Thin Film Bulk Acoustic Wave Devices

Thin Film Bulk Acoustic Wave Devices PDF Author: Tuomas Pensala
Publisher:
ISBN: 9789513877224
Category : Radio filters
Languages : en
Pages :

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Book Description
Thin film bulk acoustic wave (BAW) resonators and filters operating in the GHz range are used in mobile phones for the most demanding filtering applications and complement the surface acoustic wave (SAW) based filters. Their main advantages are small size and high performance at frequencies above 2 GHz. This work concentrates on the characterization, performance optimization, and modelling techniques of thin film BAW devices. Laser interferometric vibration measurements together with plate wave dispersion modeling are used to extract the full set of elastic material parameters for sputter deposited ZnO, demonstrating a method for obtaining material data needed for accurate simulation of the devices. The effectiveness of the acoustic interference reflector used to isolate the vibration from the substrate is studied by 1-D modeling, 2-D finite element method and by electrical and laser interferometric measurements. It is found that the Q-value of reflector-based BAW resonators operating at 2 GHz is limited to approximately 2000 by mechanisms other than leakage through the reflector. Suppression of spurious resonances in ZnO resonators is studied in depth by modeling and measurements. It is verified that the approximate mode orthogonality is behind the suppression in boundary frame type ZnO devices operating in the piston mode, but also another narrow band mode suppression mechanism is found. A plate wave dispersion based 2-D simulation scheme for laterally acoustically coupled BAW resonator filters is developed and employed in designing of experimental devices, which show both good agreement with the model predictions and a remarkable 4.9 % relative bandwidth.

Thin Film Bulk Acoustic Wave Devices

Thin Film Bulk Acoustic Wave Devices PDF Author: Tuomas Pensala
Publisher:
ISBN: 9789513877224
Category : Radio filters
Languages : en
Pages :

Get Book Here

Book Description
Thin film bulk acoustic wave (BAW) resonators and filters operating in the GHz range are used in mobile phones for the most demanding filtering applications and complement the surface acoustic wave (SAW) based filters. Their main advantages are small size and high performance at frequencies above 2 GHz. This work concentrates on the characterization, performance optimization, and modelling techniques of thin film BAW devices. Laser interferometric vibration measurements together with plate wave dispersion modeling are used to extract the full set of elastic material parameters for sputter deposited ZnO, demonstrating a method for obtaining material data needed for accurate simulation of the devices. The effectiveness of the acoustic interference reflector used to isolate the vibration from the substrate is studied by 1-D modeling, 2-D finite element method and by electrical and laser interferometric measurements. It is found that the Q-value of reflector-based BAW resonators operating at 2 GHz is limited to approximately 2000 by mechanisms other than leakage through the reflector. Suppression of spurious resonances in ZnO resonators is studied in depth by modeling and measurements. It is verified that the approximate mode orthogonality is behind the suppression in boundary frame type ZnO devices operating in the piston mode, but also another narrow band mode suppression mechanism is found. A plate wave dispersion based 2-D simulation scheme for laterally acoustically coupled BAW resonator filters is developed and employed in designing of experimental devices, which show both good agreement with the model predictions and a remarkable 4.9 % relative bandwidth.

Multilayer Integrated Film Bulk Acoustic Resonators

Multilayer Integrated Film Bulk Acoustic Resonators PDF Author: Yafei Zhang
Publisher: Springer Science & Business Media
ISBN: 3642317766
Category : Technology & Engineering
Languages : en
Pages : 159

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Book Description
Mulilayer Integrated Film Bulk Acoustic Resonators mainly introduces the theory, design, fabrication technology and application of a recently developed new type of device, multilayer integrated film bulk acoustic resonators, at the micro and nano scale involving microelectronic devices, integrated circuits, optical devices, sensors and actuators, acoustic resonators, micro-nano manufacturing, multilayer integration, device theory and design principles, etc. These devices can work at very high frequencies by using the newly developed theory, design, and fabrication technology of nano and micro devices. Readers in fields of IC, electronic devices, sensors, materials, and films etc. will benefit from this book by learning the detailed fundamentals and potential applications of these advanced devices. Prof. Yafei Zhang is the director of the Ministry of Education’s Key Laboratory for Thin Films and Microfabrication Technology, PRC; Dr. Da Chen was a PhD student in Prof. Yafei Zhang’s research group.

RF Bulk Acoustic Wave Filters for Communications

RF Bulk Acoustic Wave Filters for Communications PDF Author: Ken-ya Hashimoto
Publisher: Artech House
ISBN: 1596933224
Category : Technology & Engineering
Languages : en
Pages : 293

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Book Description
This timely book presents a thorough overview of RF BAW filters, covering a vast range of technologies, optimal device design, filter topologies, packaging, fabrication processes, and high quality piezoelectric thin films. Moreover, the book discusses the integration of BAW filters in RF systems.

Tuneable Film Bulk Acoustic Wave Resonators

Tuneable Film Bulk Acoustic Wave Resonators PDF Author: Spartak Gevorgian
Publisher: Springer Science & Business Media
ISBN: 1447149440
Category : Technology & Engineering
Languages : en
Pages : 255

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Book Description
To handle many standards and ever increasing bandwidth requirements, large number of filters and switches are used in transceivers of modern wireless communications systems. It makes the cost, performance, form factor, and power consumption of these systems, including cellular phones, critical issues. At present, the fixed frequency filter banks based on Film Bulk Acoustic Resonators (FBAR) are regarded as one of the most promising technologies to address performance -form factor-cost issues. Even though the FBARs improve the overall performances the complexity of these systems remains high. Attempts are being made to exclude some of the filters by bringing the digital signal processing (including channel selection) as close to the antennas as possible. However handling the increased interference levels is unrealistic for low-cost battery operated radios. Replacing fixed frequency filter banks by one tuneable filter is the most desired and widely considered scenario. As an example, development of the software based cognitive radios is largely hindered by the lack of adequate agile components, first of all tuneable filters. In this sense the electrically switchable and tuneable FBARs are the most promising components to address the complex cost-performance issues in agile microwave transceivers, smart wireless sensor networks etc. Tuneable Film Bulk Acoustic Wave Resonators discusses FBAR need, physics, designs, modelling, fabrication and applications. Tuning of the resonant frequency of the FBARs is considered. Switchable and tuneable FBARs based on electric field induced piezoelectric effect in paraelectric phase ferroelectrics are covered. The resonance of these resonators may be electrically switched on and off and tuned without hysteresis. The book is aimed at microwave and sensor specialists in the industry and graduate students. Readers will learn about principles of operation and possibilities of the switchable and tuneable FBARs, and will be given general guidelines for designing, fabrication and applications of these devices.

Bulk acoustic wave devices utilizing ZnO thin-film interdigital transducers

Bulk acoustic wave devices utilizing ZnO thin-film interdigital transducers PDF Author: Yung-Chau Yen
Publisher:
ISBN:
Category : Electro-acoustics
Languages : en
Pages :

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Book Description


Acoustic Wave and Electromechanical Resonators

Acoustic Wave and Electromechanical Resonators PDF Author: Humberto Campanella
Publisher: Artech House
ISBN: 1607839784
Category : Technology & Engineering
Languages : en
Pages : 364

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Book Description
This groundbreaking book provides you with a comprehensive understanding of FBAR (thin-film bulk acoustic wave resonator), MEMS (microelectomechanical system), and NEMS (nanoelectromechanical system) resonators. For the first time anywhere, you find extensive coverage of these devices at both the technology and application levels. This practical reference offers you guidance in design, fabrication, and characterization of FBARs, MEMS and NEBS. It discusses the integration of these devices with standard CMOS (complementary-metal-oxide-semiconductor) technologies, and their application to sensing and RF systems. Moreover, this one-stop resource looks at the main characteristics, differences, and limitations of FBAR, MEMS, and NEMS devices, helping you to choose the right approaches for your projects. Over 280 illustrations and more than 130 equations support key topics throughout the book.

Synthesis, Microstructural Characterization and Properties of Thin Film Materials for Applications in High Frequency Bulk Acoustic Wave Devices

Synthesis, Microstructural Characterization and Properties of Thin Film Materials for Applications in High Frequency Bulk Acoustic Wave Devices PDF Author: Christof Metzmacher
Publisher:
ISBN: 9783861301509
Category : Acoustic surface wave devices
Languages : en
Pages : 156

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Book Description


Effects of strain in bulk and thin film surface acoustic wave devices

Effects of strain in bulk and thin film surface acoustic wave devices PDF Author: Ashok Laxmanrao Nalamwar
Publisher:
ISBN:
Category : Acoustic surface wave devices
Languages : en
Pages :

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Book Description


Techniques to Facilitate the Fabrication of ZnO-based Thin Film Bulk Acoustic Wave Devices

Techniques to Facilitate the Fabrication of ZnO-based Thin Film Bulk Acoustic Wave Devices PDF Author: Shawn L. Pinkett
Publisher:
ISBN:
Category : Resonators
Languages : en
Pages : 572

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Book Description


Piezoelectric MEMS Resonators

Piezoelectric MEMS Resonators PDF Author: Harmeet Bhugra
Publisher: Springer
ISBN: 3319286889
Category : Technology & Engineering
Languages : en
Pages : 423

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Book Description
This book introduces piezoelectric microelectromechanical (pMEMS) resonators to a broad audience by reviewing design techniques including use of finite element modeling, testing and qualification of resonators, and fabrication and large scale manufacturing techniques to help inspire future research and entrepreneurial activities in pMEMS. The authors discuss the most exciting developments in the area of materials and devices for the making of piezoelectric MEMS resonators, and offer direct examples of the technical challenges that need to be overcome in order to commercialize these types of devices. Some of the topics covered include: Widely-used piezoelectric materials, as well as materials in which there is emerging interest Principle of operation and design approaches for the making of flexural, contour-mode, thickness-mode, and shear-mode piezoelectric resonators, and examples of practical implementation of these devices Large scale manufacturing approaches, with a focus on the practical aspects associated with testing and qualification Examples of commercialization paths for piezoelectric MEMS resonators in the timing and the filter markets ...and more! The authors present industry and academic perspectives, making this book ideal for engineers, graduate students, and researchers.