nanoscales of the materials used in the construction of MEMS devices. The MEMS community needs to be exposed to the state-of-the-artoftribology and vice versa. Fundamental understanding of friction/stiction, wear and the role of surface contamination and environmental debris in micro devices is required. There are significantadhesion, friction and wear issues in manufacturing and actual use, facing the MEMS industry. Very little is understood about the tribology of bulk silicon and polysilicon films used in the construction ofthese microdevices. These issues are based on surface phenomenaand cannotbe scaled down linearly and these become increasingly important with the small size of the devices. Continuum theory breaks down in the analyses, e. g. in fluid flow of micro-scale devices. Mechanical properties ofpolysilicon and other films are not well characterized. Roughness optimization can help in tribological improvements. Monolayers of lubricants and other materials need to be developed for ultra-low friction and near zero wear. Hard coatings and ion implantation techniques hold promise.

Tribology Issues and Opportunities in MEMS

Tribology Issues and Opportunities in MEMS PDF Author: Bharat Bhushan
Publisher: Springer Science & Business Media
ISBN: 9780792350248
Category : Science
Languages : en
Pages : 690

Get Book Here

Book Description
Micro Electro Mechanical Systems (MEMS) is already about a billion dollars a year industry and is growing rapidly. So far major emphasis has been placed on the fabrication processes for various devices. There are serious issues related to tribology, mechanics, surfacechemistry and materials science in the operationand manufacturingof many MEMS devices and these issues are preventing an even faster commercialization. Very little is understood about tribology and mechanical properties on micro- to nanoscales of the materials used in the construction of MEMS devices. The MEMS community needs to be exposed to the state-of-the-artoftribology and vice versa. Fundamental understanding of friction/stiction, wear and the role of surface contamination and environmental debris in micro devices is required. There are significantadhesion, friction and wear issues in manufacturing and actual use, facing the MEMS industry. Very little is understood about the tribology of bulk silicon and polysilicon films used in the construction ofthese microdevices. These issues are based on surface phenomenaand cannotbe scaled down linearly and these become increasingly important with the small size of the devices. Continuum theory breaks down in the analyses, e. g. in fluid flow of micro-scale devices. Mechanical properties ofpolysilicon and other films are not well characterized. Roughness optimization can help in tribological improvements. Monolayers of lubricants and other materials need to be developed for ultra-low friction and near zero wear. Hard coatings and ion implantation techniques hold promise.

Tribology Issues and Opportunities in MEMS

Tribology Issues and Opportunities in MEMS PDF Author: Bharat Bhushan
Publisher: Springer Science & Business Media
ISBN: 9401150508
Category : Science
Languages : en
Pages : 652

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Book Description
Micro Electro Mechanical Systems (MEMS) is already about a billion dollars a year industry and is growing rapidly. So far major emphasis has been placed on the fabrication processes for various devices. There are serious issues related to tribology, mechanics, surfacechemistry and materials science in the operationand manufacturingof many MEMS devices and these issues are preventing an even faster commercialization. Very little is understood about tribology and mechanical properties on micro- to nanoscales of the materials used in the construction of MEMS devices. The MEMS community needs to be exposed to the state-of-the-artoftribology and vice versa. Fundamental understanding of friction/stiction, wear and the role of surface contamination and environmental debris in micro devices is required. There are significantadhesion, friction and wear issues in manufacturing and actual use, facing the MEMS industry. Very little is understood about the tribology of bulk silicon and polysilicon films used in the construction ofthese microdevices. These issues are based on surface phenomenaand cannotbe scaled down linearly and these become increasingly important with the small size of the devices. Continuum theory breaks down in the analyses, e. g. in fluid flow of micro-scale devices. Mechanical properties ofpolysilicon and other films are not well characterized. Roughness optimization can help in tribological improvements. Monolayers of lubricants and other materials need to be developed for ultra-low friction and near zero wear. Hard coatings and ion implantation techniques hold promise.

Nano-tribology and Materials in MEMS

Nano-tribology and Materials in MEMS PDF Author: Sujeet K. Sinha
Publisher: Springer Science & Business Media
ISBN: 3642369359
Category : Technology & Engineering
Languages : en
Pages : 276

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Book Description
This book brings together recent developments in the areas of MEMS tribology, novel lubricants and coatings for nanotechnological applications, biomimetics in tribology and fundamentals of micro/nano-tribology. Tribology plays important roles in the functioning and durability of machines at small length scales because of the problems associated with strong surface adhesion, friction, wear etc. Recently, a number of studies have been conducted to understand tribological phenomena at nano/micro scales and many new tribological solutions for MEMS have been proposed.

Fundamentals of Tribology and Bridging the Gap Between the Macro- and Micro/Nanoscales

Fundamentals of Tribology and Bridging the Gap Between the Macro- and Micro/Nanoscales PDF Author: Bharat Bhushan
Publisher: Springer Science & Business Media
ISBN: 9401007365
Category : Science
Languages : en
Pages : 961

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Book Description
The word tribology was fIrst reported in a landmark report by P. Jost in 1966 (Lubrication (Tribology)--A Report on the Present Position and Industry's Needs, Department of Education and Science, HMSO, London). Tribology is the science and technology of two interacting surfaces in relative motion and of related subjects and practices. The popular equivalent is friction, wear and lubrication. The economic impact of the better understanding of tribology of two interacting surfaces in relative motion is known to be immense. Losses resulting from ignorance of tribology amount in the United States alone to about 6 percent of its GNP or about $200 billion dollars per year (1966), and approximately one-third of the world's energy resources in present' use, appear as friction in one form or another. A fundamental understanding of the tribology of the head-medium interface in magnetic recording is crucial to the future growth of the $100 billion per year information storage industry. In the emerging microelectromechanical systems (MEMS) industry, tribology is also recognized as a limiting technology. The advent of new scanning probe microscopy (SPM) techniques (starting with the invention of the scanning tunneling microscope in 1981) to measure surface topography, adhesion, friction, wear, lubricant-fIlm thickness, mechanical properties all on a micro to nanometer scale, and to image lubricant molecules and the availability of supercomputers to conduct atomic-scale simulations has led to the development of a new fIeld referred to as Microtribology, Nanotribology, or Molecular Tribology (see B. Bhushan, J. N. Israelachvili and U.

Modern Tribology Handbook, Two Volume Set

Modern Tribology Handbook, Two Volume Set PDF Author: Bharat Bhushan
Publisher: CRC Press
ISBN: 0849377870
Category : Technology & Engineering
Languages : en
Pages : 1728

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Book Description
Recent research has led to a deeper understanding of the nature and consequences of interactions between materials on an atomic scale. The results have resonated throughout the field of tribology. For example, new applications require detailed understanding of the tribological process on macro- and microscales and new knowledge guides the rational

Handbook of Micro/Nano Tribology

Handbook of Micro/Nano Tribology PDF Author: Bharat Bhushan
Publisher: CRC Press
ISBN: 9781420050493
Category : Technology & Engineering
Languages : en
Pages : 884

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Book Description
This second edition of Handbook of Micro/Nanotribology addresses the rapid evolution within this field, serving as a reference for the novice and the expert alike. Two parts divide this handbook: Part I covers basic studies, and Part II addresses design, construction, and applications to magnetic storage devices and MEMS. Discussions include: surface physics and methods for physically and chemically characterizing solid surfaces roughness characterization and static contact models using fractal analysis sliding at the interface and friction on an atomic scale scratching and wear as a result of sliding nanofabrication/nanomachining as well as nano/picoindentation lubricants for minimizing friction and wear surface forces and microrheology of thin liquid films measurement of nanomechanical properties of surfaces and thin films atomic-scale simulations of interfacial phenomena micro/nanotribology and micro/nanomechanics of magnetic storage devices This comprehensive book contains 16 chapters contributed by more than 20 international researchers. In each chapter, the presentation starts with macroconcepts and then lead to microconcepts. With more than 500 illustrations and 50 tables, Handbook of Micro/Nanotribology covers the range of relevant topics, including characterization of solid surfaces, measurement techniques and applications, and theoretical modeling of interfaces. What's New in the Second Edition? New chapters on: AFM instrumentation Surface forces and adhesion Design and construction of magnetic storage devices Microdynamical devices and systems Mechanical properties of materials in microstructure Micro/nanotribology and micro/nanomechanics of MEMS devices

Nanotribology and Nanomechanics II

Nanotribology and Nanomechanics II PDF Author: Bharat Bhushan
Publisher: Springer Science & Business Media
ISBN: 3642152635
Category : Technology & Engineering
Languages : en
Pages : 1025

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Book Description
The comprehensive reference and textbook serves as a timely, practical introduction to the principles of nanotribology and nanomechanics. Assuming some familiarity with macroscopic tribology, the book comprises chapters by internationally recognized experts, who integrate knowledge of the field from the mechanics and materials-science perspectives. They cover key measurement techniques, their applications, and theoretical modelling of interfaces, each beginning their contributions with macro- and progressing to microconcepts.

Coatings Tribology

Coatings Tribology PDF Author: Kenneth Holmberg
Publisher: Elsevier
ISBN: 0080931464
Category : Technology & Engineering
Languages : en
Pages : 577

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Book Description
The surface coating field is a rapidly developing area of science and technology that offers new methods and techniques to control friction and wear. New coating types are continually being developed and the potential applications in different industrial fields are ever growing, ranging from machine components and consumer products to medical instruments and prostheses. This book provides an extensive review of the latest technology in the field, addressing techniques such as physical and chemical vapour deposition, the tribological properties of coatings, and coating characterization and performance evaluation techniques. Eleven different cases are examined in close detail to demonstrate the improvement of tribological properties and a guide to selecting coatings is also provided. This second edition is still the only monograph in the field to give a holistic view of the subject and presents all aspects, including test and performance data as well as insights into mechanisms and interactions, thus providing the level of understanding vital for the practical application of coatings. * An extensive review of the latest developments in the field of surface coatings* Presents both theory and practical applications* Includes a guide for selecting coatings

Nanotribology and Nanomechanics

Nanotribology and Nanomechanics PDF Author: Bharat Bhushan
Publisher: Springer Science & Business Media
ISBN: 3540776087
Category : Technology & Engineering
Languages : en
Pages : 1530

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Book Description
This volume serves as a timely, practical introduction to the principles of nanotribology and nanomechanics and applications to magnetic storage systems and MEMS/NEMS. Assuming some familiarity with macrotribology/mechanics, the book comprises chapters by internationally recognized experts, who integrate knowledge of the field from the mechanics and materials-science perspectives. Graduate students, research workers, and practicing engineers will find the book of value.

Springer Handbook of Nanotechnology

Springer Handbook of Nanotechnology PDF Author: Bharat Bhushan
Publisher: Springer Science & Business Media
ISBN: 3540012184
Category : Technology & Engineering
Languages : en
Pages : 1232

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Book Description
This major work has established itself as the definitive reference in the nanoscience and nanotechnology area in one volume. In presents nanostructures, micro/nanofabrication, and micro/nanodevices. Special emphasis is on scanning probe microscopy, nanotribology and nanomechanics, molecularly thick films, industrial applications and microdevice reliability, and on social aspects. Reflecting further developments, the new edition has grown from six to eight parts. The latest information is added to fields such as bionanotechnology, nanorobotics, and NEMS/MEMS reliability. This classic reference book is orchestrated by a highly experienced editor and written by a team of distinguished experts for those learning about the field of nanotechnology.