The Electron Beam Plasma and Its Applications to Microelectronics PDF Download
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Author: Zeng-qi Yu
Publisher:
ISBN:
Category : Electron beams
Languages : en
Pages : 504
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Book Description
Author: Zeng-qi Yu
Publisher:
ISBN:
Category : Electron beams
Languages : en
Pages : 504
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Book Description
Author: Francisco L. Tabarés
Publisher: CRC Press
ISBN: 1000245217
Category : Science
Languages : en
Pages : 322
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Book Description
This book is an up-to-date review of the most important plasma-based techniques for material modification, from microelectronics to biological materials and from fusion plasmas to atmospheric ones. Each its technical chapters is written by long-experienced, internationally recognised researchers. The book provides a deep and comprehensive insight into plasma technology and its associated elemental processes and is illustrated throughout with excellent figures and references to complement each section. Although some of the topics covered can be traced back several decades, care has been taken to emphasize the most recent findings and expected evolution. The first time the word ‘plasma’ appeared in print in a scientific text related to the study of electrical discharges in gases was 1928, when Irving Langmuir published his article ‘Oscillations in Ionized Gases’. It was the baptism of the predominant state of matter in the known universe (it is estimated that up to 99% of matter is plasma), although not on earth, where the conditions of pressure and temperature make normal the states of matter (solid, liquid, gas) which, in global terms, are exotic. It is enough to add energy to a solid (in the form of heat or electromagnetic radiation) to go into the liquid state, from which gas is obtained through an additional supply of energy. If we continue adding energy to the gas, we will partially or totally ionise it and reach a new state of matter, plasma, made up of free electrons, atoms and molecules (electrically neutral particles) and ions (endowed with a positive or a negative electric charge).
Author: Evgeniy G. Shustin
Publisher: Cambridge Scholars Publishing
ISBN: 1036405451
Category : Science
Languages : en
Pages : 115
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Book Description
This book contains information on scientific research and applications of a very diverse field of low temperature plasma physics – the interaction of electron beams with plasma and, as a consequence of this interaction, a beam plasma discharge. It contains detailed descriptions of the history of the relevant research, a review of experimental research of properties of the low-temperature plasma with an electron beam and beam plasma discharge, and presents the main results of beam plasma interaction theory. Most of the book is devoted to descriptions of applications of the plasma with a beam and beam plasma discharge in a variety of fields; from studies of the physics of near-Earth space using active geophysical experiments to the development of materials technologies for micro- and nanoelectronics and designs of plasma-filled electronic devices. This book will be useful as an introduction to this field for undergraduate and graduate students specializing in plasma physics, as well as for other specialists in various fields of physics and technologies.
Author: Toshiaki Makabe
Publisher: CRC Press
ISBN: 1482222051
Category : Science
Languages : en
Pages : 414
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Book Description
Beyond enabling new capabilities, plasma-based techniques, characterized by quantum radicals of feed gases, hold the potential to enhance and improve many processes and applications. Following in the tradition of its popular predecessor, Plasma Electronics, Second Edition: Applications in Microelectronic Device Fabrication explains the fundamental physics and numerical methods required to bring these technologies from the laboratory to the factory. Emphasizing computational algorithms and techniques, this updated edition of a popular monograph supplies a complete and up-to-date picture of plasma physics, computational methods, applications, and processing techniques. Reflecting the growing importance of computer-aided approaches to plasma analysis and synthesis, it showcases recent advances in fabrication from micro- and nano-electronics, MEMS/NEMS, and the biological sciences. A helpful resource for anyone learning about collisional plasma structure, function, and applications, this edition reflects the latest progress in the quantitative understanding of non-equilibrium low-temperature plasma, surface processing, and predictive modeling of the plasma and the process. Filled with new figures, tables, problems, and exercises, it includes a new chapter on the development of atmospheric-pressure plasma, in particular microcell plasma, with a discussion of its practical application to improve surface efficiency. The book provides an up-to-date discussion of MEMS fabrication and phase transition between capacitive and inductive modes in an inductively coupled plasma. In addition to new sections on the phase transition between the capacitive and inductive modes in an ICP and MOS-transistor and MEMS fabrications, the book presents a new discussion of heat transfer and heating of the media and the reactor. Integrating physics, numerical methods, and practical applications, this book equips you with the up-to-date understanding required to scale up lab breakthroughs into industrial innovations.
Author: University of Cambridge
Publisher:
ISBN:
Category :
Languages : en
Pages :
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Book Description
Author: Efim Oks
Publisher: John Wiley & Sons
ISBN: 3527609245
Category : Science
Languages : en
Pages : 181
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Book Description
This book fills the gap for a textbook describing this kind of electron beam source in a systematic and thorough manner: from physical processes of electron emission to examples of real plasma electron sources and their applications.
Author: Toshiaki Makabe
Publisher: CRC Press
ISBN: 1420012274
Category : Science
Languages : en
Pages : 355
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Book Description
Without plasma processing techniques, recent advances in microelectronics fabrication would not have been possible. But beyond simply enabling new capabilities, plasma-based techniques hold the potential to enhance and improve many processes and applications. They are viable over a wide range of size and time scales, and can be used for deposition,
Author: George Brewer
Publisher: Elsevier
ISBN: 0323153410
Category : Technology & Engineering
Languages : en
Pages : 377
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Book Description
Electron-Beam Technology in Microelectronic Fabrication presents a unified description of the technology of high resolution lithography. This book is organized into six chapters, each treating a major segment of the technology of high resolution lithography. The book examines topics such as the physics of interaction of the electrons with the polymer resist in which the patterns are drawn, the machines that generate and control the beam, and ways of applying electron-beam lithography in device fabrication and in the making of masks for photolithographic replication. Chapter 2 discusses fundamental processes by which patterns are created in resist masks. Chapter 3 describes electron-beam lithography machines, including some details of each of the major elements in the electron-optical column and their effect on the focused electron beam. Chapter 4 presents the use of electron-beam lithography to make discrete devices and integrated circuits. Chapter 5 looks at the techniques and economics of mask fabrication by the use of electron beams. Finally, Chapter 6 presents a comprehensive description and evaluation of the several high resolution replication processes currently under development. This book will be of great value to students and to engineers who want to learn the unique features of high resolution lithography so that they can apply it in research, development, or production of the next generation of microelectronic devices and circuits.
Author: Toshiaki Makabe
Publisher: CRC Press
ISBN: 9780750309769
Category : Science
Languages : en
Pages : 360
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Book Description
Without plasma processing techniques, recent advances in microelectronics fabrication would not have been possible. But beyond simply enabling new capabilities, plasma-based techniques hold the potential to enhance and improve many processes and applications. They are viable over a wide range of size and time scales, and can be used for deposition, etching, and even process monitoring and diagnosis. Plasma Electronics: Applications in Microelectronic Device Fabrication explains the fundamental physics and numerical methods necessary to bring these technologies from the laboratory to the factory. Beginning with an overview of the basic characteristics and applications of low-temperature plasma, preeminent experts Makabe and Petrovic explore the physics underlying the complex behavior of non-equilibrium (or low temperature) plasma. They discuss charged particle transport in general and in detail as well as macroscopic plasma characteristics and elementary processes in gas phase and on surfaces. After laying this groundwork, the book examines state-of-the-art computational methods for modeling plasma and reviews various important applications including inductively and capacitively coupled plasma, magnetically enhanced plasma, and various processing techniques, while numerous problems and worked examples reinforce the concepts. Uniquely combining physics, numerical methods, and practical applications, Plasma Electronics: Applications in Microelectronic Device Fabrication equips you with the knowledge necessary to scale up lab bench breakthroughs into industrial innovations.
Author: Shulim E. Tsimring
Publisher: John Wiley & Sons
ISBN: 0470053755
Category : Science
Languages : en
Pages : 599
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Book Description
This book focuses on a fundamental feature of vacuum electronics: the strong interaction of the physics of electron beams and vacuum microwave electronics, including millimeter-wave electronics. The author guides readers from the roots of classical vacuum electronics to the most recent achievements in the field. Special attention is devoted to the physics and theory of relativistic beams and microwave devices, as well as the theory and applications of specific devices.
