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Author: Ivor Brodie
Publisher: Springer Science & Business Media
ISBN: 1489921605
Category : Technology & Engineering
Languages : en
Pages : 518
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Book Description
The Physical Electronics Department of SRI International (formerly Stanford Research Institute) has been pioneering the development of devices fabricated to submicron tolerances for well over 20 years. In 1961, a landmark paper on electron-beam lithography and its associated technologies was published by K. R. Shoulderst (then at SRI), which set the stage for our subsequent efforts in this field. He had the foresight to believe that the building of such small devices was actually within the range of human capabilities. As a result of this initial momentum, our experience in the technologies associated with microfabrication has become remarkably comprehensive, despite the relatively small size of our research activity. We have frequently been asked to deliver seminars or provide reviews on various aspects of micro fabrication. These activities made us aware of the need for a comprehensive overview of the physics of microfabrication. We hope that this book will fill that need.
Author: Ivor Brodie
Publisher: Springer Science & Business Media
ISBN: 1489921605
Category : Technology & Engineering
Languages : en
Pages : 518
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Book Description
The Physical Electronics Department of SRI International (formerly Stanford Research Institute) has been pioneering the development of devices fabricated to submicron tolerances for well over 20 years. In 1961, a landmark paper on electron-beam lithography and its associated technologies was published by K. R. Shoulderst (then at SRI), which set the stage for our subsequent efforts in this field. He had the foresight to believe that the building of such small devices was actually within the range of human capabilities. As a result of this initial momentum, our experience in the technologies associated with microfabrication has become remarkably comprehensive, despite the relatively small size of our research activity. We have frequently been asked to deliver seminars or provide reviews on various aspects of micro fabrication. These activities made us aware of the need for a comprehensive overview of the physics of microfabrication. We hope that this book will fill that need.
Author: Sami Franssila
Publisher: John Wiley & Sons
ISBN: 0470020563
Category : Technology & Engineering
Languages : en
Pages : 424
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Book Description
Microfabrication is the key technology behind integrated circuits,microsensors, photonic crystals, ink jet printers, solar cells andflat panel displays. Microsystems can be complex, but the basicmicrostructures and processes of microfabrication are fairlysimple. Introduction to Microfabrication shows how the commonmicrofabrication concepts can be applied over and over again tocreate devices with a wide variety of structures andfunctions. Featuring: * A comprehensive presentation of basic fabrication processes * An emphasis on materials and microstructures, rather than devicephysics * In-depth discussion on process integration showing how processes,materials and devices interact * A wealth of examples of both conceptual and real devices Introduction to Microfabrication includes 250 homework problems forstudents to familiarise themselves with micro-scale materials,dimensions, measurements, costs and scaling trends. Both researchand manufacturing topics are covered, with an emphasis on silicon,which is the workhorse of microfabrication. This book will serve as an excellent first text for electricalengineers, chemists, physicists and materials scientists who wishto learn about microstructures and microfabrication techniques,whether in MEMS, microelectronics or emerging applications.
Author: Koji Sugioka
Publisher: Springer
ISBN: 3642105238
Category : Science
Languages : en
Pages : 353
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Book Description
Miniaturization and high precision are rapidly becoming a requirement for many industrial processes and products. As a result, there is greater interest in the use of laser microfabrication technology to achieve these goals. This book composed of 16 chapters covers all the topics of laser precision processing from fundamental aspects to industrial applications to both inorganic and biological materials. It reviews the sate of the art of research and technological development in the area of laser processing.
Author: Marc J. Madou
Publisher: CRC Press
ISBN: 1482274663
Category : Technology & Engineering
Languages : en
Pages : 1983
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Book Description
Now in its third edition, Fundamentals of Microfabrication and Nanotechnology continues to provide the most complete MEMS coverage available. Thoroughly revised and updated the new edition of this perennial bestseller has been expanded to three volumes, reflecting the substantial growth of this field. It includes a wealth of theoretical and practical information on nanotechnology and NEMS and offers background and comprehensive information on materials, processes, and manufacturing options. The first volume offers a rigorous theoretical treatment of micro- and nanosciences, and includes sections on solid-state physics, quantum mechanics, crystallography, and fluidics. The second volume presents a very large set of manufacturing techniques for micro- and nanofabrication and covers different forms of lithography, material removal processes, and additive technologies. The third volume focuses on manufacturing techniques and applications of Bio-MEMS and Bio-NEMS. Illustrated in color throughout, this seminal work is a cogent instructional text, providing classroom and self-learners with worked-out examples and end-of-chapter problems. The author characterizes and defines major research areas and illustrates them with examples pulled from the most recent literature and from his own work.
Author: Costas P. Grigoropoulos
Publisher: Cambridge University Press
ISBN: 052182172X
Category : Science
Languages : en
Pages : 413
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Book Description
Provides researchers and practitioners with the technical background to understand transport phenomena in laser microfabrication applications.
Author: Hiroaki Misawa
Publisher: John Wiley & Sons
ISBN: 3527608400
Category : Technology & Engineering
Languages : en
Pages : 403
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Book Description
A thorough introduction to 3D laser microfabrication technology, leading readers from the fundamentals and theory to its various potent applications, such as the generation of tiny objects or three-dimensional structures within the bulk of transparent materials. The book also presents new theoretical material on dielectric breakdown, allowing a better understanding of the differences between optical damage on surfaces and inside the bulk, as well as a look into the future. Chemists, physicists, materials scientists and engineers will find this a valuable source of interdisciplinary knowledge in the field of laser optics and nanotechnology.
Author: Tommaso Baldacchini
Publisher: William Andrew
ISBN: 0128178280
Category : Technology & Engineering
Languages : en
Pages : 762
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Book Description
Three-Dimensional Microfabrication Using Two-Photon Polymerization, Second Edition offers a comprehensive guide to TPP microfabrication and a unified description of TPP microfabrication across disciplines. It offers in-depth discussion and analysis of all aspects of TPP, including the necessary background, pros and cons of TPP microfabrication, material selection, equipment, processes and characterization. Current and future applications are covered, along with case studies that illustrate the book's concepts. This new edition includes updated chapters on metrology, synthesis and the characterization of photoinitiators used in TPP, negative- and positive-tone photoresists, and nonlinear optical characterization of polymers. This is an important resource that will be useful for scientists involved in microfabrication, generation of micro- and nano-patterns and micromachining. - Discusses the major types of nanomaterials used in the agriculture and forestry sectors, exploring how their properties make them effective for specific applications - Explores the design, fabrication, characterization and applications of nanomaterials for new Agri-products - Offers an overview of regulatory aspects regarding the use of nanomaterials for agriculture and forestry
Author: Chris Mack
Publisher: John Wiley & Sons
ISBN: 1119965071
Category : Technology & Engineering
Languages : en
Pages : 503
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Book Description
The fabrication of an integrated circuit requires a variety of physical and chemical processes to be performed on a semiconductor substrate. In general, these processes fall into three categories: film deposition, patterning, and semiconductor doping. Films of both conductors and insulators are used to connect and isolate transistors and their components. By creating structures of these various components millions of transistors can be built and wired together to form the complex circuitry of modern microelectronic devices. Fundamental to all of these processes is lithography, ie, the formation of three-dimensional relief images on the substrate for subsequent transfer of the pattern to the substrate. This book presents a complete theoretical and practical treatment of the topic of lithography for both students and researchers. It comprises ten detailed chapters plus three appendices with problems provided at the end of each chapter. Additional Information: Visiting http://www.lithoguru.com/textbook/index.html enhances the reader's understanding as the website supplies information on how you can download a free laboratory manual, Optical Lithography Modelling with MATLAB®, to accompany the textbook. You can also contact the author and find help for instructors.
Author: Suman Chakraborty
Publisher: Springer Science & Business Media
ISBN: 1441915435
Category : Technology & Engineering
Languages : en
Pages : 345
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Book Description
Microfluidics and Microfabrication discusses the interconnect between microfluidics, microfabrication and the life sciences. Specifically, this includes fundamental aspects of fluid mechanics in micro-scale and nano-scale confinements and microfabrication. Material is also presented discussing micro-textured engineered surfaces, high-performance AFM probe-based, micro-grooving processes, fabrication with metals and polymers in bio-micromanipulation and microfluidic applications. Editor Suman Chakraborty brings together leading minds in both fields who also: Cover the fundamentals of microfluidics in a manner accessible to multi-disciplinary researchers, with a balance of mathematical details and physical principles Discuss the explicit interconnection between microfluiodics and microfabrication from an application perspective Detail the amalgamation of microfluidics with logic circuits and applications in micro-electronics Microfluidics and Microfabrication is an ideal book for researchers, engineers and senior-level graduate students interested in learning more about the two fields.
Author: Andreas Manz
Publisher: Springer Science & Business Media
ISBN: 3540695443
Category : Science
Languages : en
Pages : 269
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Book Description
"WHAT DOES NOT NEED TO BE BIG, WILL BE SMALL", a word by an engineer at a recent conference on chips technology. This sentence is particularly true for chemistry. Microfabrication technology emerged from microelectronics into areas like mechanics and now chemistry and biology. The engineering of micron and submicron sized features on the surface of silicon, glass and polymers opens a whole new world. Micromotors smaller than human hair have been fabricated and they work fine. It is the declared goal of the authors to bring these different worlds together in this volume. Authors have been carefully chosen to guarantee for the quality of the contents. An engineer, a chemist or a biologist will find new impulses from the various chapters in this book.
