The Development of a Miniaturized Heater for Thin Film Oxygen Partial Pressure Sensors PDF Download
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Author: Carl Raymond Pearson
Publisher:
ISBN:
Category : Oxygen
Languages : en
Pages : 88
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Book Description
Author: Carl Raymond Pearson
Publisher:
ISBN:
Category : Oxygen
Languages : en
Pages : 88
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Book Description
Author: Carl R. Pearson
Publisher:
ISBN:
Category : Pressure transducers
Languages : en
Pages : 28
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Author:
Publisher:
ISBN:
Category :
Languages : en
Pages : 464
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Author: J. J. Wortman
Publisher:
ISBN:
Category : Oxygen
Languages : en
Pages : 100
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Book Description
The development is described of a laboratory model oxygen partial pressure sensor using a sputtered zinc oxide thin film. The film is operated at about 400 C through the use of a miniature silicon bar. Because of the unique resistance versus temperature relation of the silicon bar, control of the operational temperature is achieved by controlling the resistance. A circuit for accomplishing this is described. The response of sputtered zinc oxide films of various thicknesses to oxygen, nitrogen, argon, carbon dioxide, and water vapor caused a change in the film resistance. Over a large range, film conductance varied approximately as the square root of the oxygen partial pressure. The presence of water vapor in the gas stream caused a shift in the film conductance at a given oxygen partial pressure. A theoretical model is presented to explain the characteristic features of the zinc oxide response to oxygen.
Author: J. J. Wortman
Publisher:
ISBN:
Category : Oxygen
Languages : en
Pages : 100
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Book Description
The development is described of a laboratory model oxygen partial pressure sensor using a sputtered zinc oxide thin film. The film is operated at about 400 C through the use of a miniature silicon bar. Because of the unique resistance versus temperature relation of the silicon bar, control of the operational temperature is achieved by controlling the resistance. A circuit for accomplishing this is described. The response of sputtered zinc oxide films of various thicknesses to oxygen, nitrogen, argon, carbon dioxide, and water vapor caused a change in the film resistance. Over a large range, film conductance varied approximately as the square root of the oxygen partial pressure. The presence of water vapor in the gas stream caused a shift in the film conductance at a given oxygen partial pressure. A theoretical model is presented to explain the characteristic features of the zinc oxide response to oxygen.
Author:
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ISBN:
Category : Aeronautics
Languages : en
Pages : 1330
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Author:
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ISBN:
Category : Chemistry
Languages : en
Pages : 536
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Author:
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ISBN:
Category : Science
Languages : en
Pages : 1056
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Author:
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ISBN:
Category : Research
Languages : en
Pages : 1424
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Author:
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ISBN:
Category : Engineering
Languages : en
Pages : 968
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