Theory and Practice of Lithography PDF Download
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Author:
Publisher:
ISBN:
Category : Lithography
Languages : en
Pages : 109
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Book Description
Author:
Publisher:
ISBN:
Category : Lithography
Languages : en
Pages : 109
Get Book Here
Book Description
Author: Estados Unidos Government Printing Office
Publisher:
ISBN:
Category :
Languages : en
Pages : 109
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Book Description
Author: United States. Government Printing Office
Publisher:
ISBN:
Category :
Languages : en
Pages : 109
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Book Description
Author: United States. Government Printing Office
Publisher:
ISBN:
Category :
Languages : en
Pages : 122
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Book Description
Author: United States. Government Printing Office
Publisher:
ISBN:
Category : Lithography
Languages : en
Pages : 124
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Book Description
Author: B. W. Sansom
Publisher:
ISBN:
Category : Lithography
Languages : en
Pages : 67
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Book Description
Author: W. B. Wright
Publisher:
ISBN:
Category : Lithography
Languages : en
Pages : 0
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Book Description
Author: Benjamin William SANSOM
Publisher:
ISBN:
Category :
Languages : en
Pages :
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Book Description
Author: Harry J. Levinson
Publisher: SPIE Press
ISBN: 9780819456601
Category : Technology & Engineering
Languages : en
Pages : 446
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Book Description
Lithography is a field in which advances proceed at a swift pace. This book was written to address several needs, and the revisions for the second edition were made with those original objectives in mind. Many new topics have been included in this text commensurate with the progress that has taken place during the past few years, and several subjects are discussed in more detail. This book is intended to serve as an introduction to the science of microlithography for people who are unfamiliar with the subject. Topics directly related to the tools used to manufacture integrated circuits are addressed in depth, including such topics as overlay, the stages of exposure, tools, and light sources. This text also contains numerous references for students who want to investigate particular topics in more detail, and they provide the experienced lithographer with lists of references by topic as well. It is expected that the reader of this book will have a foundation in basic physics and chemistry. No topics will require knowledge of mathematics beyond elementary calculus.
Author: Uzodinma Okoroanyanwu
Publisher: SPIE Press
ISBN: 9781118030028
Category : Technology & Engineering
Languages : en
Pages : 0
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Book Description
Chemistry and Lithography provides a comprehensive treatment of the chemical phenomena in lithography in a manner that is accessible to a wide readership. The book presents topics on the optical and charged particle physics practiced in lithography, with a broader view of how the marriage between chemistry and optics has made possible the print and electronic revolutions of the digital age. The related aspects of lithography are thematically presented to convey a unified view of the developments in the field over time, from the very first recorded reflections on the nature of matter to the latest developments at the frontiers of lithography science and technology. Part I presents several important chemical and physical principles involved in the invention and evolution of lithography. Part II covers the processes for the synthesis, manufacture, usage, and handling of lithographic chemicals and materials. Part III investigates several important chemical and physical principles involved in the practice of lithography. Chemistry and Lithography is a useful reference for anyone working in the semiconductor industry.
